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    • 1. 发明授权
    • Methods for selectively filling apertures in a substrate to form conductive vias with a liquid using a vacuum
    • 用于选择性地填充衬底中的孔以使用真空与液体形成导电通孔的方法
    • US07560371B2
    • 2009-07-14
    • US11511619
    • 2006-08-29
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • H01L21/20
    • H01L21/76898H05K3/3468H05K2201/09572H05K2203/0763H05K2203/082
    • Methods of forming a conductive via in a substrate include contacting the substrate with a wave of conductive liquid material, such as molten solder, and drawing the liquid material into the aperture with a vacuum. The wave may be formed by flowing the liquid material out from an outlet in a direction generally against the gravitational field. The liquid material may be solidified to form an electrically conductive structure. A plurality of apertures may be selectively filled with the liquid material one at a time, and liquids having different compositions may be used to provide conductive vias having different compositions in the same substrate. Systems for forming conductive vias include a substrate fixture, a vacuum device having a vacuum fixture, and a solder-dispensing device configured to provide a wave of molten solder material. Relative lateral and vertical movement is provided between the wave of molten solder and a substrate supported by the substrate fixture.
    • 在衬底中形成导电通孔的方法包括使衬底与诸如熔融焊料的导电液体材料的波接触,并且用真空将液体材料拉入孔中。 该波浪可以通过使液体材料沿着通常抵靠重力场的方向从出口流出而形成。 液体材料可以被固化以形成导电结构。 可以一次一个地选择性地填充多个孔,并且可以使用具有不同组成的液体来在同一基底中提供具有不同组成的导电通孔。 用于形成导电通孔的系统包括基板固定装置,具有真空夹具的真空装置以及被配置为提供熔融焊料材料波的焊料分配装置。 在熔融焊料的波浪和由基板夹具支撑的基板之间提供相对的横向和垂直运动。
    • 2. 发明申请
    • Methods and systems for selectively filling apertures in a substrate to form conductive vias with a liquid using a vacuum
    • 用于选择性地填充衬底中的孔以与使用真空的液体形成导电通孔的方法和系统
    • US20080057691A1
    • 2008-03-06
    • US11511619
    • 2006-08-29
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • H01L21/44
    • H01L21/76898H05K3/3468H05K2201/09572H05K2203/0763H05K2203/082
    • Methods of forming a conductive via in a substrate include contacting the substrate with a wave of conductive liquid material, such as molten solder, and drawing the liquid material into the aperture with a vacuum. The wave may be formed by flowing the liquid material out from an outlet in a direction generally against the gravitational field. The liquid material may be solidified to form an electrically conductive structure. A plurality of apertures may be selectively filled with the liquid material one at a time, and liquids having different compositions may be used to provide conductive vias having different compositions in the same substrate. Systems for forming conductive vias include a substrate fixture, a vacuum device having a vacuum fixture, and a solder dispensing device configured to provide a wave of molten solder material. Relative lateral and vertical movement is provided between the wave of molten solder and a substrate supported by the substrate fixture.
    • 在衬底中形成导电通孔的方法包括使衬底与诸如熔融焊料的导电液体材料的波接触,并且用真空将液体材料拉入孔中。 该波浪可以通过使液体材料沿着通常抵靠重力场的方向从出口流出而形成。 液体材料可以被固化以形成导电结构。 可以一次一个地选择性地填充多个孔,并且可以使用具有不同组成的液体来在同一基底中提供具有不同组成的导电通孔。 用于形成导电通孔的系统包括衬底夹具,具有真空夹具的真空装置以及被配置为提供熔融焊料材料波的焊料分配装置。 在熔融焊料的波浪和由基板夹具支撑的基板之间提供相对的横向和垂直运动。