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1. 发明申请

US20060231923A1 Inductor for semiconductor integrated circuit and method of fabricating the same 审中-公开
公开(公告)号：US20060231923A1
公开(公告)日：2006-10-19
申请号：US11455678
申请日：2006-06-20
申请人： Ryota Yamamoto , Masayuki Furumiya , Hiraoki Ohkubo , Yasutaka Nakashiba
发明人： Ryota Yamamoto , Masayuki Furumiya , Hiraoki Ohkubo , Yasutaka Nakashiba
IPC分类号： H01L29/00 , H01L21/20
CPC分类号： H01L28/10 , H01L21/76838 , H01L23/5227 , H01L23/53228 , H01L27/08 , H01L2924/0002 , H01L2924/00
摘要： Disclosed are an inductor for a semiconductor integrated circuit, which provides a wider cross-sectional area, significantly reduces the resistance to improve the Q value and has a highly uniform film thickness, and a method of fabricating the inductor. A spiral inductor is formed on a topmost interconnection layer of a multilayer interconnection layer formed by a damascene method. This inductor is formed by patterning a barrier metal layer on an insulation film, on which a topmost interconnection is formed, in such a way that the barrier metal layer contacts the topmost interconnection, then forming a protective insulation film on an entire surface of the barrier metal layer, forming an opening in that portion of the protective insulation film which lies over the barrier metal layer, forming a thick Cu film with the barrier metal layer serving as a plating electrode, and performing wet etching of the Cu film. This process can allow the inductor to be so formed as to be thick and have a wide line width.

2. 发明授权

US07256456B2 SOI substrate and semiconductor integrated circuit device 失效
标题翻译： SOI衬底和半导体集成电路器件
公开(公告)号：US07256456B2
公开(公告)日：2007-08-14
申请号：US10739166
申请日：2003-12-19
申请人： Hiroaki Ohkubo , Masayuki Furumiya , Ryota Yamamoto , Yasutaka Nakashiba
发明人： Hiroaki Ohkubo , Masayuki Furumiya , Ryota Yamamoto , Yasutaka Nakashiba
IPC分类号： H01L27/12 , H01L27/01 , H01L31/0392
CPC分类号： H01L21/743 , H01L21/84 , H01L27/1203
摘要： A semiconductor IC device includes a base substrate comprising P−-type silicon, a first P+-type silicon layer is provided on the base substrate, and an N+-type silicon layer and a second P+-type silicon layer are provided in the same layer thereon. The impurity concentration of the first P+-type silicon layer and the N+-type silicon layer is higher than that of the base substrate. Also, a buried oxide layer and an SOI layer are provided on the entire upper surface of the N+-type silicon layer and the second P+-type silicon layer. The first P+-type silicon layer is connected to ground potential wiring GND, and the N+-type silicon layer is connected to power-supply potential wiring VDD. Accordingly, a decoupling capacitor, which is connected in parallel to the power supply, is formed between the P+-type silicon layer and the N+-type silicon layer.
摘要翻译：半导体IC器件包括基底衬底，其包括P型 - 硅，第一P + +型硅层设置在基底衬底上，并且N + +型硅层和第二P + +型硅层设置在其上的同一层中。第一P + + / - 型硅层和N + + - 型硅层的杂质浓度高于基底衬底的杂质浓度。此外，在N + +型硅层和第二P + +型硅层的整个上表面上设置掩埋氧化物层和SOI层。第一P + + / - 型硅层连接到地电位布线GND，并且N + +型硅层连接到电源电位布线VDD。因此，在P + +型硅层和N + +型硅层之间形成与电源并联连接的去耦电容器。

