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1. 发明授权

US4171006A Fluid metering valve 失效
标题翻译：流体计量阀
公开(公告)号：US4171006A
公开(公告)日：1979-10-16
申请号：US840781
申请日：1977-10-11
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： F16K7/06 , F16K7/04
CPC分类号： F16K7/04 , Y10T137/87161 , Y10T137/87981
摘要： The present invention is related to a fluid metering valve that is specifically constructed to provide fine metering at extremely low flow rates while still providing a full shut-off capability. The fluid metering valve of the present invention is specifically adapted to be utilized in conjunction with corrosive fluids or fluids containing suspended solid particles that would otherwise damage or clog a comparable precision needle valve.
摘要翻译：本发明涉及一种流体计量阀，其特别构造为在极低流量下提供精细计量，同时仍然提供完全关闭能力。本发明的流体计量阀特别适于与腐蚀性流体或含有悬浮固体颗粒的流体结合使用，否则会损坏或堵塞可比较的精密针阀。

2. 发明授权

US5329733A Wafer slicing and grinding machine and a method of slicing and grinding wafers 失效
标题翻译：晶圆切片研磨机及切片研磨方法
公开(公告)号：US5329733A
公开(公告)日：1994-07-19
申请号：US21899
申请日：1993-02-24
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B24B7/22 , B28D1/00 , B28D5/00 , B28D5/02 , H01L21/304 , B24B49/00
CPC分类号： B28D5/0094 , B28D1/003 , B28D5/028
摘要： A wafer slicing and grinding machine is provided with a saw blade assembly for the slicing of wafers from an ingot. A grinding stage is also provided for sequentially grinding the rear face of a previously sliced wafer and the front face of an ingot in order to provide a double ground wafer. A transfer chuck and a holding chuck are disposed within the machine to perform movements for effecting a turning over of a wafer for grinding of the rear face of the wafer.
摘要翻译：晶圆切片研磨机设置有用于从晶锭切片晶片的锯片组件。还提供了用于顺序研磨预先切片的晶片的后表面和锭的正面的研磨台，以便提供双层晶片。转印卡盘和保持卡盘设置在机器内以执行用于进行晶片翻转的运动，用于研磨晶片的后表面。

3. 发明授权

US5185956A Wafer slicing and grinding system 失效
标题翻译：抛光和磨光系统
公开(公告)号：US5185956A
公开(公告)日：1993-02-16
申请号：US525466
申请日：1990-05-18
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B23P23/02 , B23Q1/48 , B23Q5/26 , B24B7/22 , B24B27/06 , B24B41/047 , B28D1/00 , B28D5/00 , B28D5/02 , H01L21/304
CPC分类号： B24B27/0616 , B23P23/02 , B23Q1/4828 , B23Q5/266 , B24B41/047 , B24B7/228 , B28D1/003 , B28D5/028
摘要： The grinding wheel is provided with a plurality of circumferentially spaced apart micrometer screws which can be adjusted from time to time in order to index the grind wheel into different grinding positions. An indexing mechanism can be mounted on the face of the disk with drive pins extending through the disk into the micrometer screws for simultaneous rotation of the screws. The indexing mechanism is lightweight and can be readily attached to the face of the grind disk.

4. 发明授权

US5189843A Wafer slicing and grinding machine and a method of slicing and grinding wafers 失效
标题翻译：抛光和研磨机和切割和研磨方法
公开(公告)号：US5189843A
公开(公告)日：1993-03-02
申请号：US575281
申请日：1990-08-30
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B24B7/22 , B28D1/00 , B28D5/00 , B28D5/02 , H01L21/304
CPC分类号： B28D5/0094 , B28D1/003 , B28D5/028
摘要： A wafer slicing and grinding machine is provided with a saw blade assembly for the slicing of wafers from an ingot. A grinding stage is also provided for sequentially grinding the rear face of a previously sliced wafer and the front face of an ingot in order to provide a double ground wafer. A transfer chuck and a holding chuck are disposed within the machine to perform movements for effecting a turning over of a wafer for grinding of the rear face of the wafer.

