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1. 发明申请

US20110235663A1 Method and System for Managing Light Source Operation 有权
标题翻译：光源操作管理方法与系统
公开(公告)号：US20110235663A1
公开(公告)日：2011-09-29
申请号：US12730506
申请日：2010-03-24
申请人： Robert P. Akins , Richard L. Sandstrom , Daniel J.W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
发明人： Robert P. Akins , Richard L. Sandstrom , Daniel J.W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
IPC分类号： H01S3/10
CPC分类号： H01S3/0014 , G03F7/70025 , G03F7/70533 , G03F7/70975 , H01S3/134 , H01S3/225
摘要： A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
摘要翻译：经历EOL状态的激光光源（否则可能导致非计划关机）反而以一个或多个预定或计算的增量以减小的容量运行。在这种减少的能力下运行，直到激光系统在定期关机或新计划停机期间才能进行适当的维护。同时，适当的情况下，利用工具可以适应激光系统的能力下降。

2. 发明授权

US08295316B2 Method and system for managing light source operation 有权
标题翻译：管理光源操作的方法和系统
公开(公告)号：US08295316B2
公开(公告)日：2012-10-23
申请号：US12730506
申请日：2010-03-24
申请人： Robert P. Akins , Richard L. Sandstrom , Daniel J. W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
发明人： Robert P. Akins , Richard L. Sandstrom , Daniel J. W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
IPC分类号： H01S3/13
CPC分类号： H01S3/0014 , G03F7/70025 , G03F7/70533 , G03F7/70975 , H01S3/134 , H01S3/225
摘要： A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
摘要翻译：经历EOL状态的激光光源（否则可能导致非计划关机）反而以一个或多个预定或计算的增量以减小的容量运行。在这种减少的能力下运行，直到激光系统在定期关机或新计划停机期间才能进行适当的维护。同时，适当的情况下，利用工具可以适应激光系统的能力下降。

3. 发明授权

US5033055A Compact excimer laser 失效
标题翻译：紧凑型准分子激光
公开(公告)号：US5033055A
公开(公告)日：1991-07-16
申请号：US550658
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译：一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。气体位于激光腔内，气体能够起激光作用。一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。一对电极中的一个位于腔内的中心位置并且接地到壳体结构。一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。

4. 发明授权

US5029177A Compact excimer laser 失效
公开(公告)号：US5029177A
公开(公告)日：1991-07-02
申请号：US550477
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

5. 发明授权

US4959840A Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser 失效
标题翻译：紧凑型准分子激光器包括安装在激光器壁上的绝缘关系的电极
公开(公告)号：US4959840A
公开(公告)日：1990-09-25
申请号：US144799
申请日：1988-01-15
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0305 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译：一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。气体位于激光腔内，气体能够起激光作用。一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。一对电极中的一个位于腔内的中心位置并且接地到壳体结构。一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。

6. 发明授权

US07317179B2 Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate 有权
标题翻译：将激光形成为均匀线束以与沉积在基底上的膜相互作用的系统和方法
公开(公告)号：US07317179B2
公开(公告)日：2008-01-08
申请号：US11261845
申请日：2005-10-28
申请人： Robert P. Akins , Richard L. Sandstrom
发明人： Robert P. Akins , Richard L. Sandstrom
IPC分类号： G01B9/02
CPC分类号： B23K26/0604 , B23K26/0608 , B23K26/066 , B23K26/067 , B23K26/0738 , G02B27/0966 , G02B27/0988 , G02B27/46
摘要： Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
摘要翻译：公开了用于使激光束成形和均匀化以与膜相互作用的系统和方法。成形和均质系统可以包括透镜阵列和透镜，其被定位成从透镜阵列接收激光，并且在透镜阵列中的每个透镜的平面中产生相应的细长图像。此外，该系统可以包括具有位于平面中的边缘的光束停止器，以及可移动的安装件，其旋转透镜阵列的透镜以改变其中一个细长图像与光束停止边缘之间的对准。

7. 发明授权

US07087914B2 High repetition rate laser produced plasma EUV light source 有权
公开(公告)号：US07087914B2
公开(公告)日：2006-08-08
申请号：US10803526
申请日：2004-03-17
申请人： Robert P. Akins , Richard L. Sandstrom , William N. Partlo , Igor V. Fomenkov , John Martin Algots , Robert N. Jacques , Frederick Palenschat , Jun Song
发明人： Robert P. Akins , Richard L. Sandstrom , William N. Partlo , Igor V. Fomenkov , John Martin Algots , Robert N. Jacques , Frederick Palenschat , Jun Song
IPC分类号： H01J35/20
CPC分类号： B82Y10/00 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The target tracking system may provide information enabling the creation of a laser firing control signal, and may comprise a droplet detector comprising a collimated light source directed to intersect a point on a projected delivery path of the target, having a respective oppositely disposed light detector detecting the passage of the target through the respective point, or a detector comprising a linear array of a plurality of photo-sensitive elements aligned to a coordinate axis, the light from the light source intersecting a projected delivery path of the target, at least one of the which may comprise a plane-intercept detection device. The droplet detectors may comprise a plurality of droplet detectors each operating at a different light frequency, or a camera having a field of view and a two dimensional array of pixels imaging the field of view. The apparatus and method may comprise an electrostatic plasma containment apparatus providing an electric plasma confinement field at or near a target ignition site at the time of ignition, with the target tracking system providing a signal enabling control of the electrostatic plasma containment apparatus. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap. The apparatus and method may comprise a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of the target ignition site to confine the plasma to the target ignition site, which may be pulsed and may be controlled using outputs from the target tracking system.

8. 发明授权

US5027366A Compact excimer laser 失效
标题翻译：紧凑型准分子激光
公开(公告)号：US5027366A
公开(公告)日：1991-06-25
申请号：US550649
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译：一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。气体位于激光腔内，气体能够起激光作用。一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。一对电极中的一个位于腔内的中心位置并且接地到壳体结构。一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。

9. 发明授权

US5023884A Compact excimer laser 失效
标题翻译：紧凑型准分子激光
公开(公告)号：US5023884A
公开(公告)日：1991-06-11
申请号：US550657
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译：一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。气体位于激光腔内，气体能够起激光作用。一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。一对电极中的一个位于腔内的中心位置并且接地到壳体结构。一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁的中间和另一个电极之间，但是与壳体的一个壁间隔开，以使主绝缘体构件相对于壳体结构浮动。主陶瓷绝缘体构件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何附加的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出反应，而不受中央支架之外的任何限制。

10. 发明授权

US5018162A Compact excimer laser 失效
公开(公告)号：US5018162A
公开(公告)日：1991-05-21
申请号：US550660
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

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