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1. 发明申请

US20070277620A1 Composite mechanical transducers and approaches therefor 有权
标题翻译：复合机械传感器及其方法
公开(公告)号：US20070277620A1
公开(公告)日：2007-12-06
申请号：US11446568
申请日：2006-06-02
申请人： Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
发明人： Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
IPC分类号： G01L1/00
CPC分类号： G01L9/0022 , G01L19/04 , H03H9/2473
摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
摘要翻译：诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。根据本发明的示例性实施例，为机械传感器应用实现材料的组合以减轻温度相关的变化。在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。另一种应用是针对硅 - 二氧化硅的材料组合。

2. 发明授权

US07806586B2 Composite mechanical transducers and approaches therefor 有权
标题翻译：复合机械传感器及其方法
公开(公告)号：US07806586B2
公开(公告)日：2010-10-05
申请号：US11446568
申请日：2006-06-02
申请人： Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
发明人： Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
IPC分类号： G01K11/22
CPC分类号： G01L9/0022 , G01L19/04 , H03H9/2473
摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
摘要翻译：诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。根据本发明的示例性实施例，为机械传感器应用实现材料的组合以减轻温度相关的变化。在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。另一种应用是针对硅 - 二氧化硅的材料组合。

3. 发明申请

US20080204173A1 COMPOSITE MECHANICAL TRANSDUCERS AND APPROACHES THEREFOR 有权
标题翻译：复合机械传感器及其应用
公开(公告)号：US20080204173A1
公开(公告)日：2008-08-28
申请号：US12017228
申请日：2008-01-21
申请人： Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
发明人： Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
IPC分类号： H01P7/00 , H01P11/00
CPC分类号： G01L9/0022 , G01L19/04 , H03H9/02338 , H03H9/2473 , Y10T29/49007
摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
摘要翻译：诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。根据本发明的示例性实施例，为机械传感器应用实施材料的组合以减轻或接近所选周转温度的温度相关变化。在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。另一种应用是针对硅 - 二氧化硅的材料组合。

4. 发明授权

US07824098B2 Composite mechanical transducers and approaches therefor 有权
标题翻译：复合机械传感器及其方法
公开(公告)号：US07824098B2
公开(公告)日：2010-11-02
申请号：US12017228
申请日：2008-01-21
申请人： Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
发明人： Renata Melamud , Bongsang Kim , Matthew Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
IPC分类号： G01P15/08 , G01R3/00 , G01K11/22
CPC分类号： G01L9/0022 , G01L19/04 , H03H9/02338 , H03H9/2473 , Y10T29/49007
摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
摘要翻译：诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。根据本发明的示例性实施例，为机械传感器应用实施材料的组合以减轻或接近所选周转温度的温度相关变化。在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。另一种应用是针对硅 - 二氧化硅的材料组合。

5. 发明授权

US08602092B2 Pump and fan control concepts in a cooling system 有权
标题翻译：冷却系统中的泵和风扇控制概念
公开(公告)号：US08602092B2
公开(公告)日：2013-12-10
申请号：US11400347
申请日：2006-04-06
申请人： Daniel J. Lenehan , Kenneth Goodson , Thomas W. Kenny , Mark Munch , Saroj Sahu
发明人： Daniel J. Lenehan , Kenneth Goodson , Thomas W. Kenny , Mark Munch , Saroj Sahu
IPC分类号： F24F11/06
CPC分类号： H01L23/473 , H01L23/34 , H01L23/467 , H01L2924/0002 , H01L2924/00
摘要： A closed loop cooling system and apparatus for controlling a fluid flow rate through the closed loop cooling system, the apparatus comprising a heat exchanger coupled to at least one heat generating device for removing waste heat from the heat generating device, at least one pump for circulating the fluid, a heat rejector for receiving the fluid, at least one fan for removing waste heat from the heat rejector, at least one temperature sensor coupled to the heat generating device to measure the temperature value of the at least one heat generating device, and a controller electrically coupled to the at least one pump, the at least one fan, and the at least one temperature sensor for receiving the temperature value to selectively control the fluid flow rate and the air flow rate, based on the temperature value.
摘要翻译：一种用于控制通过闭环冷却系统的流体流速的闭环冷却系统和装置，该装置包括耦合到至少一个用于从发热装置排出废热的至少一个发热装置的热交换器，至少一个用于循环的泵所述流体，用于接收流体的热排出器，用于从所述热排出器去除废热的至少一个风扇，耦合到所述发热装置的至少一个温度传感器以测量所述至少一个发热装置的温度值;以及电耦合到所述至少一个泵，所述至少一个风扇和所述至少一个温度传感器的控制器，用于接收所述温度值，以基于所述温度值选择性地控制所述流体流速和所述空气流速。

6. 发明授权

US07185697B2 Electroosmotic microchannel cooling system 失效
标题翻译： Electroosmotic微通道冷却系统
公开(公告)号：US07185697B2
公开(公告)日：2007-03-06
申请号：US10933068
申请日：2004-09-02
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
IPC分类号： F28D15/06 , F04F11/00
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
摘要翻译：根据本发明的装置和方法优选地利用电渗泵，其能够在不移动机械部件的情况下产生高压和流动，并且相关联地产生不可接受的电和噪声噪声以及相关联的可靠性降低。这些电渗泵优选地由相对于目前可用的微量泵提高性能，效率以及降低重量和制造成本的材料和结构来制造。这些电渗泵还优选地允许重新捕获可能提供长期闭环操作的放出气体和沉积材料。根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度，并且可以利用多个冷却回路来允许独立调节装置温度曲线的特殊和时间特性。还描述了新颖的微通道结构。

