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    • 1. 发明授权
    • Micro-fabricated electrokinetic pump
    • 微电动动力泵
    • US07449122B2
    • 2008-11-11
    • US10968376
    • 2004-10-18
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • F04B1/00
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
    • 6. 发明申请
    • Method for improved characterization of single-pass bi-directional printers
    • US20050018256A1
    • 2005-01-27
    • US10627494
    • 2003-07-25
    • David CorbinMark ShawPeter Torpey
    • David CorbinMark ShawPeter Torpey
    • B41J2/21B41J2/525G06K15/10G06T1/00H04N1/46H04N1/60
    • H04N1/6033G06K15/027G06K15/102G06K2215/0094
    • The method of the present invention involves first estimating the common gamut of the colors that this printer is expected to reproduce. Two color test targets are defined, each containing a wide range of color patches spanning color space. Preferably comprising color patches which are expected to be outside the gamut of the printer as well as color patches expected to be within the gamut of the printer. The left-to-right test target is printed in single-pass, uni-directional print mode, (printing on left-to-right scans only) and a color calibration table for left-to-right printing is generated. The right-to-left test target is printed in single-pass, unidirectional print mode, (printing on right-to-left scans only) and a color calibration table specific for right-to-left printing is generated. The next step of the present invention involves determining the mathematical intersection of the gamuts produced by printing in left-to-right mode only and by printing in right-to-left mode only. This is done by, first printing the left-to-right test target processed by the color calibration table associated with the primary print direction. Then, printing the right-to-left test target processed by the color calibration table associated with the secondary print direction and comparing each of the corresponding outputs. Colors which are within the gamut of both left-to-right only and right-to-left only printing are identified by their similarity or distance from each other in color space. Thereafter and having obtained the gamut intersection of left-to-right and right-to-left printing modes, new calibration tables are generated for each printing direction with the starting gamut (range of achievable colors) based on a slightly smaller gamut than the gamut intersection identified. In other words, the color gamut, having been clipped in both directions to the intersection of the gamuts, becomes the new gamut for the iterative calibration process.
    • 7. 发明授权
    • Automatic wafer loading and pre-alignment system
    • 自动晶片装载和预对准系统
    • US3972424A
    • 1976-08-03
    • US604805
    • 1975-08-14
    • Kenneth LevyDavid CorbinAlan J. FlemingDavid FriedmanGilbert G. FryklundVance ParkerGerd Schliemann
    • Kenneth LevyDavid CorbinAlan J. FlemingDavid FriedmanGilbert G. FryklundVance ParkerGerd Schliemann
    • H01L21/00H01L21/677H01L21/68B65G47/24
    • H01L21/67259H01L21/67766H01L21/67778H01L21/681B65H2301/42256
    • An automatic wafer loading and pre-alignment system for integrated circuit wafer-mask Aligners. A belt feed track system is employed to transport wafers from a "send" wafer storage carrier to a wafer pre-alignment station. The wafer is machanically pre-aligned with respect to the wafer chuck of the Aligner by means of a roller arm and flat-finder system. After completion of the pre-alignment process, the Aligner turntable is rotated to carry the pre-aligned wafer and chuck to the home position of the turntable and at the same time position another chuck at the pre-alignment station. If the new chuck at the pre-alignment station contains a wafer, the wafer is transported from the chuck to a "receive" wafer storage carrier by means of a belt return track system. The feed and return wafer belt track systems have a common portion between the pre-alignment station and the respective "send" and "receive" wafer storage carriers. Photosensors are used to detect the presence or absence of wafers at critical locations in the loading system and at the pre-alignment station.
    • 用于集成电路晶片掩模对准器的自动晶片装载和预对准系统。 使用带馈送轨道系统将晶片从“发送”晶片存储载体传送到晶片预对准站。 相对于对准器的晶片卡盘,通过辊臂和取平器系统机械地预对准晶片。 在完成预对准过程之后,Aligner转盘旋转,以将预对准的晶片和卡盘运送到转台的原始位置,同时将另一个卡盘放置在预对准工位。 如果预对准站上的新卡盘包含晶片,则通过带返回轨道系统将晶片从卡盘传送到“接收”晶片存储载体。 馈送和返回晶片带轨道系统在预对准站和相应的“发送”和“接收”晶片存储载体之间具有公共部分。 光传感器用于检测加载系统和预对准站的关键位置处晶圆的存在或不存在。
    • 9. 发明申请
    • MICRO-FABRICATED ELECTROKINETIC PUMP
    • 微型电动泵
    • US20050042110A1
    • 2005-02-24
    • US10366121
    • 2003-02-12
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • F04B17/00F04B19/00F04F99/00F04F11/00F04B37/02
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。