3. 发明申请

US20050139956A1 Semiconductor device and fabrication method thereof 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20050139956A1
公开(公告)日：2005-06-30
申请号：US11017695
申请日：2004-12-22
申请人： Hiroaki Ohkubo , Ryota Yamamoto , Masayuki Furumiya , Masaharu Sato , Kuniko Kikuta , Makoto Nakayama , Yasutaka Nakashiba
发明人： Hiroaki Ohkubo , Ryota Yamamoto , Masayuki Furumiya , Masaharu Sato , Kuniko Kikuta , Makoto Nakayama , Yasutaka Nakashiba
IPC分类号： H01L27/04 , H01L21/02 , H01L21/822 , H01L23/522 , H01L21/8234 , H01L21/20 , H01L29/00
CPC分类号： H01L28/40 , H01L23/5223 , H01L2924/0002 , H01L2924/00
摘要： On a silicon substrate, a first insulation layer, a lower conductive layer, a capacitor-insulator layer, and an upper conductive layer are formed in that order. Then, a first resist pattern is formed, the upper conductive layer is etched to form an upper electrode, and the capacitor-insulator layer is successively etched partway under the same etching condition as that of the upper conductive layer. Next, second resist pattern is formed, the remaining part of the capacitor-insulator layer is etched to form a second insulation layer, and the lower conductive layer is successively etched under the same etching condition as that of the capacitor-insulator layer so as to form a lower electrode and a lower wiring. In this manner, an MiM capacitor element constituted by the upper electrode, a part of the second insulation layer, and the lower electrode can be fabricated.
摘要翻译：在硅衬底上依次形成第一绝缘层，下导电层，电容器 - 绝缘体层和上导电层。然后，形成第一抗蚀剂图案，蚀刻上导电层以形成上电极，并且在与上导电层的蚀刻条件相同的蚀刻条件下，电容器 - 绝缘体层被连续蚀刻。接下来，形成第二抗蚀剂图案，蚀刻电容器 - 绝缘体层的其余部分以形成第二绝缘层，并且在与电容器 - 绝缘体层的蚀刻条件相同的蚀刻条件下，依次蚀刻下导电层，以便形成下电极和下布线。以这种方式，可以制造由上电极，第二绝缘层的一部分和下电极构成的MiM电容器元件。

4. 发明授权

US06879234B2 Semiconductor integrated circuit 失效
标题翻译：半导体集成电路
公开(公告)号：US06879234B2
公开(公告)日：2005-04-12
申请号：US10352048
申请日：2003-01-28
申请人： Masayuki Furumiya , Ryota Yamamoto , Jun Kishi , Hiroaki Ohkubo , Yasutaka Nakashiba
发明人： Masayuki Furumiya , Ryota Yamamoto , Jun Kishi , Hiroaki Ohkubo , Yasutaka Nakashiba
IPC分类号： H01F17/00 , H01F17/02 , H01L21/822 , H01L27/04 , H01L27/08 , H03B5/12 , H01F5/00 , H01F27/28
CPC分类号： H01L27/08 , H01F17/0006 , H01F2021/125 , H03B5/1215 , H03B5/1228 , H03B5/124
摘要： Electrically conductive layers 1a and 2a connected to each other via a contact form one inductor, while electrically conductive layers 1b and 2b connected to each other via other contact form the other inductor. Since the areas defined by the loops forming these two inductors are equal to each other, the inductances of the inductors are also equal to each other. Between both the inductors, the lengths in the loop of the portions (the conductive layers 1a and 1b) formed on a lower interlayer insulating film are equal to each other, while the lengths in the loop of the portions (the conductive layers 2a and 2b) formed on an upper interlayer insulating film are also equal to each other. This allows external disturbances such as parasitic capacitance to affect both the inductors equally. Accordingly, a voltage controlled oscillator incorporating the invention can stably provide undistorted sinusoidal oscillation signals.
摘要翻译：导电层1a和2a通过接触形成一个电感器，而导电层1b和2b通过其它触点相互连接形成另一个电感器。由于由形成这两个电感器的环形成的区域彼此相等，所以电感器的电感也彼此相等。在两个电感器之间，形成在下层间绝缘膜上的部分（导电层1a和1b）的环路中的长度彼此相等，而部分（导电层2a和2b）的环路中的长度）也相互相等。这允许诸如寄生电容的外部干扰同样影响电感器。因此，结合本发明的压控振荡器可以稳定地提供无失真的正弦振荡信号。

5. 发明授权

US07432170B2 Semiconductor device and fabrication method thereof 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US07432170B2
公开(公告)日：2008-10-07
申请号：US11017695
申请日：2004-12-22
申请人： Hiroaki Ohkubo , Ryota Yamamoto , Masayuki Furumiya , Masaharu Sato , Kuniko Kikuta , Makoto Nakayama , Yasutaka Nakashiba
发明人： Hiroaki Ohkubo , Ryota Yamamoto , Masayuki Furumiya , Masaharu Sato , Kuniko Kikuta , Makoto Nakayama , Yasutaka Nakashiba
IPC分类号： H01L21/20
CPC分类号： H01L28/40 , H01L23/5223 , H01L2924/0002 , H01L2924/00
摘要： On a silicon substrate, a first insulation layer, a lower conductive layer, a capacitor-insulator layer, and an upper conductive layer are formed in that order. Then, a first resist pattern is formed, the upper conductive layer is etched to form an upper electrode, and the capacitor-insulator layer is successively etched partway under the same etching condition as that of the upper conductive layer. Next, second resist pattern is formed, the remaining part of the capacitor-insulator layer is etched to form a second insulation layer, and the lower conductive layer is successively etched under the same etching condition as that of the capacitor-insulator layer so as to form a lower electrode and a lower wiring. In this manner, an MiM capacitor element constituted by the upper electrode, a part of the second insulation layer, and the lower electrode can be fabricated.
摘要翻译：在硅衬底上依次形成第一绝缘层，下导电层，电容器 - 绝缘体层和上导电层。然后，形成第一抗蚀剂图案，蚀刻上导电层以形成上电极，并且在与上导电层的蚀刻条件相同的蚀刻条件下，电容器 - 绝缘体层被连续蚀刻。接下来，形成第二抗蚀剂图案，蚀刻电容器 - 绝缘体层的其余部分以形成第二绝缘层，并且在与电容器 - 绝缘体层的蚀刻条件相同的蚀刻条件下，依次蚀刻下导电层，以便形成下电极和下布线。以这种方式，可以制造由上电极，第二绝缘层的一部分和下电极构成的MiM电容器元件。

