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    • 2. 发明授权
    • Integrated packaging of micromechanical sensors and associated control circuits
    • 微机械传感器和相关控制电路的集成封装
    • US06770503B1
    • 2004-08-03
    • US09422682
    • 1999-10-21
    • Thomas F. MarinisJerome B. SohnRichard P. Tumminelli
    • Thomas F. MarinisJerome B. SohnRichard P. Tumminelli
    • H01L2100
    • B81B7/0077G01P1/02G01P15/0802
    • A micromechanical sensor is fabricated on a semiconductor wafer, and a control circuit is fabricated on another semiconductor wafer. A cavity is etched on the back side of the control circuit wafer, the cavity being formed such that the sensor on the other wafer fits within the cavity when the wafers are brought together in an adjoining relationship. Through-holes are etched through the back side of the control circuit wafer to allow access to electrical contact points, and a patterned layer of metal is deposited to form electrical interconnections between the electrical contact points and termination points on the back side of the wafer via the through-holes. The termination points are arranged such that electrical contacts of the sensor contact the termination points when the wafers are placed in the adjoining relationship. The wafers are then cleaned and bonded together in the adjoining relationship. In a typical process the wafers contain multiple sensors and control circuits, respectively, and thus the bonded wafers are diced to yield individual bonded sensor-circuit pairs. The bonded pairs are then packaged in an integrated-circuit package such as a leadless chip carrier in a known manner.
    • 在半导体晶片上制造微机械传感器,并且在另一个半导体晶片上制造控制电路。 在控制电路晶片的背面上蚀刻空腔,形成空腔,使得当晶片以相邻的关系将晶片合在一起时,另一晶片上的传感器安装在空腔内。 通过控制电路晶片的背侧蚀刻通孔以允许接触电接触点,并且沉积图案化的金属层以在电接触点和晶片背面上的端接点之间形成电互连 通孔。 终端点被布置成使得当晶片以相邻关系放置时,传感器的电触点与端接点接触。 然后将晶片清洁并以相邻的关系粘合在一起。 在典型的工艺中,晶片分别包含多个传感器和控制电路,因此将结合的晶片切割成单独的结合的传感器电路对。 然后以已知的方式将键合对封装在诸如无引线芯片载体的集成电路封装中。