7. 发明授权

US06959608B2 Ultra-miniature pressure sensors and probes 失效
标题翻译：超微型压力传感器和探头
公开(公告)号：US06959608B2
公开(公告)日：2005-11-01
申请号：US10445276
申请日：2003-05-23
申请人： Mark J. Bly , Thomas W. Kenny , Sara A. Shaughnessy , Michael S. Bartsch
发明人： Mark J. Bly , Thomas W. Kenny , Sara A. Shaughnessy , Michael S. Bartsch
IPC分类号： G01L9/00
CPC分类号： G01L9/0042
摘要： A new and versatile ultra-miniature pressure sensor comprises a very thin diaphragm of approximately one micron or less, e.g., 0.2 microns. In some embodiments, the diaphragm has a radius of 20 microns and the pressure sensor can detect signals at or near 0.1 Atm with 1% accuracy. The diaphragm is formed by epitaxial growth of silicon or by bonding and etching. A plurality of high sensitivity piezoresistive strain gauges measure strain of the diaphragm. Less than 0.1 microns thick, the piezoresistive strain gauges are embedded in the diaphragm by ion implantation or formed thereon by epitaxial growth. The ability to form ultra-thin piezoresistive layers on very thin diaphragms enables the miniaturization of the pressure sensor as well as any device that employs it.
摘要翻译：一种新型和通用的超微型压力传感器包括大约一微米或更小，例如0.2微米的非常薄的隔膜。在一些实施例中，隔膜具有20微米的半径，并且压力传感器可以以0.1atm或接近0.1％的精度检测信号。膜通过硅的外延生长或通过结合和蚀刻形成。多个高灵敏度压阻应变计测量隔膜的应变。小于0.1微米厚的压电应变计通过离子注入嵌入隔膜中或通过外延生长在其上形成。在非常薄的隔膜上形成超薄压阻层的能力使压力传感器以及采用它的任何设备都能够小型化。

8. 发明授权

US5315247A Method and apparatus for measuring a magnetic field using a deflectable energized loop and a tunneling tip 失效
标题翻译：使用可偏转的通电回路和隧道末端来测量磁场的方法和装置
公开(公告)号：US5315247A
公开(公告)日：1994-05-24
申请号：US996613
申请日：1992-12-24
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01R33/02
CPC分类号： G01P15/0894 , G01P15/125 , G01P15/131 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852 , Y10S977/865
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.
摘要翻译：用于测量作用在空间上的物体或流体的重力和惯性力，磁场或波或辐射能的方法和装置提供通过电极和空间中的物体或流体之间的间隙的电穿隧电流，并且与任何选择一个这样的力，磁场或作用在该物体或流体上的波或辐射能。这些方法和装置感测到该间隙的电性质的相应变化，并响应于相应的变化确定后者的力，磁场或波或辐射能，从而感测或测量诸如加速度，位置，粒子质量，速度，磁场强度，存在或方向，或波或辐射能量强度，存在或方向。

9. 发明授权

US08464781B2 Cooling systems incorporating heat exchangers and thermoelectric layers 有权
标题翻译：包括热交换器和热电层的冷却系统
公开(公告)号：US08464781B2
公开(公告)日：2013-06-18
申请号：US11582657
申请日：2006-10-17
申请人： Thomas W. Kenny , Mark Munch , Peng Zhou , James Gill Shook , Kenneth Goodson , Dave Corbin , Mark McMaster , James Lovette
发明人： Thomas W. Kenny , Mark Munch , Peng Zhou , James Gill Shook , Kenneth Goodson , Dave Corbin , Mark McMaster , James Lovette
IPC分类号： F28F7/00 , F28D15/00 , H05K7/20 , F25B21/02
CPC分类号： F04B17/00 , F04B19/006 , F25B21/02 , F25B2321/0252 , F28D15/00 , F28D15/0266 , F28D21/0015 , F28D2021/0029 , F28F3/02 , F28F3/086 , F28F3/12 , F28F13/06 , F28F13/185 , F28F2210/10 , F28F2245/02 , F28F2260/02 , G06F1/20 , G06F2200/201 , G06Q20/20 , H01L23/38 , H01L23/473 , H01L23/4735 , H01L35/30 , H01L2924/0002 , H01L2924/00
摘要： A system for cooling a heat source includes a fluid heat exchanger, a pump, a thermoelectric device and a heat rejector. The thermoelectric device includes a cooling portion and a heating portion. The heat rejector is configured to be in thermal contact with at least a portion of the heating portion of the thermoelectric device. The pump is coupled with the fluid heat exchanger and configured to pass a fluid therethrough. The thermoelectric device is configured along with the heat exchanger in the cooling system.
摘要翻译：用于冷却热源的系统包括流体热交换器，泵，热电装置和散热器。热电装置包括冷却部和加热部。散热器构造成与热电装置的加热部分的至少一部分热接触。泵与流体热交换器联接并且构造成使流体通过其中。热电装置与冷却系统中的热交换器一起构成。

10. 发明授权

US07201012B2 Remedies to prevent cracking in a liquid system 有权
标题翻译：补救措施以防止液体系统中的开裂
公开(公告)号：US07201012B2
公开(公告)日：2007-04-10
申请号：US10643641
申请日：2003-08-18
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas W. Kenny , James Gill Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas W. Kenny , James Gill Shook
IPC分类号： F25D23/12 , F24H3/02 , G06K1/20
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.
摘要翻译：提供使用最小尺寸和体积的外壳，气穴，可压缩物体和柔性物体的液体冷却系统，以防止冻结时水性溶液的膨胀。在这种系统中，管道，泵和热交换器被设计成防止其外壳和腔室的破裂。还描述了防止液体冷却系统中的裂纹的方法。在所有这些情况下，系统必须设计成在水被冻结时容忍膨胀。

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