6. 发明授权

US07091576B2 Inductor for semiconductor integrated circuit and method of fabricating the same 有权
公开(公告)号：US07091576B2
公开(公告)日：2006-08-15
申请号：US10460306
申请日：2003-06-13
申请人： Ryota Yamamoto , Masayuki Furumiya , Hiroaki Ohkubo , Yasutaka Nakashiba
发明人： Ryota Yamamoto , Masayuki Furumiya , Hiroaki Ohkubo , Yasutaka Nakashiba
IPC分类号： H01L29/00
CPC分类号： H01L28/10 , H01L21/76838 , H01L23/5227 , H01L23/53228 , H01L27/08 , H01L2924/0002 , H01L2924/00
摘要： Disclosed are an inductor for a semiconductor integrated circuit, which provides a wider cross-sectional area, significantly reduces the resistance to improve the Q value and has a highly uniform film thickness, and a method of fabricating the inductor. A spiral inductor is formed on a topmost interconnection layer of a multilayer interconnection layer formed by a damascene method. This inductor is formed by patterning a barrier metal layer on an insulation film, on which a topmost interconnection is formed, in such a way that the barrier metal layer contacts the topmost interconnection, then forming a protective insulation film on an entire surface of the barrier metal layer, forming an opening in that portion of the protective insulation film which lies over the barrier metal layer, forming a thick Cu film with the barrier metal layer serving as a plating electrode, and performing wet etching of the Cu film. This process can allow the inductor to be so formed as to be thick and have a wide line width.

7. 发明申请

US20070262383A1 SOI SUBSTRATE AND SEMICONDUCTOR INTEGRATED CIRUIT DEVICE 审中-公开
标题翻译： SOI衬底和半导体集成电路器件
公开(公告)号：US20070262383A1
公开(公告)日：2007-11-15
申请号：US11767112
申请日：2007-06-22
申请人： Hiroaki OHKUBO , Masayuki Furumiya , Ryota Yamamoto , Yasutaka Nakashiba
发明人： Hiroaki OHKUBO , Masayuki Furumiya , Ryota Yamamoto , Yasutaka Nakashiba
IPC分类号： H01L31/0392
CPC分类号： H01L21/743 , H01L21/84 , H01L27/1203
摘要： A semiconductor IC device includes a base substrate comprising P−-type silicon, a first P+-type silicon layer is provided on the base substrate, and an N+-type silicon layer and a second P+-type silicon layer are provided in the same layer thereon. The impurity concentration of the first P+-type silicon layer and the N+-type silicon layer is higher than that of the base substrate. Also, a buried oxide layer and an SOI layer are provided on the entire upper surface of the N+-type silicon layer and the second P+-type silicon layer. The first P+-type silicon layer is connected to ground potential wiring GND, and the N+-type silicon layer is connected to power-supply potential wiring VDD. Accordingly, a decoupling capacitor, which is connected in parallel to the power supply, is formed between the P+-type silicon layer and the N+-type silicon layer.
摘要翻译：半导体IC器件包括基底衬底，其包括P型 - 硅，第一P + +型硅层设置在基底衬底上，并且N + +型硅层和第二P + +型硅层设置在其上的同一层中。第一P + + / - 型硅层和N + + - 型硅层的杂质浓度高于基底衬底的杂质浓度。此外，在N + +型硅层和第二P + +型硅层的整个上表面上设置掩埋氧化物层和SOI层。第一P + + / - 型硅层连接到地电位布线GND，并且N + +型硅层连接到电源电位布线VDD。因此，在P + +型硅层和N + +型硅层之间形成与电源并联连接的去耦电容器。

