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    • 2. 发明申请
    • Apparatus and method for rotational coating
    • 旋涂法的装置及方法
    • US20080286441A1
    • 2008-11-20
    • US11800406
    • 2007-05-04
    • Woo Sok ChangChristos MonovoukasReto Schoeb
    • Woo Sok ChangChristos MonovoukasReto Schoeb
    • C23C16/52B05C11/00
    • H01L21/6715G03F7/162
    • An apparatus for the rotational coating of a surface of a substrate with a fluid, in particular the surface of a wafer with a polymer liquid, especially with a photoresist includes a rotary plate (2) for receiving the substrate (11), a drive device (3) for rotating the rotary plate (2), a dispensing nozzle (4) for the application of a predeterminable quantity of fluid onto the surface of the substrate (11) for the purpose of forming a layer (12) and also a pump (5) for conveying the fluid, the pump being connectable, on the one hand, to a source (20) for the fluid and, on the other hand, to the dispensing nozzle (4). A viscosimeter (6) is provided with which the actual viscosity of the fluid can be determined by physical measurement prior to the application of the fluid. Furthermore a corresponding method is proposed.
    • 具有流体,特别是具有聚合物液体,特别是光致抗蚀剂的晶片的表面的用于旋转涂覆基底表面的装置包括用于接收基底(11)的旋转板(2),驱动装置 (3),用于旋转所述旋转板(2),分配喷嘴(4),用于在所述基板(11)的表面上施加可预定量的流体,以形成层(12),并且还具有泵 (5),用于输送流体,所述泵一方面可连接到用于流体的源(20),另一方面则连接到分配喷嘴(4)。 提供了一种粘度计(6),其中流体的实际粘度可以在施加流体之前通过物理测量来确定。 此外,提出了相应的方法。
    • 3. 发明授权
    • Filter and pump unit, filter and pump apparatus having such a unit and also method for filtering out
    • 具有这种单元的过滤器和泵单元,过滤器和泵装置以及用于过滤的方法
    • US08349172B2
    • 2013-01-08
    • US12011262
    • 2008-01-25
    • Reto Schoeb
    • Reto Schoeb
    • B01D29/88B01D35/26B01D29/92F04D13/02
    • B01D29/018B01D29/111B01D29/885B01D35/153B01D35/26F04D13/0606F04D15/0005F04D29/048F04D29/708
    • A filter and pump unit is proposed for the filtering out of particles from a fluid, there being a filter housing (2) which bounds a filter space (3) and has an inlet (21) and also an outlet (22) for the fluid to be filtered as well as a filter element (4) provided in the filter space (3), the filter element demarcating an inlet region (31) from an outlet region (32) of the filter space (3), with the inlet region (31) communicating with the inlet (21) and the outlet region (32) communicating with the outlet (22), there also being an impeller (5) which, as part of a rotary pump, can pump the fluid from the inlet region (31) through the filter element (4) into the outlet region (32), characterized in that a flow connection (6) is provided between the outlet region (32) and the impeller (5) so that at least a part of the fluid can flow back from the outlet region (32) to the impeller (5). Furthermore, a method for the filtering out of the particles from a fluid is proposed.
    • 提出了一种用于从流体中过滤颗粒的过滤器和泵单元,其具有界定过滤器空间(3)并具有用于流体的入口(21)和出口(22)的过滤器壳体(2) 过滤器以及设置在过滤器空间(3)中的过滤器元件(4),过滤元件与过滤器空间(3)的出口区域(32)分隔开入口区域(31),入口区域 (31)与与所述出口(22)连通的所述入口(21)和所述出口区域(32)连通,还具有叶轮(5),所述叶轮(5)作为旋转泵的一部分可以从所述入口区域 (31)通过所述过滤器元件(4)进入所述出口区域(32),其特征在于,在所述出口区域(32)和所述叶轮(5)之间设置流动连接(6),使得至少一部分 流体可以从出口区域(32)流回到叶轮(5)。 此外,提出了从流体中过滤掉颗粒的方法。
    • 4. 发明申请
    • Treatment apparatus for treating a surface of a body
    • 用于处理身体表面的处理装置
    • US20110240220A1
    • 2011-10-06
    • US13045437
    • 2011-03-10
    • Reto Schoeb
    • Reto Schoeb
    • H01L21/306B05C13/02
    • H01L21/6715H01L21/67051H01L21/6708
    • The invention relates to a treatment apparatus (1) for treating a surface (21) of a body (2) with a first treatment medium (31) and a second treatment medium (32). In this respect, the treatment apparatus (1) includes a holding device (5) rotatable about an axis of rotation (4) for receiving and holding the body (2) and a rotary drive (6) rotationally fixedly coupled to the rotatable holding device (5) as well as a supply device (7) for supplying the first treatment medium (31) and the second treatment medium (32) to the surface (21) of the body (2) held in the holding device (5). The treatment apparatus includes a collection container (8) having a separation element (80) which separation element (80) divides the collection container (8) into a first chamber (81) and into a second chamber (82) such that the first treatment medium (31) can be collected in the first chamber (81) and the second treatment medium (32) can be collected separately in the second chamber (82). In accordance with the invention, the collection container (8) includes a base chamber part (800) not movable with respect to the holding device (5) and the separation element (80) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium (31) can be led off into the first chamber (81) in the first position (A) and the second treatment medium (32) can be led off into the second chamber (82) in the second position (B).
