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1. 发明授权

US5750987A Ion beam processing apparatus 失效
标题翻译：离子束处理装置
公开(公告)号：US5750987A
公开(公告)日：1998-05-12
申请号：US636974
申请日：1996-04-24
申请人： Satoshi Ichimura , Tadashi Sato , Kenzo Kobayashi , Shotaro Ohishi , Hisao Oonuki
发明人： Satoshi Ichimura , Tadashi Sato , Kenzo Kobayashi , Shotaro Ohishi , Hisao Oonuki
IPC分类号： H05H1/46 , C23F4/00 , H01J27/16 , H01J27/18 , H01J37/02 , H01J37/08 , H01J37/30 , H01J37/305 , H01L21/302 , H01L21/3065 , H05H3/00
CPC分类号： H01J37/026 , H01J27/18 , H01J37/3053 , H01J2237/0041
摘要： When neutralized plasma is generated, the cylindrical electrode 8 is set at a negative potential against the processing chamber 23 by the DC power source 18, so that ions 23 in the neutralized plasma can be collected at the cylindrical electrode 8. Electrons 24 equal to the collected ion charge can be supplied uniformly toward the ion beam 25. Therefore, by allowing the cylindrical electrode to collect ions, the ion collection area can be spread easily, and only by generating neutralized plasma of low density, a sufficient volume of ions can be collected surely from the plasma and a sufficient volume of electrons can be supplied to the ion beam 25 at the same time.
摘要翻译：当产生中和的等离子体时，通过直流电源18将圆柱形电极8设置在处理室23的负电位，使得中和的等离子体中的离子23可以被收集在圆柱形电极8上。等于收集的离子电荷可以均匀地供给到离子束25.因此，通过使圆柱形电极收集离子，离子收集区域可以容易地扩散，并且只有通过产生低密度的中和等离子体，可以有足够的离子体积从等离子体中可靠地收集，并且可以同时向离子束25供应足够的体积的电子。

2. 发明授权

US5961773A Plasma processing apparatus and plasma processing method using the same 失效
标题翻译：等离子体处理装置和使用其的等离子体处理方法
公开(公告)号：US5961773A
公开(公告)日：1999-10-05
申请号：US823835
申请日：1997-03-25
申请人： Satoshi Ichimura , Tadashi Sato , Isao Hashimoto
发明人： Satoshi Ichimura , Tadashi Sato , Isao Hashimoto
IPC分类号： H05H1/46 , C23C14/48 , C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H05H1/00
CPC分类号： H01J37/32082 , H01J37/32623 , H01J37/32688
摘要： A plasma processing apparatus is provided with at least one waveguide portion for introducing microwaves, an electron heating space chamber formed on a downstream side with respect to a dielectric body in the waveguide portion, and a plasma generating space chamber coupled with the electron heating space chamber. A first static magnetic field generating device surrounds the electron heating space chamber using permanent magnets, producing a strong magnetic field exceeding an electron cyclotron resonance magnetic field strength along a propagation direction of the microwave in the electron heating space chamber and in a microwave leading-out portion of the dielectric body, and forming a cusped magnetic field. This cusped magnetic field falls steeply from a position of electron cyclotron resonance magnetic field strength to a boundary portion between the electron heating space chamber and the plasma generating space chamber and its direction is reversed to that of the strong magnetic field with decreasing distance from the boundary portion between the electron heating space chamber and the plasma generating space chamber to the plasma generating space chamber. A second static magnetic field generating device is provided with permanent magnets arranged around the plasma generating space chamber. Adjacent ones of the permanent magnets have polarities opposite to each other.
摘要翻译：等离子体处理装置设置有至少一个用于引入微波的波导部分，形成在波导部分中的介电体的下游侧的电子加热空间室，以及与电子加热空间室。第一静磁场产生装置使用永磁体围绕电子加热空间室，沿着电子加热空间室中的微波的传播方向产生超过电子回旋共振磁场强度的强磁场和微波输出电介质体的一部分，并且形成一个可选的磁场。该电磁场强度从电子回旋共振磁场强度的位置急剧下降到电子加热空间室和等离子体发生空间室之间的边界部分，并且其方向与强磁场的方向相反，与边界的距离减小电子加热空间室和等离子体产生空间室之间的部分到等离子体产生空间室。第二静磁场产生装置设置有围绕等离子体产生空间室布置的永磁体。相邻的永磁体具有彼此相反的极性。

