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1. 发明授权

US06683758B2 Fabrication method for integrated microactuator coils 有权
标题翻译：集成微致动器线圈的制造方法
公开(公告)号：US06683758B2
公开(公告)日：2004-01-27
申请号：US09866942
申请日：2001-05-29
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
IPC分类号： G11B556
CPC分类号： G11B5/5552
摘要： A method for fabricating an integrated coil-on-keeper assembly for use in a magnetic circuit to actuate a microactuator. The assembly is formed on a keeper substrate by patterning an insulator layer, plating at least one coil layer and patterning another insulator layer on top of each coil layer. The keeper substrate is etched to form the top keeper of the coil-on-keeper assembly.
摘要翻译：一种用于制造集成的线圈保持器组件的方法，用于在磁路中使用以致动微型致动器。通过图案化绝缘体层，镀覆至少一个线圈层并且在每个线圈层的顶部上构图另一个绝缘体层，从而在保持器基板上形成组件。保持器衬底被蚀刻以形成线圈保持器组件的顶部保持器。

2. 发明授权

US06733681B1 Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
标题翻译：用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片
公开(公告)号：US06733681B1
公开(公告)日：2004-05-11
申请号：US09707698
申请日：2000-11-07
申请人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
发明人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
IPC分类号： B81C100
CPC分类号： B81C1/00357 , B81C2201/019 , Y10T29/49025
摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.
摘要翻译：用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

3. 发明授权

US06387778B1 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag 有权
标题翻译：用于使用反应离子蚀刻滞后的微机电系统装置的可破坏的系绳
公开(公告)号：US06387778B1
公开(公告)日：2002-05-14
申请号：US09649536
申请日：2000-08-28
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： H01L21301
CPC分类号： B81C1/00873 , B81C2201/0132
摘要： Utilizing reactive ion etching (RIE) lag, tethers are fabricated that reliably hold devices in place during processing and storage, yet are easily broken to remove the parts from the wafer as desired, without requiring excessive force that could damage the devices. The tethers are fabricated by slightly narrowing the periphery etch feature at several places. By adjusting the ratio of the main periphery width to the necked width at the tethers, the final thickness of the tether can be controlled to a small fraction of the wafer thickness, so that tethers defined by readily achievable feature sizes will reliably hold the parts in place until removal is desired. Since the tethers are now only a fraction of the wafer thickness, they will reliably break to release the part at a force level that will not damage the part.
摘要翻译：利用反应离子蚀刻（RIE）滞后，制造了在加工和存储期间可靠地将装置保持在适当位置的系链，但是容易断裂以根据需要从晶片中除去部件，而不需要可能损坏装置的过大的力。系绳是通过在几个地方略微缩小周边蚀刻特征来制造的。通过调节主臂周边宽度与系绳颈缩宽度的比例，可以将系绳的最终厚度控制在晶片厚度的一小部分，从而可以容易地达到的特征尺寸所限定的系绳将可靠地保持在地方，直到需要去除。由于系绳现在只是晶片厚度的一部分，它们将可靠地断裂，以不会损坏零件的力水平释放零件。

4. 发明授权

US06593163B1 Double-sided trench fill for electrical isolation of microelectromechanical system structures 失效
标题翻译：双面沟槽填充用于电气隔离微机电系统结构
公开(公告)号：US06593163B1
公开(公告)日：2003-07-15
申请号：US09707475
申请日：2000-11-07
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： H01L2100
CPC分类号： B81B3/0086 , B81B2203/033 , B81C2201/0132 , B81C2203/036 , H01L21/762 , H01L21/76224
摘要： A method for filling a trench extending through a microelectromechanical system (MEMS) device patterned on a wafer is disclosed. The method involves simultaneously depositing a trench-fill layer of insulating material over a first side of the wafer, over a second side of the wafer, and into the trench extending from the first side to the second side. Further, the width of the trench at the first side of the wafer and/or the second side of the wafer is variable to adjust the rate at which the trench fills.
摘要翻译：公开了一种用于填充延伸通过在晶片上图案化的微机电系统（MEMS）器件的沟槽的方法。该方法包括在晶片的第一侧上，在晶片的第二侧上同时沉积绝缘材料的沟槽填充层，并且进入从第一侧延伸到第二侧的沟槽。此外，在晶片的第一侧和/或晶片的第二面处的沟槽的宽度是可变的，以调整沟槽填充的速率。

