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    • 5. 发明授权
    • Support planar and tapered quasi-planar germanium waveguides for infrared evanescent-wave sensing
    • 支持用于红外瞬逝波感测的平面和锥形准平面锗波导
    • US07282105B1
    • 2007-10-16
    • US10320895
    • 2002-12-17
    • Susan E. PlunkettJames J. StoneMark Stephen Braiman
    • Susan E. PlunkettJames J. StoneMark Stephen Braiman
    • B32B31/00G02B6/10
    • G02B6/1228G01N21/552G01N21/7703G02B6/42G02B2006/12195
    • Miniature planar IR waveguides of thickness 30–50 μm, consisting of 12-mm long, 2-mm wide strips of Ge supported on ZnS substrates and tapered quasi-tapered waveguides, tapered from a thickness of 1 mm at the ends to a minimum of 1–100 μm at the center, are disclosed. The surface sensitivity is increased as a function of incidence or bevel angle. The tapered waveguide improves the efficiency of the optical coupling both into the waveguide from an FTIR spectrometer, and out of the waveguide onto a small-area IR detector. The tapering makes it possible to dispense with using an IR microscope couple light through the waveguide, enabling efficient coupling with a detector directly coupled to an immersion lens. This optical arrangement makes such thin supported waveguides more useful as sensors, because they can be made quite long (e.g. 50 mm) and mounted horizontally. Furthermore, even with a 20-μm×1-mm cross section, sufficient throughput is obtained to give signal/noise ratios in excess of 1000 over most of the 1000–5000 cm-1 range, with just 2 min of scanning at 8 cm-1 resolution.
    • 厚度为30-50μm的微型平面IR波导,由支撑在ZnS基板上的12mm长,2mm宽的Ge带和锥形准锥形波导组成,其从端部的厚度为1mm,至少为 中心的1-100 mum被披露。 表面灵敏度作为入射角或斜角角的函数增加。 锥形波导提高了从FTIR光谱仪进入波导的光耦合效率,并将波导从波导中提取到小面积IR检测器上。 渐缩使得可以省略使用IR显微镜将光耦合通过波导,使得能够与直接耦合到浸没透镜的检测器有效耦合。 这种光学布置使得这种薄的支撑波导作为传感器更有用,因为它们可以被制造得相当长(例如50mm)并且水平安装。 此外,即使采用20mumx1-mm的横截面,也可以获得足够的通过量,以在1000-5000cm -1范围内的大部分时间内提供超过1000的信号/噪声比,只需2分钟 以8cm-1分辨率进行扫描。
    • 6. 发明授权
    • Support planar and tapered quasi-planar germanium waveguides for infrared evanescent-wave sensing
    • 支持用于红外瞬逝波感测的平面和锥形准平面锗波导
    • US06496636B1
    • 2002-12-17
    • US09426055
    • 1999-10-25
    • Mark Stephen BraimanSusan E. PlunkettJames J. Stone
    • Mark Stephen BraimanSusan E. PlunkettJames J. Stone
    • G02B610
    • G02B6/1228G01N21/552G01N21/7703G02B6/42G02B2006/12195
    • Miniature planar IR waveguides of thickness 30-50 &mgr;m, consisting of 12-mm long, 2-mm wide strips of Ge supported on ZnS substrates and tapered quasi-tapered waveguides, tapered from a thickness of 1 mm at the ends to a minimum of 1-100 &mgr;m at the center, are disclosed. The surface sensitivity is increased as a function of incidence or bevel angle. The tapered waveguide improves the efficiency of the optical coupling both into the waveguide from an FTIR spectrometer, and out of the waveguide onto a small-area IR detector. The tapering makes it possible to dispense with using an IR microscope couple light through the waveguide, enabling efficient coupling with a detector directly coupled to an immersion lens. This optical arrangement makes such thin supported waveguides more useful as sensors, because they can be made quite long (e.g. 50 mm) and mounted horizontally. Furthermore, even with a 20-&mgr;m×1-mm cross section, sufficient throughput is obtained to give signal/noise ratios in excess of 1000 over most of the 1000-5000 cm−1 range, with just 2 min of scanning at 8 cm−1 solution.
    • 厚度为30-50μm的微型平面IR波导,由支撑在ZnS基板上的12mm长,2mm宽的Ge带和锥形准锥形波导组成,其从端部的厚度为1mm,至少为 中心的1-100 mum被披露。 表面灵敏度作为入射角或斜角角的函数增加。 锥形波导提高了从FTIR光谱仪进入波导的光耦合效率,并将波导从波导中提取到小面积IR检测器上。 渐缩使得可以省略使用IR显微镜将光耦合通过波导,使得能够与直接耦合到浸没透镜的检测器有效耦合。 这种光学布置使得这种薄的支撑波导作为传感器更有用,因为它们可以被制造得相当长(例如50mm)并且水平安装。 此外,即使采用20mumx1-mm的横截面,也可获得足够的产量,以在1000-5000cm -1范围内的大部分时间内产生超过1000的信噪比,而在8cm -1处仅扫描2分钟 解。
    • 7. 发明授权
    • Support planar germanium waveguides for infrared evanescent-wave sensing
    • 支持平面锗波导,用于红外消逝波感测
    • US5980831A
    • 1999-11-09
    • US874711
    • 1997-06-13
    • Mark S. BraimanSusan E. PlunkettJames J. Stone
    • Mark S. BraimanSusan E. PlunkettJames J. Stone
    • G01N21/55G01N21/00
    • G01N21/552
    • We have fabricated miniature planar IR waveguides of thickness 30-50 .mu.m, consisting of 12-mm long, 2-mm wide strips of Ge supported on ZnS substrates. Evidence for efficient propagation of broadband IR light through these waveguides is provided by the presence of characteristic high and low frequency optical cut-offs of Ge; by the observation of an oscillatory interference pattern in the transmittance spectrum, which exhibits a dependence on waveguide thickness and propagation angle closely matching waveguide theory; and by the detection of strong evanescent-wave absorption from small (2 mm.sup.2) droplets of liquid, e.g. water, on the waveguide surface. As also predicted by theory, the surface sensitivity (detected light absorbance per unit area of sample-waveguide contact) was shown to increase as a function of incidence or bevel angle.
    • 我们制造了厚度为30-50微米的微型平面IR波导,由支撑在ZnS基底上的12英寸长,2毫米宽的Ge带组成。 通过存在Ge的特征性高频和低频光学截止来提供宽带IR光通过这些波导的有效传播的证据; 通过观察透射光谱中的振荡干涉图案,其显示出与波导理论紧密匹配的波导厚度和传播角度的依赖性; 并且通过检测来自小(2mm 2)液体液滴的强的ev逝波吸收。 水,在波导表面。 也可以通过理论预测,表面灵敏度(样品 - 波导接触的每单位面积的检测光吸收率)显示随着入射角或斜角角度的增加而增加。