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    • 6. 发明授权
    • Vapor deposition device, vapor deposition method, and organic EL display device
    • 气相沉积装置,气相沉积法和有机EL显示装置
    • US09240572B2
    • 2016-01-19
    • US13984799
    • 2012-03-02
    • Shinichi KawatoSatoshi InoueTohru SonodaSatoshi Hashimoto
    • Shinichi KawatoSatoshi InoueTohru SonodaSatoshi Hashimoto
    • H01L51/56C23C14/04C23C14/12C23C14/56C23C16/455H01L51/00
    • H01L51/56C23C14/044C23C14/12C23C14/562C23C16/45578H01L51/0011
    • A vapor deposition device includes a vapor deposition source (60) having a plurality of vapor deposition source openings (61) that discharge vapor deposition particles (91), a limiting unit (80) having a plurality of limiting openings (82), and a vapor deposition mask (70) in which a plurality of mask openings (71) are formed only in a plurality of vapor deposition regions (72) where the vapor deposition particles that have passed through a plurality of limiting openings reach. The plurality of vapor deposition regions are arranged along a second direction that is orthogonal to the normal line direction of the substrate (10) and the movement direction of the substrate, with non-vapor deposition regions (73) where the vapor deposition particles do not reach being sandwiched therebetween. Mask openings through which the vapor deposition particles pass are formed at different positions in the movement direction of the substrate from the positions of the non-vapor deposition regions located on a straight line parallel to the second direction, as viewed along the normal line direction of the substrate. Accordingly, it is possible to stably form a vapor deposition coating film in which edge blurring is suppressed at a desired position on a substrate.
    • 蒸镀装置包括:蒸镀源(60),具有排出气相沉积粒子(91)的多个气相沉积源开口(61),具有多个限制开口(82)的限制单元(80) 气相沉积掩模(70),其中多个掩模开口(71)仅形成在已经通过多个限制孔的气相沉积颗粒到达的多个气相沉积区(72)中。 多个气相沉积区域沿着与基板(10)的法线方向正交的第二方向和基板的移动方向排列,其中气相沉积微粒不具有非气相沉积区域(73) 夹在其间。 沿着平行于第二方向的直线上的非蒸镀区域的位置,沿着基板的移动方向的不同位置,沿蒸镀粒子的法线方向 底物。 因此,可以稳定地形成在基板上的期望位置抑制边缘模糊的气相沉积涂膜。
    • 9. 发明申请
    • VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE
    • 蒸气沉积装置,蒸发沉积方法和用于生产有机EL显示装置的方法
    • US20140004641A1
    • 2014-01-02
    • US14004896
    • 2012-03-09
    • Tohru SonodaShinichi KawatoSatoshi InoueSatoshi Hashimoto
    • Tohru SonodaShinichi KawatoSatoshi InoueSatoshi Hashimoto
    • H01L51/56
    • H01L51/56C23C14/042C23C14/12C23C14/243H05B33/10
    • A vapor deposition device (1) performs a vapor deposition treatment to form a luminescent layer (47) having a predetermined pattern on a film formation substrate (40). The vapor deposition device includes: a nozzle (13) having a plurality of injection holes (16) from which vapor deposition particles (17), which constitute the luminescent layer, are injected toward the film formation substrate when the vapor deposition treatment is carried out; and a plurality of control plates (20) provided between the nozzle and the film formation substrate and restricting an incident angle, with respect to the film formation substrate, of the vapor deposition particles injected from the plurality of injection holes. The nozzle includes: a nozzle main body (14b) in a container shape having an opening (14c) on a surface thereof on a film formation substrate side and (ii) a plurality of blocks (15) covering the opening and separated from each other, each of the plurality of blocks having the plurality of injection holes. The above arrangement allows a vapor-deposited film pattern to be formed with high definition.
    • 蒸镀装置(1)进行蒸镀处理,在成膜基板(40)上形成具有规定图案的发光层(47)。 气相沉积装置包括:具有多个喷射孔(16)的喷嘴(13),当进行气相沉积处理时,构成发光层的气相沉积颗粒(17)从该注入孔喷射到成膜基底 ; 以及设置在喷嘴和成膜基板之间的多个控制板(20),并且限制从多个喷射孔喷射的气相沉积颗粒相对于成膜基板的入射角。 喷嘴包括:容器形状的喷嘴主体(14b),其在成膜基板侧的表面上具有开口(14c),和(ii)覆盖开口并分离的多个块体(15) 所述多个块中的每个具有所述多个喷射孔。 上述布置允许以高清晰度形成气相沉积膜图案。