5. 发明授权

US06785086B1 Transducer-level microactuator with dual-axis control 失效
标题翻译：带双轴控制的传感器级微型致动器
公开(公告)号：US06785086B1
公开(公告)日：2004-08-31
申请号：US09815679
申请日：2001-03-23
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.
摘要翻译：用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。转子部分通过多个弹簧连接到定子部分。转子部分承载换能头。定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

6. 发明授权

US06683757B1 Slider-level microactuator for precise head positioning 有权
标题翻译：滑块级微型致动器用于精确的头部定位
公开(公告)号：US06683757B1
公开(公告)日：2004-01-27
申请号：US09733351
申请日：2000-12-08
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： G11B556
CPC分类号： G11B5/5552 , G11B21/21
摘要： A microactuator is built at the slider level to achieve high resolution positioning of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks in a disc drive system. The slider includes a main body carried by a flexure. A stator portion extends from the main body, and a plurality of beams extend from the stator portion, the beams being flexible in a lateral direction. A rotor portion is connected to the stator portion by the plurality of beams, forming a gap between the stator portion and the rotor portion. The rotor portion carries the transducing head. A plurality of stator electrodes are formed on the stator portion, and a plurality of rotor electrodes are formed on the rotor portion to confront the stator electrodes across the gap. Control circuitry applies selected voltages to the stator electrodes and the rotor electrodes to create a force in the lateral direction for moving the rotor portion with respect to the stator portion of the slider, thereby finely positioning the transducing head.
摘要翻译：在滑块水平上构建微致动器，以实现相对于在盘驱动系统中具有多个同心轨道的可旋转盘的轨道的换能头的高分辨率定位。滑块包括由挠曲件承载的主体。定子部分从主体延伸，并且多个梁从定子部分延伸，梁在横向方向上是柔性的。转子部分通过多个梁连接到定子部分，在定子部分和转子部分之间形成间隙。转子部分承载换能头。在定子部分上形成有多个定子电极，并且在转子部分上形成多个转子电极，以跨过间隙对置定子电极。控制电路将所选择的电压施加到定子电极和转子电极以在横向方向上产生相对于滑块的定子部分移动转子部分的力，从而精细地定位换能头。

7. 发明授权

US06643099B1 Transducer formed on a sacrificial metal substrate 失效
标题翻译：传感器形成在牺牲金属基板上
公开(公告)号：US06643099B1
公开(公告)日：2003-11-04
申请号：US09728778
申请日：2000-12-01
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
IPC分类号： G11B560
CPC分类号： G11B5/6005 , G11B5/102 , G11B5/105 , G11B5/11 , G11B5/3103 , G11B5/3146 , G11B5/48 , H05K3/205 , H05K3/4007 , H05K2201/0367
摘要： A transducer assembly in which an electric current is passed through plating solution in recesses of a metal substrate to plate electrical contact bumps having bump fronts in the recesses and exposed bump backs. The transducer is partially formed on the substrate, sealing the exposed bump backs. One or more vacuum processes are performed to complete formation of the transducer. At least a portion of the metal substrate is etched away to expose the bump fronts of the electrical contact bumps.
摘要翻译：一种换能器组件，其中电流通过电镀溶液在金属基底的凹槽中，以在具有凸起前部的凹部和暴露的凸起背面中电镀接触凸块。传感器部分地形成在基板上，密封暴露的凸起背。执行一个或多个真空处理以完成换能器的形成。金属基板的至少一部分被蚀刻掉以露出电接触凸块的凸块前端。

8. 发明授权

US06697232B1 Bonded transducer-level electrostatic microactuator for disc drive system 有权
标题翻译：用于磁盘驱动系统的传感器级静电微型致动器
公开(公告)号：US06697232B1
公开(公告)日：2004-02-24
申请号：US09809378
申请日：2001-03-15
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou
IPC分类号： G11B2124
CPC分类号： G11B5/6005 , G11B5/4826 , G11B5/5552
摘要： A slider assembly is operable to selectively alter a position of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks. The slider assembly includes a slider wafer arranged to be supported by a disc drive support structure. A stator is bonded to the slider wafer, with the stator including at least one electrode. A rotor is bonded to the stator, with the rotor having a frame portion bonded to the stator and a head-carrying portion attached to the frame portion by a flexible beam structure. The head-carrying portion of the rotor carries the transducing head, supports at least one rotor electrode adjacent to the at least one stator electrode, and is movable with respect to the frame portion of the rotor in response to a voltage difference between the at least one rotor electrode and the at least one stator electrode.
摘要翻译：滑动器组件可操作以选择性地改变换能头相对于具有多个同心轨道的可旋转盘的轨道的位置。滑块组件包括布置成由盘驱动器支撑结构支撑的滑块晶片。定子被结合到滑块晶片，定子包括至少一个电极。转子结合到定子，其中转子具有结合到定子的框架部分和通过柔性梁结构附接到框架部分的头部承载部分。转子的头部承载部分带有换能头，支撑至少一个与该至少一个定子电极相邻的转子电极，并且响应于该至少一个定子电极之间的电压差可相对于转子的框架部分移动一个转子电极和至少一个定子电极。

