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    • 2. 发明授权
    • Nanopillar arrays for electron emission
    • 用于电子发射的纳米柱阵列
    • US07884324B2
    • 2011-02-08
    • US12130103
    • 2008-05-30
    • Robert H. BlickMichael S. WestphallHua QinLloyd M. Smith
    • Robert H. BlickMichael S. WestphallHua QinLloyd M. Smith
    • G01N23/00G01N13/10H01J49/08
    • H01J1/32H01J29/023H01J43/246Y10S977/762
    • The present invention provides systems, devices, device components and structures for modulating the intensity and/or energies of electrons, including a beam of incident electrons. In some embodiments, for example, the present invention provides nano-structured semiconductor membrane structures capable of generating secondary electron emission. Nano-structured semiconductor membranes of this aspect of the present invention include membranes having an array of nanopillar structures capable of providing electron emission for amplification, filtering and/or detection of incident radiation, for example secondary electron emission and/or field emission. Nano-structured semiconductor membranes of the present invention are useful as converters wherein interaction of incident primary electrons and nanopillars of the nanopillar array generates secondary emission. Nano-structured semiconductor membranes of this aspect of the present invention are also useful as directed charge amplifiers wherein secondary emission from a nanopillar array provides gain functionality for increasing the intensity of radiation comprising incident electrons.
    • 本发明提供了用于调制包括入射电子束的电子的强度和/或能量的系统,装置,器件组件和结构。 在一些实施例中,例如,本发明提供能够产生二次电子发射的纳米结构的半导体膜结构。 本发明该方面的纳米结构半导体膜包括具有能够提供用于放射,滤波和/或检测入射辐射的电子发射的纳米柱结构阵列的膜,例如二次电子发射和/或场发射。 本发明的纳米结构半导体膜可用作其中纳米柱阵列的入射一次电子和纳米柱的相互作用产生二次发射的转换器。 本发明该方面的纳米结构半导体膜也可用作定向电荷放大器,其中来自纳米柱阵列的二次发射提供了用于增加包括入射电子的辐射强度的增益功能。