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    • 7. 发明授权
    • Method of manufacturing semiconductor devices
    • 制造半导体器件的方法
    • US08927355B2
    • 2015-01-06
    • US13304936
    • 2011-11-28
    • Doo-Young LeeKi Il KimMyeong-Cheol KimDo-Hyoung KimDo-Hsing Lee
    • Doo-Young LeeKi Il KimMyeong-Cheol KimDo-Hyoung KimDo-Hsing Lee
    • H01L21/339H01L21/768H01L29/78H01L29/66
    • H01L29/78H01L21/76829H01L21/76832H01L21/76895H01L21/76897H01L29/66545
    • A method of manufacturing a semiconductor device, including the second sacrificial layer receiving a gate structure include a metal and a spacer on a sidewall of the gate structure therethrough being formed on a substrate. The second sacrificial layer is removed. A second etch stop layer and an insulating interlayer are sequentially formed on the gate structure, the spacer and the substrate. An opening passing through the insulating interlayer is formed to expose a portion of the gate structure, a portion of the spacer and a portion of the second etch stop layer on a portion of the substrate. The second etch stop layer being exposed through the opening is removed. The contact being electrically connected to the gate structure and the substrate and filling the opening is formed. The semiconductor device having the metal gate electrode and the shared contact has a desired leakage current characteristic and resistivity characteristics.
    • 包括接收栅极结构的第二牺牲层的半导体器件的制造方法包括在基板上形成的栅极结构的侧壁上的金属和间隔物。 去除第二牺牲层。 在栅极结构,间隔物和衬底上依次形成第二蚀刻停止层和绝缘中间层。 形成通过绝缘中间层的开口以暴露栅极结构的一部分,间隔物的一部分和第二蚀刻停止层的一部分在衬底的一部分上。 去除通过开口露出的第二蚀刻停止层。 形成与栅极结构和基板电连接并填充开口的触点。 具有金属栅电极和共用触点的半导体器件具有期望的漏电流特性和电阻率特性。
    • 9. 发明授权
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US08563383B2
    • 2013-10-22
    • US13252621
    • 2011-10-04
    • Sang-Jin KimJong-Chan ShinYong-Kug BaeMyeong-Cheol KimDo-Hyoung Kim
    • Sang-Jin KimJong-Chan ShinYong-Kug BaeMyeong-Cheol KimDo-Hyoung Kim
    • H01L21/336
    • H01L21/823425H01L21/823437H01L29/66545H01L29/66628H01L29/7834
    • A method of manufacturing a semiconductor device includes forming a plurality of gate structures including a metal on a substrate having an isolation layer, forming first insulating interlayer patterns covering sidewalls of the gate structures, forming first capping layer patterns and a second capping layer pattern on the gate structures and the first insulating interlayer patterns, the first capping layer patterns covering upper faces of the gate structures, and the second capping layer pattern overlapping the isolation layer, partially removing the first insulating interlayer patterns using the first and the second capping layer patterns as etching masks to form first openings that expose portions of the substrate, forming metal silicide patterns on the portions of the substrate exposed in the forming of the first openings, and forming conductive structures on the metal silicide patterns.
    • 制造半导体器件的方法包括在具有隔离层的衬底上形成包括金属的多个栅极结构,形成覆盖栅极结构的侧壁的第一绝缘层间图案,形成第一覆盖层图案和第二覆盖层图案 栅极结构和第一绝缘层间图案,第一覆盖层图案覆盖栅极结构的上表面,第二覆盖层图案与隔离层重叠,使用第一和第二覆盖层图案部分地去除第一绝缘层间图案,如 蚀刻掩模以形成暴露基板部分的第一开口,在形成第一开口的裸露部分上形成金属硅化物图案,并在金属硅化物图案上形成导电结构。