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    • 2. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US08632688B2
    • 2014-01-21
    • US13236800
    • 2011-09-20
    • Masaru IzawaKouichi YamamotoKenji NakataAtsushi Itou
    • Masaru IzawaKouichi YamamotoKenji NakataAtsushi Itou
    • G01L21/30G01R31/00
    • H01J37/32972H01J37/32899H01L21/32137
    • In a plasma processing apparatus in which a wafer is processed while supplying radio frequency power to electrodes disposed in a sample stage in a processing chamber within a reactor via a matching box, by matching a specific value of power at transition points of data values of at least two kinds among characteristic data including light emission intensity of the plasma, magnitude of its time variation, a matching position of the matching box, and a change of a value of a voltage of the radio frequency power supplied to the electrodes detected by varying the power to a plurality of values during the processing with a value detected by using characteristic data which is detected during the processing executed on a wafer of the same kind in a different reactor, the differences of the states inside the processing chamber or plasma among a plurality of semiconductor processing apparatuses or reactors are reduced.
    • 在等离子体处理装置中,其中通过匹配箱向电抗器内的处理室内的设置在样品台中的电极提供射频功率,通过匹配在at的数据值的转换点处的功率的特定值来处理晶片 特征数据中包括等离子体的发光强度,其时间变化的大小,匹配箱的匹配位置以及提供给电极的射频功率的电压值的变化等特性数据中的至少两种, 在处理期间利用通过使用在不同反应器中的相同晶片上执行的处理期间检测到的特征数据检测到的值而获得多个值的功率,多个处理室或等离子体之间的状态之间的差异 的半导体处理装置或反应堆。
    • 3. 发明申请
    • PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • 等离子体加工设备和等离子体处理方法
    • US20130045547A1
    • 2013-02-21
    • US13236800
    • 2011-09-20
    • Masaru IZAWAKouichi YamamotoKenji NakataAtsushi Itou
    • Masaru IZAWAKouichi YamamotoKenji NakataAtsushi Itou
    • H01L21/66C23F1/08
    • H01J37/32972H01J37/32899H01L21/32137
    • In a plasma processing apparatus in which a wafer is processed while supplying radio frequency power to electrodes disposed in a sample stage in a processing chamber within a reactor via a matching box, by matching a specific value of power at transition points of data values of at least two kinds among characteristic data including light emission intensity of the plasma, magnitude of its time variation, a matching position of the matching box, and a change of a value of a voltage of the radio frequency power supplied to the electrodes detected by varying the power to a plurality of values during the processing with a value detected by using characteristic data which is detected during the processing executed on a wafer of the same kind in a different reactor, the differences of the states inside the processing chamber or plasma among a plurality of semiconductor processing apparatuses or reactors are reduced.
    • 在等离子体处理装置中,其中通过匹配箱向电抗器内的处理室内的设置在样品台中的电极提供射频功率,通过匹配在at的数据值的转换点处的功率的特定值来处理晶片 特征数据中包括等离子体的发光强度,其时间变化的大小,匹配箱的匹配位置以及提供给电极的射频功率的电压值的变化等特性数据中的至少两种, 在处理期间利用通过使用在不同反应器中的相同晶片上执行的处理期间检测到的特征数据检测到的值而获得多个值的功率,多个处理室或等离子体之间的状态之间的差异 的半导体处理装置或反应堆。
    • 8. 发明授权
    • Earthquake-proof bed
    • 防震床
    • US5615424A
    • 1997-04-01
    • US518933
    • 1995-08-24
    • Kenji Nakata
    • Kenji Nakata
    • A47C29/00A47C19/22
    • A47C31/002
    • An earthquake-proof bed having a superior endurance property is constructed of approximately box-shaped metallic panels and contains necessities in the event of an earthquake, such as tools for escaping and food in tool boxes installed under the bed. This earthquake-proof bed includes box-shaped metallic panels. Each panel is shaped with a plurality of frames and a pair of metal plates fixed on both sides of the frames. A plurality of tool boxes is installed on the bottom metallic panel. The plurality of tool boxes is formed by dividing plates. A plurality of lids covers the tool boxes, and an opening is shaped on any one of the metal panels. Bedding is provided on the lids.
    • 具有优异耐久性的防震床由大致为箱状的金属板构成,并且在发生地震的情况下包含必需品,例如用于逃逸的工具和安装在床下方的工具箱中的食物。 该防震床包括箱形金属板。 每个面板成形为具有多个框架和一对固定在框架两侧的金属板。 多个工具箱安装在底部金属面板上。 多个工具箱由分隔板形成。 多个盖子覆盖工具箱,并且开口在任何一个金属板上成形。 盖子上设有床上用品。
    • 9. 发明授权
    • Harness producing apparatus and method
    • 线束产生装置及方法
    • US4862587A
    • 1989-09-05
    • US158287
    • 1988-02-19
    • Kenji NakataKyo TomonariTakeo Yamanaka
    • Kenji NakataKyo TomonariTakeo Yamanaka
    • H01R43/048H01R43/05H01R43/052H01R43/055
    • H01R43/048H01R43/05H01R43/052H01R43/055Y10T29/49192Y10T29/49201Y10T29/514Y10T29/5142Y10T29/53235
    • A wire harness is produced by attaching terminals to one of the respective ends of a plurality of wires and gathering the other ends and attaching a single terminal thereto. The plurality of insulated wires are intermittently fed by respective predetermined lengths along predetermined feed paths, and then cut to respective predetermined lengths to provide remaining wires and cut wire sections. The insulation on the forward ends of the remaining wires and on the rear ends of the cut wire sections, next to the cut just made, are stripped. Terminals are crimped to insulation-stripped ends of the remaining wires. The cut wire sections are transferred so that their insulation-stripped ends are gathered in one place and then the insulation-stripped ends of the cut wire sections are trued-up and a single terminal is crimped thereto to form a single terminal for the plurality of cut wire sections.
    • 通过将端子连接到多根线的各个端部之一并收集另一端并将单个端子附接到其上而制造线束。 多条绝缘线沿着预定的馈送路径间歇地进给预定的长度,然后切割成相应的预定长度,以提供剩余的线和切割线段。 其余电线前端和切割电线部分后端的绝缘材料,刚刚切割的切口被剥离。 端子被压接到剩余电线的绝缘剥离端。 切割的线段被转移,使得其绝缘剥离的端部聚集在一个位置,然后切割的线段的绝缘剥离端被修整,并且单个端子被压接到其上以形成用于多个 切割线段。