    • 本发明涉及一种用于利用第一处理介质(31)和第二处理介质(32)处理主体(2)的表面(21)的处理设备(1)。 在这方面,处理装置(1)包括可围绕用于接收和保持主体(2)的旋转轴线(4)旋转的保持装置(5)和旋转地固定地联接到可旋转保持装置的旋转驱动器 (5)以及用于将第一处理介质(31)和第二处理介质(32)供给到保持在保持装置(5)中的主体(2)的表面(21)的供给装置(7)。 处理装置包括:收集容器(8),具有分离元件(80),分离元件(80)将收集容器(8)分成第一室(81)并进入第二室(82),使得第一处理 介质(31)可以被收集在第一室(81)中,并且第二处理介质(32)可以分开地收集在第二室(82)中。 根据本发明,收集容器(8)包括不能相对于保持装置(5)移动的基座部分(800),并且分离元件(80)可移动地布置在第一位置(A)和 第二位置(B),使得第一处理介质(31)能够在第一位置(A)中被引导到第一室(81)中,并且第二处理介质(32)可以被引导到第二室(82) )在第二位置(B)。
    • 5. 发明授权
    • Bioreactor and method for fluidly suspending a product
    • 生物反应器和流体悬浮产品的方法
    • US06632658B1
    • 2003-10-14
    • US09655203
    • 2000-09-05
    • Reto Schoeb
    • Reto Schoeb
    • C12M302
    • C12M21/08C12M27/20C12M27/24C12M29/18C12M41/00
    • The method for the holding in flotation of a substance such as a tissue part in a bioreactor (61) is characterized in that the substance (73) is acted upon with a fluid; and in that the flow of the fluid acts counter to gravity in such a manner that the substance (73) is held in flotation. The bioreactor (61) with a container (62) for a substance (73) which is to be acted upon with fluid comprises a first flow chamber (66a) to which a flowing fluid can be supplied, with the first flow chamber (66a) being designed in such a manner that the fluid which flows upwardly therein has a lower speed with increasing height.
    • 在生物反应器( 61 )中保持浮选诸如组织部分的物质的方法的特征在于,物质( BOLD> )用流体进行; 并且流体的流动以使物质( 73 )在浮选中保持相反的方式起作用。 对于物质( 73 > >

      将要用流体作用的BOLD> )包括流动的第一流动室( 66 a ) 可以以这样的方式设计流体,其中第一流动室( 66 a ) 具有越来越高的速度。

    • 7. 发明授权
    • Mixing apparatus and container for such
    • 混合装置和容器等
    • US07832922B2
    • 2010-11-16
    • US12212838
    • 2008-09-18
    • Reto Schoeb
    • Reto Schoeb
    • B01F13/08
    • B01F13/0827B01F7/00716B01F7/00925B01F7/0095B01F15/00071B01F15/00831B01F15/0085B01F2215/0032B01F2215/0073C12M23/14C12M27/02F16C32/0493F16C2380/26
    • A mixing apparatus is proposed having a container (2) for the mixing of media which has at least one inlet (31, 32, 33, 34, 35, 36) for the media to be mixed or at least one outlet (4), with a central cut-out (5) being provided which extends in a longitudinal direction (A) into the container and is bounded relative to the inner space (6) of the container (2) by a wall (51), with a permanently magnetic mixing member (7) being provided in the container (2) adjacent to the cut-out (5) for the mixing of the media, and with a drive unit (8) being provided in the cut-out (5) by which the mixing member (7) can be set into rotation via a magnetic coupling. The drive unit (8) is movably arranged in the cut-out (5) such that the position of the mixing member (7) in the container is variable in a controlled manner.
    • 提出了一种混合装置,其具有用于混合介质的容器(2),该容器具有用于待混合的介质的至少一个入口(31,32,33,34,35,36)或至少一个出口(4), 具有中心切口(5),其沿纵向方向(A)延伸到容器中并且通过壁(51)相对于容器(2)的内部空间(6)限定,具有永久性 磁性混合构件(7)设置在与切口(5)相邻的容器(2)中,用于混合介质,以及设置在切口(5)中的驱动单元(8),通过该驱动单元 可以通过磁耦合将混合构件(7)设置成旋转。 驱动单元(8)可移动地布置在切口(5)中,使得混合构件(7)在容器中的位置以受控的方式可变。
    • 8. 发明申请
    • Mixing Apparatus And Container For Such
    • 混合装置和容器
    • US20090142827A1
    • 2009-06-04
    • US12212838
    • 2008-09-18
    • Reto Schoeb
    • Reto Schoeb
    • B01F13/08C12M1/02
    • B01F13/0827B01F7/00716B01F7/00925B01F7/0095B01F15/00071B01F15/00831B01F15/0085B01F2215/0032B01F2215/0073C12M23/14C12M27/02F16C32/0493F16C2380/26
    • A mixing apparatus is proposed having a container (2) for the mixing of media which has at least one inlet (31, 32, 33, 34, 35, 36) for the media to be mixed or at least one outlet (4), with a central cut-out (5) being provided which extends in a longitudinal direction (A) into the container and is bounded relative to the inner space (6) of the container (2) by a wall (51), with a permanently magnetic mixing member (7) being provided in the container (2) adjacent to the cut-out (5) for the mixing of the media, and with a drive unit (8) being provided in the cut-out (5) by which the mixing member (7) can be set into rotation via a magnetic coupling. The drive unit (8) is movably arranged in the cut-out (5) such that the position of the mixing member (7) in the container is variable in a controlled manner.