3. 发明授权

US06332947B1 Plasma processing apparatus and plasma processing method using the same 失效
标题翻译：等离子体处理装置和使用其的等离子体处理方法
公开(公告)号：US06332947B1
公开(公告)日：2001-12-25
申请号：US09245086
申请日：1999-02-05
申请人： Satoshi Ichimura , Tadashi Sato , Isao Hashimoto
发明人： Satoshi Ichimura , Tadashi Sato , Isao Hashimoto
IPC分类号： H05H100
CPC分类号： H01J37/32082 , H01J37/32623 , H01J37/32688
摘要： A plasma processing apparatus is provided with at least one waveguide portion for introducing microwaves, an electron heating space chamber formed on a downstream side with respect to a dielectric body in the waveguide portion, and a plasma generating space chamber coupled with the electron heating space chamber. A first static magnetic field generating device surrounds the electron heating space chamber using permanent magnets, producing a strong magnetic field exceeding an electron cyclotron resonance magnetic field strength along a propagation direction of the microwave in the electron heating space chamber and in a microwave leading-out portion of the dielectric body, and forming a cusped magnetic field. This cusped magnetic field falls steeply from a position of electron cyclotron resonance magnetic field strength to a boundary portion between the electron heating space chamber and the plasma generating space chamber and its direction is reversed to that of the strong magnetic field with decreasing distance from the boundary portion between the electron heating space chamber and the plasma generating space chamber to the plasma generating space chamber. A second static magnetic field generating device is provided with permanent magnets arranged around the plasma generating space chamber. Adjacent ones of the permanent magnets have polarities opposite to each other.
摘要翻译：等离子体处理装置设置有至少一个用于引入微波的波导部分，形成在波导部分中的介电体的下游侧的电子加热空间室，以及与电子加热空间室。第一静磁场产生装置使用永磁体围绕电子加热空间室，沿着电子加热空间室中的微波的传播方向产生超过电子回旋共振磁场强度的强磁场和微波输出电介质体的一部分，并且形成一个可选的磁场。该电磁场强度从电子回旋共振磁场强度的位置急剧下降到电子加热空间室和等离子体发生空间室之间的边界部分，并且其方向与强磁场的方向相反，与边界的距离减小电子加热空间室和等离子体产生空间室之间的部分到等离子体产生空间室。第二静磁场产生装置设置有围绕等离子体产生空间室布置的永磁体。相邻的永磁体具有彼此相反的极性。

4. 发明授权

US5620522A Microwave plasma generator 失效
标题翻译：微波等离子发生器
公开(公告)号：US5620522A
公开(公告)日：1997-04-15
申请号：US534063
申请日：1995-09-26
申请人： Satoshi Ichimura , Tadashi Sato , Takashi Iga , Kenichi Natsui
发明人： Satoshi Ichimura , Tadashi Sato , Takashi Iga , Kenichi Natsui
IPC分类号： H01J27/18 , H01J37/08 , H01J37/32 , C23C16/00
CPC分类号： H01J37/32192 , H01J37/32633 , H01J37/32697
摘要： A microwave plasma generator, wherein permanent magnets 3 forms intense magnetic field exceeding an intensity of electron cyclotron resonance magnetic field at microwave exit 6a of a dielectric body in an electron heating space chamber, the intensity of the magnetic field formed by the permanent magnet decreases rapidly to the zero at a point 14 in the vicinity of the boundary of the electronic heating space camber 1 and a plasma generating space chamber 2, and accordingly, most of electrons can be absorbed into electrons to heat and form high energy electrons at a position 12a-12c in electron cyclotron resonance layer 12.
摘要翻译：一种微波等离子体发生器，其中，永久磁铁3在电子加热空间室内形成超过电介质体的微波出口6a处的电子回旋共振磁场强度的强磁场，由永磁体形成的磁场强度急剧下降到电子加热空间弧度1的边界附近的点14处的零点和等离子体产生空间室2，因此，大部分电子可以被吸收到电子中以在位置12a处加热并形成高能电子 -12c的电子回旋共振层12。