8. 发明授权

US08358009B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US08358009B2
公开(公告)日：2013-01-22
申请号：US12901021
申请日：2010-10-08
申请人： Masayuki Furumiya , Yasutaka Nakashiba , Akira Tanabe
发明人： Masayuki Furumiya , Yasutaka Nakashiba , Akira Tanabe
IPC分类号： H01L23/48
CPC分类号： H01L23/481 , H01L21/823871 , H01L23/5225 , H01L23/528 , H01L23/5286 , H01L2223/6627 , H01L2924/0002 , H01L2924/12044 , H01L2924/1903 , H01L2924/3011 , H01L2924/00
摘要： A semiconductor device with a transistor region has a first conductor pattern formed within a multilayer interconnect structure positioned under a signal line and above the transistor region. The first conductor pattern is coupled to ground or a power supply and overlaps the transistor region. The signal line overlaps the first conductor pattern.
摘要翻译：具有晶体管区域的半导体器件具有形成在位于信号线下方并位于晶体管区域之上的多层互连结构内的第一导体图案。第一导体图案耦合到地或电源并与晶体管区重叠。信号线与第一导体图案重叠。

9. 发明授权

US08188566B2 Semiconductor integrated circuit device 有权
标题翻译：半导体集成电路器件
公开(公告)号：US08188566B2
公开(公告)日：2012-05-29
申请号：US13075615
申请日：2011-03-30
申请人： Masayuki Furumiya , Hiroaki Ohkubo , Yasutaka Nakashiba
发明人： Masayuki Furumiya , Hiroaki Ohkubo , Yasutaka Nakashiba
IPC分类号： H01L29/00 , H01L21/8238 , H01L21/8222
CPC分类号： H01L21/761 , H01L21/823481 , H01L27/0629 , H01L27/088
摘要： The bottom side of an N type silicon substrate is connected to a power supply terminal, a second P type epitaxial layer is formed on all sides of the N type silicon substrate, and a device forming portion is provided on the second P type epitaxial layer. A first P type epitaxial layer and an interlayer insulating film are provided on the device forming portion and an N well and a P well are formed on the top surface of the first P type epitaxial layer. The second P type epitaxial layer is connected to a ground terminal via the first P type epitaxial layer, the P well, a p+ diffusion region, a via and a wire. Accordingly, a pn junction is formed at the interface between the second P type epitaxial layer and the N type silicon substrate.
摘要翻译： N型硅衬底的底侧连接到电源端子，在N型硅衬底的所有侧面上形成第二P型外延层，在第二P型外延层上设置器件形成部分。第一P型外延层和层间绝缘膜设置在器件形成部分上，N阱和P阱形成在第一P型外延层的顶表面上。第二P型外延层通过第一P型外延层，P阱，p +扩散区，通孔和导线连接到接地端子。因此，在第二P型外延层和N型硅衬底之间的界面处形成pn结。

10. 发明授权

US06252285B1 Efficient inspection of light-gathering rate of microlens in solid state imaging device 失效
标题翻译：有效检查固态成像装置中微透镜的聚光率
公开(公告)号：US06252285B1
公开(公告)日：2001-06-26
申请号：US09288299
申请日：1999-04-08
申请人： Masayuki Furumiya , Yasutaka Nakashiba , Tohru Yamada , Katsumi Yamamoto , Keiichi Hara
发明人： Masayuki Furumiya , Yasutaka Nakashiba , Tohru Yamada , Katsumi Yamamoto , Keiichi Hara
IPC分类号： H01L27148
CPC分类号： H01L27/14627 , H01L27/14806
摘要： A solid state imaging device includes a plurality of photoelectric conversion elements arranged in an imaging area of a semiconductor substrate. Above each of the photoelectric conversion elements, a light-gathering microlens for gathering light on the photoelectric conversion element is disposed. Further, a microlens for shape inspection having the same shape as that of the light-gathering microlens is disposed outside the imaging area. A base pattern for inspection is disposed below the microlens for shape inspection. The shape of the microlens for shape inspection is inspected through observing an image of the base pattern through the microlens for shape inspection. A result of this inspection applies as it is to the light-gathering microlenses.
摘要翻译：固态成像装置包括布置在半导体衬底的成像区域中的多个光电转换元件。在每个光电转换元件上方，设置用于在光电转换元件上聚集光的聚光微透镜。此外，具有与聚光微透镜相同形状的形状检查用微透镜设置在摄像区域的外侧。用于检查的基本图案被放置在微透镜的下面用于形状检查。用于形状检查的微透镜的形状通过观察通过微透镜的基底图案的图像进行检查。这种检查的结果适用于聚光微透镜。

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