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1. 发明授权

US07277257B2 Transducer-level microactuator for a magnetic recording system 有权
标题翻译：用于磁记录系统的传感器级微致动器
公开(公告)号：US07277257B2
公开(公告)日：2007-10-02
申请号：US10729472
申请日：2003-12-05
申请人： Roger L. Hipwell, Jr. , Kyle M. Bartholomew , Lance E. Stover , Wayne A. Bonin , Jeremy A. Thurn , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Kyle M. Bartholomew , Lance E. Stover , Wayne A. Bonin , Jeremy A. Thurn , Zine-Eddine Boutaghou
IPC分类号： G11B5/56 , G11B21/21
CPC分类号： G11B5/5552
摘要： A transducer-level microactuator selectively positions a transducer portion of a slider radially with respect to circumferential data tracks of a rotatable disc. The slider includes a slider body having a leading edge and a trailing edge, a transducer body and a flexure body. The transducer body is spaced from the trailing edge of the sliding body and includes at least one transducer element. The flexure body extends from the trailing edge of the slider body and includes a first anchor point connected to the slider body and a second anchor point connected to the transducer body. The basecoat layer is deposited on the trailing edge of the slider body and substantially surrounds the flexure body wherein a gap separates the flexure body from the basecoat. A first actuation assembly is formed on the basecoat and a second actuation assembly is formed on the transducer body adjacent the slider body.
摘要翻译：传感器级微致动器相对于可旋转盘的周向数据轨道选择性地定位滑块的换能器部分。滑块包括具有前缘和后缘的滑块体，换能器本体和挠曲体。换能器主体与滑动体的后缘间隔开并且包括至少一个换能器元件。弯曲体从滑块主体的后缘延伸并且包括连接到滑块主体的第一锚定点和连接到换能器本体的第二锚定点。基底层沉积在滑块体的后缘上并且基本上围绕挠曲体，其中间隙将挠曲体与基底分隔开。第一致动组件形成在底座上，并且第二致动组件形成在邻近滑块主体的换能器本体上。

2. 发明授权

US07126792B2 Slider for a data storage device including transducer level micro-positioning and method of fabrication therefor 有权
公开(公告)号：US07126792B2
公开(公告)日：2006-10-24
申请号：US10286652
申请日：2002-11-01
申请人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
发明人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
IPC分类号： G11B21/20 , G11B5/54 , G11B7/09
CPC分类号： G11B5/6005 , G11B5/5552
摘要： A head having micro-positioning control. The head includes a slider body and a transducer body coupled to the slider body through a flexible interface. The transducer body is spaced from the slider body to form a gap therebetween. Micro-positioning actuators are coupled to the transducer body in the gap to provide micro-positioning control. In an embodiment for an air bearing slider, the gap includes off-track and fly height positioning control.

3. 发明授权

US07254885B2 Wafer-level fabrication method for top or side slider bond pads 有权
标题翻译：用于顶部或侧面滑块接合焊盘的晶片级制造方法
公开(公告)号：US07254885B2
公开(公告)日：2007-08-14
申请号：US10263891
申请日：2002-10-03
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Kyle M. Bartholomew , John R. Pendray , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Kyle M. Bartholomew , John R. Pendray , Zine-Eddine Boutaghou
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/4853 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： A method is used for fabricating sliders for use in a disc drive actuation system, the sliders having bonds pads formed on either a top surface or side faces of the slider. The method comprises providing a substrate having a top surface. Trenches are formed in the substrate and filled with a bond pad material to form slider bond pads. Excess bond pad material is removed from the trenches such that the slider bond pads are flush with the top surface of the substrate. A transducer is fabricated on the top surface of the substrate. Finally, the slider bond pads are exposed.
摘要翻译：一种用于制造用于盘驱动器致动系统的滑块的方法，滑块具有形成在滑块的顶表面或侧面上的接合垫。该方法包括提供具有顶表面的基底。在衬底中形成沟槽，并填充有焊盘材料以形成滑块接合焊盘。从沟槽去除过量的接合焊盘材料，使得滑块接合焊盘与衬底的顶表面齐平。在衬底的顶表面上制造换能器。最后，滑块接合垫被暴露。

4. 发明授权

US06733681B1 Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
标题翻译：用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片
公开(公告)号：US06733681B1
公开(公告)日：2004-05-11
申请号：US09707698
申请日：2000-11-07
申请人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
发明人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
IPC分类号： B81C100
CPC分类号： B81C1/00357 , B81C2201/019 , Y10T29/49025
摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.
摘要翻译：用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

5. 发明授权

US07088559B2 Integrated interconnect and method of manufacture therefor 有权
公开(公告)号：US07088559B2
公开(公告)日：2006-08-08
申请号：US10059892
申请日：2002-01-29
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou
IPC分类号： G11B5/56
CPC分类号： G11B5/5552
摘要： An integrated interface structure for a nested body to provide an electrical connection. The interface structure includes nested bond pads which electrically interface with leads. The nested bond pads are fabricated on a microstructure to provide an interface to drive circuitry for transducer elements of a slider or head supported by the microstructure.