9. 发明授权

US06362939B1 Balanced microactuator suspension 有权
标题翻译：平衡微致动器悬架
公开(公告)号：US06362939B1
公开(公告)日：2002-03-26
申请号：US09306581
申请日：1999-05-06
申请人： Peter Crane , Wayne A. Bonin , Barry D. Wissman , Barbara J. Ihlow-Mahrer
发明人： Peter Crane , Wayne A. Bonin , Barry D. Wissman , Barbara J. Ihlow-Mahrer
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A microactuator suspension supports a slider. The microactuator suspension has at least a first resilient support extending from a slider attachment pad to a suspension arm attachment pad. The slider attachment pad forms a clip which contacts the slider on side faces of the slider, and the microactuator adds little or nothing to the vertical thickness of the head gimbal assembly. The suspension arm attachment pad attaches to the gimbal with an attachment bridge which is longitudinally balanced relative to the gimbal point and relative to the air bearing centroid of the slider. The resilient supports may be beams having ends which are longitudinally spaced relative to the gimbal point, to the air bearing centroid, and to the attachment bridge to minimize moments and localized stresses on the beams. Dual beam and multiple beam arrangements are provided.
摘要翻译：微型致动器悬架支撑滑块。微型致动器悬架至少具有从滑块附接垫延伸到悬挂臂附接垫的第一弹性支撑件。滑块附件垫形成一个与滑动件的滑动件接触的夹子，微型致动器对头部万向节组件的垂直厚度几乎没有补充。悬架臂附接垫通过连接桥连接到万向节，该连接桥相对于万向节并相对于滑块的空气轴承重心纵向平衡。弹性支撑件可以是具有相对于万向节，空气轴承重心纵向间隔开的端部以及连接桥，以最小化梁上的力矩和局部应力的梁。提供双光束和多光束布置。

10. 发明授权

US08786841B2 Thin film temperature measurement using optical absorption edge wavelength 有权
标题翻译：使用光吸收边缘波长的薄膜温度测量
公开(公告)号：US08786841B2
公开(公告)日：2014-07-22
申请号：US13378788
申请日：2010-06-21
申请人： Darryl Barlett , Charles A. Taylor, II , Barry D. Wissman
发明人： Darryl Barlett , Charles A. Taylor, II , Barry D. Wissman
IPC分类号： G01N21/00 , G01N21/47
CPC分类号： H01L21/67248 , H01L22/12
摘要： A technique for determining the temperature of a sample including a semiconductor film 20 having a measurable optical absorption edge deposited on a transparent substrate 22 of material having no measurable optical absorption edge, such as a GaN film 20 deposited on an Al2O3 substrate 22 for blue and white LEDs. The temperature is determined in realtime as the film 20 grows and increases in thickness. A spectra based on the diffusely scattered light from the film 20 is produced at each incremental thickness. A reference division is performed on each spectra to correct for equipment artifacts. The thickness of the film 20 and an optical absorption edge wavelength value are determined from the spectra. The temperature of the film 20 is determined as a function of the optical absorption edge wavelength and the thickness of the film 20 using the spectra, a thickness calibration table, and a temperature calibration table.
摘要翻译：一种用于确定样品的温度的技术，其包括具有沉积在不具有可测量的光吸收边缘的材料的透明基板22上的可测量的光吸收边缘的半导体膜20，例如沉积在用于蓝色的Al 2 O 3衬底22上的GaN膜20，以及白色LED。当膜20生长并且厚度增加时，温度是实时测定的。在每个增量厚度下产生基于来自膜20的漫散射光的光谱。在每个光谱上执行参考分区以校正设备伪像。从光谱确定膜20的厚度和光吸收边缘波长值。使用光谱，厚度校准表和温度校准表，确定膜20的温度作为光吸收边缘波长和膜20的厚度的函数。

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