5. 发明授权

US5148797A Mounting for an internal diameter saw blade 失效
标题翻译：安装内径锯片
公开(公告)号：US5148797A
公开(公告)日：1992-09-22
申请号：US669034
申请日：1991-03-14
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B23D59/00 , B23Q1/70 , B24D5/16 , B28D5/02
CPC分类号： B23D59/002 , B23Q1/70 , B24D5/16 , B28D5/028
摘要： The spindle on which the wheelhead rotates is mounted within a spindle housing which, in turn, is mounted by a bearing at one end in a pivotally mounted housing. A pair of hydraulic cylinders engage the opposite end of the spindle housing and are actuated during a cutting stroke so as to impose a force on the spindle housing to effect a lateral displacement of the spindle housing in a plane common to the spindle axis and the pivot axis of the housing. The lateral deflection, in turn, causes a lateral deflection of the wheelhead thereby controlling the lateral deviation of the wheelhead relative to the true cutting plane during the cutting stroke. A sensor is provided between the housing and the wheelhead to sense and control deviations of the wheelhead from the true cutting plane. The arrangement may also be used for saws with wheelheads which are horizontally mounted for the cutting of vertically mounted ingots.
摘要翻译：砂轮头旋转的主轴安装在主轴壳体内，主轴壳体中的轴承一端安装在枢轴安装的壳体中。一对液压缸接合主轴壳体的相对端并且在切割行程期间被致动，以便在主轴壳体上施加力以实现主轴壳体在与主轴轴线共同的平面中的横向位移，并且枢轴轴的轴心。横向偏转又导致砂轮头的横向偏转，从而在切割行程期间控制砂轮相对于真切割平面的横向偏移。传感器设置在壳体和砂轮头之间，用于感测和控制砂轮头与真实切割平面的偏差。该装置还可用于具有水平安装用于切割垂直安装的锭的砂轮的锯。

6. 发明授权

US4537177A Balanced rotary saw assembly and a method of balancing the same 失效
标题翻译：平衡式旋转锯组件及其平衡方法
公开(公告)号：US4537177A
公开(公告)日：1985-08-27
申请号：US490664
申请日：1983-05-02
申请人： Robert E. Steere, Jr. , Thomas Lewandowski
发明人： Robert E. Steere, Jr. , Thomas Lewandowski
IPC分类号： B23D47/00 , B23Q11/00 , B24B41/04 , B24D5/12 , B24D5/16 , B28D5/02 , F16F15/36 , G01M1/36 , B28D1/04
CPC分类号： B23Q11/0035 , B23D47/005 , B24B41/042 , B24D5/126 , B24D5/165 , B28D5/022 , B28D5/028 , F16F15/36 , F16F15/366 , G01M1/365
摘要： The saw assembly is provided with a self-contained balancing means for the automatic balancing of the wheel head. In one embodiment, the balancing means includes an annular rotor which is mounted on the wheel head and which contains a vaporizable fluid medium within circumferentially spaced chambers. Heating elements are provided for heating selected chambers in order to vaporize and transfer the balancing medium between chambers via a capillary manifold tube, or pneumatic means is used to transfer the balancing medium. Sensors are provided to sense the rotation of the wheel head and the radial vibration of the wheel head and cutting blade of the saw assembly in order to determine where the wheel head is out-of-balance.
摘要翻译：锯组件设置有用于轮头自动平衡的独立平衡装置。在一个实施例中，平衡装置包括环形转子，其安装在轮头上并且在周向间隔开的腔室内容纳可汽化的流体介质。提供加热元件用于加热所选择的室，以便通过毛细管歧管在气室之间蒸发和转移平衡介质，或者气动装置用于传送平衡介质。设置传感器以感测轮头的旋转以及锯组件的轮头和切割刀片的径向振动，以便确定车轮头的不平衡位置。

7. 发明授权

US5351444A Blade track control system 失效
标题翻译：刀片轨道控制系统
公开(公告)号：US5351444A
公开(公告)日：1994-10-04
申请号：US951393
申请日：1992-09-25
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B23D47/00 , B23D59/00 , B24B27/06 , B24B45/00 , B24B49/02 , B24B7/00
CPC分类号： B24B49/02 , B23D47/005 , B23D59/002 , B24B27/0616 , B24B45/00
摘要： The blade track control system employs a pair of bearing pads and a pair of sensors. Each bearing pad is provided with a supply of compressed air of constant pressure to provide an aerodynamic bearing surface film against a rotating saw blade. Each bearing pad is mounted on a structure, a portion of which may be flexed in order to deflect the saw blade from a datum plane into a cutting plane. Each sensor detects a deviation in the saw blade from the cutting plane and emits a signal which effects a movement of the bearing pad toward or away from the blade in order to effect a corresponding deflection of the saw blade back to the cutting plane. The two bearing pads are mounted independently of the sensors and each is moved relative to the saw blade by deflecting a cross bar on which the bearing pad is mounted in cantilevered fashion.
摘要翻译：叶片轨道控制系统采用一对轴承瓦块和一对传感器。每个轴承瓦片设置有恒定压力的压缩空气供应，以提供抵抗旋转锯片的空气动力学轴承表面膜。每个轴承瓦片安装在结构上，其一部分可以弯曲以使锯片从基准平面偏转成切割平面。每个传感器检测锯片与切割平面的偏差，并发出一个信号，该信号使轴承瓦片朝向或远离叶片移动，以便使锯片相对于切割平面相应的偏转。两个轴承瓦片独立于传感器安装，并且通过以悬臂方式偏转安装有轴承瓦块的横杆而相对于锯片运动。