6. 发明授权

US06829119B2 Disc drive microactuator with lateral position sensor 失效
公开(公告)号：US06829119B2
公开(公告)日：2004-12-07
申请号：US10279404
申请日：2002-10-24
申请人： Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
发明人： Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A read/write head microactuator includes first and second insulating deposits that are flat, spaced apart by an air gap, and laterally movable responsive to a microactuator electrical drive current. First and second flat, interdigitated drive electrode deposits are deposited on the first insulating deposit. A flat, digitated sense electrode deposit is deposited on the second insulating deposit. The sense electrode deposit provides a relative position output. The sense electrode deposit faces both the drive electrode deposits across the air gap.

7. 发明授权

US06785086B1 Transducer-level microactuator with dual-axis control 失效
标题翻译：带双轴控制的传感器级微型致动器
公开(公告)号：US06785086B1
公开(公告)日：2004-08-31
申请号：US09815679
申请日：2001-03-23
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.
摘要翻译：用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。转子部分通过多个弹簧连接到定子部分。转子部分承载换能头。定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

8. 发明授权

US06683758B2 Fabrication method for integrated microactuator coils 有权
标题翻译：集成微致动器线圈的制造方法
公开(公告)号：US06683758B2
公开(公告)日：2004-01-27
申请号：US09866942
申请日：2001-05-29
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
IPC分类号： G11B556
CPC分类号： G11B5/5552
摘要： A method for fabricating an integrated coil-on-keeper assembly for use in a magnetic circuit to actuate a microactuator. The assembly is formed on a keeper substrate by patterning an insulator layer, plating at least one coil layer and patterning another insulator layer on top of each coil layer. The keeper substrate is etched to form the top keeper of the coil-on-keeper assembly.
摘要翻译：一种用于制造集成的线圈保持器组件的方法，用于在磁路中使用以致动微型致动器。通过图案化绝缘体层，镀覆至少一个线圈层并且在每个线圈层的顶部上构图另一个绝缘体层，从而在保持器基板上形成组件。保持器衬底被蚀刻以形成线圈保持器组件的顶部保持器。

9. 发明授权

US06683757B1 Slider-level microactuator for precise head positioning 有权
标题翻译：滑块级微型致动器用于精确的头部定位
公开(公告)号：US06683757B1
公开(公告)日：2004-01-27
申请号：US09733351
申请日：2000-12-08
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： G11B556
CPC分类号： G11B5/5552 , G11B21/21
摘要： A microactuator is built at the slider level to achieve high resolution positioning of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks in a disc drive system. The slider includes a main body carried by a flexure. A stator portion extends from the main body, and a plurality of beams extend from the stator portion, the beams being flexible in a lateral direction. A rotor portion is connected to the stator portion by the plurality of beams, forming a gap between the stator portion and the rotor portion. The rotor portion carries the transducing head. A plurality of stator electrodes are formed on the stator portion, and a plurality of rotor electrodes are formed on the rotor portion to confront the stator electrodes across the gap. Control circuitry applies selected voltages to the stator electrodes and the rotor electrodes to create a force in the lateral direction for moving the rotor portion with respect to the stator portion of the slider, thereby finely positioning the transducing head.
摘要翻译：在滑块水平上构建微致动器，以实现相对于在盘驱动系统中具有多个同心轨道的可旋转盘的轨道的换能头的高分辨率定位。滑块包括由挠曲件承载的主体。定子部分从主体延伸，并且多个梁从定子部分延伸，梁在横向方向上是柔性的。转子部分通过多个梁连接到定子部分，在定子部分和转子部分之间形成间隙。转子部分承载换能头。在定子部分上形成有多个定子电极，并且在转子部分上形成多个转子电极，以跨过间隙对置定子电极。控制电路将所选择的电压施加到定子电极和转子电极以在横向方向上产生相对于滑块的定子部分移动转子部分的力，从而精细地定位换能头。

10. 发明授权

US06459260B1 Head suspension assembly for testing a slider 失效
标题翻译：头悬挂组件用于测试滑块
公开(公告)号：US06459260B1
公开(公告)日：2002-10-01
申请号：US10024785
申请日：2001-12-19
申请人： Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou , Michael S. Bowers
发明人： Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou , Michael S. Bowers
IPC分类号： G01R3102
CPC分类号： G11B5/4853 , Y10T29/49025
摘要： A head suspension assembly for a slider tester is provided, which includes a socket that is coupled to a gimbal and load beam. The assembly also includes an electrical interconnect. The socket is adapted to releasably secure a slider and to electrically couple the electrical interconnect to the slider.
摘要翻译：提供了一种用于滑块测试器的头悬挂组件，其包括耦合到万向节和负载梁的插座。组件还包括电互连。插座适于可释放地固定滑块并将电互连件电耦合到滑块。

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