    • 提出了一种混合装置,其具有用于混合介质的容器(2),该容器具有用于待混合的介质的至少一个入口(31,32,33,34,35,36)或至少一个出口(4), 具有中心切口(5),其沿纵向方向(A)延伸到容器中并且通过壁(51)相对于容器(2)的内部空间(6)限定,具有永久性 磁性混合构件(7)设置在与切口(5)相邻的容器(2)中,用于混合介质,以及设置在切口(5)中的驱动单元(8),通过该驱动单元 可以通过磁耦合将混合构件(7)设置成旋转。 驱动单元(8)可移动地布置在切口(5)中,使得混合构件(7)在容器中的位置以受控的方式可变。
    • 9. 发明授权
    • Treatment apparatus for treating a surface of a body
    • US10468277B2
    • 2019-11-05
    • US13045437
    • 2011-03-10
    • Reto Schoeb
    • Reto Schoeb
    • H01L21/306B05C13/02H01L21/67
    • The invention relates to a treatment apparatus (1) for treating a surface (21) of a body (2) with a first treatment medium (31) and a second treatment medium (32). In this respect, the treatment apparatus (1) includes a holding device (5) rotatable about an axis of rotation (4) for receiving and holding the body (2) and a rotary drive (6) rotationally fixedly coupled to the rotatable holding device (5) as well as a supply device (7) for supplying the first treatment medium (31) and the second treatment medium (32) to the surface (21) of the body (2) held in the holding device (5). The treatment apparatus includes a collection container (8) having a separation element (80) which separation element (80) divides the collection container (8) into a first chamber (81) and into a second chamber (82) such that the first treatment medium (31) can be collected in the first chamber (81) and the second treatment medium (32) can be collected separately in the second chamber (82). In accordance with the invention, the collection container (8) includes a base chamber part (800) not movable with respect to the holding device (5) and the separation element (80) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium (31) can be led off into the first chamber (81) in the first position (A) and the second treatment medium (32) can be led off into the second chamber (82) in the second position (B).
    • 10. 发明申请
    • Filter and pump unit, filter and pump apparatus having such a unit and also method for filtering out
    • 具有这种单元的过滤器和泵单元,过滤器和泵装置以及用于过滤的方法
    • US20080190870A1
    • 2008-08-14
    • US12011262
    • 2008-01-25
    • Reto Schoeb
    • Reto Schoeb
    • B01D63/00B01D35/02
    • B01D29/018B01D29/111B01D29/885B01D35/153B01D35/26F04D13/0606F04D15/0005F04D29/048F04D29/708
    • A filter and pump unit is proposed for the filtering out of particles from a fluid, there being a filter housing (2) which bounds a filter space (3) and has an inlet (21) and also an outlet (22) for the fluid to be filtered as well as a filter element (4) provided in the filter space (3), the filter element demarcating an inlet region (31) from an outlet region (32) of the filter space (3), with the inlet region (31) communicating with the inlet (21) and the outlet region (32) communicating with the outlet (22), there also being an impeller (5) which, as part of a rotary pump, can pump the fluid from the inlet region (31) through the filter element (4) into the outlet region (32), characterized in that a flow connection (6) is provided between the outlet region (32) and the impeller (5) so that at least a part of the fluid can flow back from the outlet region (32) to the impeller (5). Furthermore, a method for the filtering out of the particles from a fluid is proposed.
    • 提出了一种用于从流体中过滤颗粒的过滤器和泵单元,其具有界定过滤器空间(3)并具有用于流体的入口(21)和出口(22)的过滤器壳体(2) 过滤器以及设置在过滤器空间(3)中的过滤器元件(4),过滤元件与过滤器空间(3)的出口区域(32)分隔开入口区域(31),入口区域 (31)与与所述出口(22)连通的所述入口(21)和所述出口区域(32)连通,还具有叶轮(5),所述叶轮(5)作为旋转泵的一部分可以从所述入口区域 (31)通过所述过滤器元件(4)进入所述出口区域(32),其特征在于,在所述出口区域(32)和所述叶轮(5)之间设置流动连接(6),使得至少一部分 流体可以从出口区域(32)流回到叶轮(5)。 此外,提出了从流体中过滤掉颗粒的方法。