8. 发明授权

US4420909A Wafering system 失效
标题翻译：晶圆系统
公开(公告)号：US4420909A
公开(公告)日：1983-12-20
申请号：US320097
申请日：1981-11-10
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B28D1/22 , B23Q7/04 , B28D5/00 , B28D5/02 , H01L21/304 , H01L21/683 , B24B7/20
CPC分类号： B28D5/0094 , B23Q7/047 , B28D5/028
摘要： The wafering system employs a chuck assembly for moving a severed wafer from a crystal through the aperture in the cutting blade to a take-off conveyor. The chuck assembly includes a suction head which is pivotally mounted via a pivot arm assembly, a slide for moving the head back and forth and a carriage for vertically moving the head up and down. A motor is used to actuate the carriage while air cylinders are used to actuate the slide and pivot arm assembly.
摘要翻译：晶圆系统采用卡盘组件，用于将切割的晶片从晶片通过切割刀片中的孔移动到起飞输送机。卡盘组件包括通过枢转臂组件可枢转地安装的吸头，用于前后移动头部的滑块和用于使头部上下移动的滑架。当气缸用于致动滑动件和枢转臂组件时，电动机用于致动托架。

9. 发明授权

US06306016B1 Wafer notch polishing machine and method of polishing an orientation notch in a wafer 失效
标题翻译：晶片缺口抛光机以及抛光晶片中取向凹口的方法
公开(公告)号：US06306016B1
公开(公告)日：2001-10-23
申请号：US09631656
申请日：2000-08-03
申请人： Robert E. Steere, Jr. , Robert E. Steere, III
发明人： Robert E. Steere, Jr. , Robert E. Steere, III
IPC分类号： B24B100
CPC分类号： B24B9/065 , B24B27/0084
摘要： The notch polishing machine employs a plurality of polishing tapes which can be sequentially introduced into the notch of a wafer to polish both sides of the notch, i.e. the top and bottom surfaces. Each tape is pulled off a supply reel and passed into a mounting block sized to fit into the wafer notch. Each block is also mounted to be oscillated to effect a polishing action. Also, all the blocks are mounted in common to be pivoted between a position angularly disposed relative to the top of the top of the wafer and a position angularly disposed relative to the bottom of the wafer.
摘要翻译：缺口抛光机采用多个研磨带，其可以顺序地引入到晶片的凹口中以抛光凹口的两侧即顶表面和底表面。将每个胶带从供带盘上拉出，并进入尺寸适合于晶片切口的安装块。每个块也安装成摆动以实现抛光动作。此外，所有的块都共同安装，以便在相对于晶片顶部的顶部有角度设置的位置和相对于晶片底部成角度地设置的位置之间枢转。

10. 发明授权

US5319886A Tool mounting arrangement 失效
标题翻译：工具安装
公开(公告)号：US5319886A
公开(公告)日：1994-06-14
申请号：US76394
申请日：1993-06-14
申请人： Robert E. Steere, Jr.
发明人： Robert E. Steere, Jr.
IPC分类号： B24B45/00 , B24D5/16 , B24B41/00
CPC分类号： B24D5/16 , B24B45/00 , Y10T409/30952 , Y10T83/9379
摘要： The tool mounting arrangement employs a bushing within a recessed end of a shaft. The bushing has three lobes with inclined surfaces which abut against an internal conical wall of an annular mounting portion on the end of the shaft. A threaded screw passes through a washer and the grind wheel in non-rotatable relation into threaded relation in the bushing. Turning of the screw causes the bushing to be pulled in a direction out of the shaft so as to radially deform the annular mounting portion into uniform contact with the bore of the grind wheel while the grind wheel is simultaneously abutted square to the shaft axis. The annular mounting portion is provided with equi-spaced circumferentially disposed notches to permit passage of the lobes upon insertion of the bushing into the recess at the end of the shaft. One or more set screws is also provided in the shaft to prevent rotation of the bushing within the recess of the shaft.
摘要翻译：工具安装装置在轴的凹入端内采用衬套。衬套具有三个具有倾斜表面的凸角，其与轴的端部上的环形安装部分的内部锥形壁抵接。螺纹螺纹穿过垫圈和磨轮不可旋转地穿过衬套中的螺纹关系。螺杆的转动使得衬套被拉向轴外的方向，从而使环形安装部分径向变形成与磨轮的孔均匀接触，同时磨轮同时与轴线相接。环形安装部分设置有等间隔的周向设置的凹口，以允许在将衬套插入轴的端部处的凹部中时凸起通过。轴中还设置有一个或多个定位螺钉，以防止衬套在轴的凹部内旋转。

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