5. 发明授权

US5894306A Data display device and data record/playback device displaying consecutive data and user input in association with each other 失效
标题翻译：显示连续数据和用户输入的数据显示设备和数据记录/回放设备相互关联
公开(公告)号：US5894306A
公开(公告)日：1999-04-13
申请号：US901699
申请日：1997-07-28
申请人： Satoshi Ichimura
发明人： Satoshi Ichimura
IPC分类号： H04N7/15 , G06F3/033 , G06F3/048 , G06F19/00 , G06Q10/00 , G06Q10/06 , G06Q10/10 , G06Q50/00 , G06Q50/30 , G06Q50/32 , G11B27/02 , H04M3/42 , H04M3/56 , H04M11/10 , H04N1/21 , G06F3/00
CPC分类号： G06F3/0488 , G06F3/033
摘要： This invention provides a data record/playback device that retrieves stored data by specifying user-input data, and makes the retrieving easier. The data record/playback device, having: user input unit for receiving user input from a user; user input detector for detecting the user input through the user input unit; consecutive data input unit for receiving consecutive data including at least one of audio data and image data; consecutive data storage for storing consecutive data received by the consecutive data input unit; state detector for detecting a state that includes at least one of circumstantial information and eventual information about a moment when the user input detector detects the user input; association data storage for storing association data that includes the user input detected by the user input detector, the state detected by the state detector, and the storage position where the consecutive data is stored in association with each other; and display unit for displaying the user input detected by the user input detector and the state detected by the state detector in association with each other in accordance with the association data stored in the association storage.
摘要翻译：本发明提供了一种通过指定用户输入数据来检索存储的数据并且使检索更容易的数据记录/回放设备。数据记录/回放装置，具有：用户接收来自用户的用户输入的用户输入单元; 用户输入检测器，用于通过用户输入单元检测用户输入; 连续数据输入单元，用于接收包括音频数据和图像数据中的至少一个的连续数据; 用于存储由连续数据输入单元接收的连续数据的连续数据存储器; 状态检测器，用于检测包括关于当用户输入检测器检测到用户输入的时刻的环境信息和最终信息中的至少一个的状态; 关联数据存储器，用于存储包括由用户输入检测器检测到的用户输入的关联数据，由状态检测器检测的状态以及连续数据相互关联的存储位置; 以及显示单元，用于根据存储在关联存储器中的关联数据，相关联地显示由用户输入检测器检测到的用户输入和状态检测器检测到的状态。

6. 发明授权

US06195093B1 Systems and method for controlling a presentation using physical objects 有权
标题翻译：使用物理对象控制演示的系统和方法
公开(公告)号：US06195093B1
公开(公告)日：2001-02-27
申请号：US09152677
申请日：1998-09-14
申请人： Lester D. Nelson , Lia Adams , Satoshi Ichimura , Elin Ronby Pedersen , Stephen W. Smoliar
发明人： Lester D. Nelson , Lia Adams , Satoshi Ichimura , Elin Ronby Pedersen , Stephen W. Smoliar
IPC分类号： G06F300
CPC分类号： G06F3/002
摘要： A presentation control system and method facilitates the interaction between a user and a presentation device. The user generates tangible sensible identification devices, which are linked to items to be displayed in a presentation. In use, the user places the tangible sensible identification-carrying device, in the sensible area of an identification sensing device. The identification sensing device reads a presentation element identification from the identification-carrying device and determines a presentation element identified by the presentation element identification. The presentation element is then displayed via a presentation display device.
摘要翻译：呈现控制系统和方法有助于用户和呈现设备之间的交互。用户产生有形的敏感识别装置，其与要显示在呈现中的项目相关联。在使用中，用户将有形的识别识别携带装置放置在识别感测装置的敏感区域中。识别感测装置从识别携带装置读取表示元素识别，并确定由表示元素识别识别的呈现元素。然后通过演示显示装置显示演示元素。

7. 发明授权

US06188831B1 Data storage/playback device and method 失效
标题翻译：数据存储/播放设备及方法
公开(公告)号：US06188831B1
公开(公告)日：2001-02-13
申请号：US09014163
申请日：1998-01-27
申请人： Satoshi Ichimura
发明人： Satoshi Ichimura
IPC分类号： H04N591
CPC分类号： H04N9/7921 , H04N5/9261 , H04N5/9265
摘要： The invention provides a data storage/playback device and method. The data storage/playback device includes at least one time-series data pickup device, a time-series data storage, at least one user input detector and a controller. The controller acts to control the storage and playback of time-series data. The controller further includes a correspondence-relationship storing section, a compression section, a condition-matching section and a playback section. The controller determines important intervals of time-series data and intervals of less important time-series data. Based on this determination, the compression section of the controller compresses the important interval time-series data using a different compression process from that of the less important time-series data. Thus, the important interval time-series data is maintained with high quality and storage space is conserved.
摘要翻译：本发明提供了一种数据存储/播放装置和方法。数据存储/重放装置包括至少一个时间序列数据拾取装置，时间序列数据存储器，至少一个用户输入检测器和控制器。控制器用于控制时间序列数据的存储和播放。控制器还包括对应关系存储部分，压缩部分，条件匹配部分和重放部分。控制器确定时间序列数据的重要间隔和不太重要的时间序列数据的间隔。基于该确定，控制器的压缩部使用与较不重要的时间序列数据不同的压缩处理来压缩重要间隔时间序列数据。因此，重要的间隔时间序列数据以高质量保持，储存空间得到保护。

