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热词
    • 4. 发明授权
    • Manufacturing a field oxide region for a semiconductor device
    • 制造用于半导体器件的场氧化物区域
    • US4570325A
    • 1986-02-18
    • US680909
    • 1984-12-12
    • Takayoshi Higuchi
    • Takayoshi Higuchi
    • H01L21/033H01L21/762H01L21/76H01L21/425
    • H01L21/76237H01L21/0332H01L21/0337H01L21/0338H01L21/76216
    • A method of manufacturing a semiconductor device in which a micro-patterned field oxide film can be formed includes the steps of: sequentially forming an oxidation-resistive film and an oxidizable film on a semiconductor substrate; forming a window in a predetermined region of said oxidizable film, in which said oxidation-resistive film is exposed; performing thermal oxidation to said oxidizable film so as to convert it into an insulating film and for narrowing a width of said window by volume expansion due to conversion; forming a field oxide film in a region of said semiconductor substrate defined by said window of said insulating film; and forming a semiconductor element in the region of said semiconductor substrate isolated by said field oxide film.
    • 可以形成微图形场氧化膜的半导体器件的制造方法包括以下步骤:在半导体衬底上依次形成氧化膜和可氧化膜; 在所述可氧化膜的预定区域中形成窗口,其中暴露所述抗氧化膜; 对所述可氧化膜进行热氧化,以便将其转化为绝缘膜,并且通过由于转化而产生的体积膨胀来缩小所述窗口的宽度; 在由所述绝缘膜的所述窗口限定的所述半导体衬底的区域中形成场氧化物膜; 以及在由所述场氧化物膜隔离的所述半导体衬底的区域中形成半导体元件。