8. 发明授权

US06184625B2 Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly 失效
标题翻译：离子束处理装置，用于处理工件，离子束被均匀中和
公开(公告)号：US06184625B2
公开(公告)日：2001-02-06
申请号：US09327502
申请日：1999-06-08
申请人： Satoshi Ogura , Shotaro Ooishi , Isao Hashimoto , Satoshi Ichimura
发明人： Satoshi Ogura , Shotaro Ooishi , Isao Hashimoto , Satoshi Ichimura
IPC分类号： H01J724
CPC分类号： H01J37/08 , H01J27/18 , H01J2237/0041 , H01J2237/0817 , H01J2237/3142
摘要： In order to uniformly neutralize a large current and a large diameter ion beam so as to irradiate an ion beam having a reduced beam divergence on a process target, an ion beam processing apparatus comprises an ion source for producing a processing plasma, a processing chamber as a vacuum chamber for accommodating a process target, an extract electrode for extracting an ion beam so as to irradiate on said process target, an annular electrode disposed in said processing chamber for forming an annular magnetic field therein, through which said ion beam is irradiated on said process, and a wave guide for introducing microwave through an opening provided on a wall forming said processing chamber, into said annular magnetic field.
摘要翻译：为了均匀地中和大电流和大直径的离子束，以便在工艺靶上照射具有减小的光束发散的离子束，离子束处理装置包括用于产生处理等离子体的离子源，处理室用于容纳处理目标的真空室，用于提取离子束以便照射在所述处理目标上的提取电极，设置在所述处理室中的环形电极，用于在其中形成环形磁场，通过该环形电极照射所述离子束所述方法和用于通过设置在形成所述处理室的壁上的开口引入微波的波导到所述环形磁场中。

9. 发明授权

US5996002A Collaborative work support system and method to facilitate the process of discussion in a meeting using a shared window 失效
标题翻译：协调工作支持系统和方法，以便在会议中使用共享窗口促进讨论过程
公开(公告)号：US5996002A
公开(公告)日：1999-11-30
申请号：US898932
申请日：1997-07-23
申请人： Hiroshi Katsurabayashi , Satoshi Ichimura
发明人： Hiroshi Katsurabayashi , Satoshi Ichimura
IPC分类号： G06F3/048 , G06F3/033 , G06F3/14 , G06F13/00 , G06F15/00
CPC分类号： G06F3/1454 , G06F3/0481
摘要： A collaborative work support system that is performed on plural computers each of which is assigned for an operator, and supports collaborative work in which the plural computers display common data and each operator operates the displayed common data through his own computer. The collaborative work support system includes: a shared data storage for storing shared data to be displayed on each computer; an individual data storage for storing individual data, which is individually created by a specific operator and individually displayed on any of the computers; an individual data sender for sending the individual data to other computers in response to a command from the specific operator who created the individual data so as to display the individual data on other computers as created shared data; and a manager for managing so that the individual data is stored in the shared data storage with other data associated with the individual data as a unit of storage.
摘要翻译：一种在多台计算机上执行的协同工作支持系统，每个计算机被分配给操作员，并且支持多个计算机显示公共数据的协作工作，并且每个操作者通过他自己的计算机操作所显示的公共数据。协同工作支持系统包括：用于存储要显示在每台计算机上的共享数据的共享数据存储器; 用于存储单个数据的单独数据存储器，其由特定操作者单独创建并且单独显示在任何计算机上; 单个数据发送器，用于响应于来自创建单独数据的特定操作者的命令将各个数据发送到其他计算机，以便将其他计算机上的各个数据显示为已创建的共享数据; 以及用于管理的管理器，使得各个数据以作为存储单元的与各个数据相关联的其他数据存储在共享数据存储器中。

10. 发明授权

US07364917B2 Apparatus and method for detecting vaporized gas 有权
标题翻译：用于检测汽化气体的装置和方法
公开(公告)号：US07364917B2
公开(公告)日：2008-04-29
申请号：US10809355
申请日：2004-03-26
申请人： Satoshi Ichimura , Masami Sakamoto , Toshio Iwasaki
发明人： Satoshi Ichimura , Masami Sakamoto , Toshio Iwasaki
IPC分类号： G01N33/00
CPC分类号： G01N1/2214 , G01N1/24 , G01N1/44 , G01N35/00009 , G01N2001/022 , G01N2001/028 , G01N2001/4027 , Y10T436/25875
摘要： For detecting a component of a substance (of liquid or solid) on a front surface of a substrate, the substrate with the substance thereon is transferred into a vaporizing section, the substance is heated in the vaporizing section so that the component is vaporized from the substance in the vaporizing section, the component vaporized is fed from the substance in the vaporizing section to a detecting section, and the vaporized component is detected in the detecting section.
摘要翻译：为了检测基板表面上的液体或固体物质的成分，将其上物质的基板转移到蒸发部分中，在蒸发部分中加热该物质，从而使成分从蒸发部分中的物质，蒸发的成分从蒸发部分中的物质进料到检测部分，并且在检测部分中检测蒸发的成分。

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