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    • 2. 发明授权
    • Methods of forming inductors on integrated circuits
    • 在集成电路上形成电感器的方法
    • US08042260B2
    • 2011-10-25
    • US12250385
    • 2008-10-13
    • Peter J. HopperPeter JohnsonPeter SmeysAndrei Papou
    • Peter J. HopperPeter JohnsonPeter SmeysAndrei Papou
    • H01F7/06
    • H01L23/5227H01F17/0006H01F41/046H01L2924/0002Y10T29/4902Y10T29/49071Y10T29/49073Y10T29/49075Y10T29/49124Y10T29/4913H01L2924/00
    • The claimed invention pertains to methods of forming one or more inductors on a semiconductor substrate. In one embodiment, a method of forming an array of inductor core elements on a semiconductor substrate that includes integrated circuits is disclosed. A first set of spaced apart metallic core elements are formed over the substrate. Isolation sidewalls are then formed on side surfaces of the core elements. Afterward, a second set of metallic core elements are formed over the substrate. The first and second sets of core elements are substantially co-planar and interleaved such that only the isolation sidewalls separate adjacent core elements. Particular embodiments involve other processing operations, such as the selective electroplating of different types of metal to form core elements and/or the deposition and etching away of an isolation layer to form isolation sidewalls on the core elements.
    • 所要求保护的发明涉及在半导体衬底上形成一个或多个电感器的方法。 在一个实施例中,公开了一种在包括集成电路的半导体衬底上形成电感器芯元件阵列的方法。 第一组间隔开的金属芯元件形成在衬底上。 然后在芯元件的侧表面上形成隔离侧壁。 之后,在衬底上形成第二组金属芯元件。 第一和第二组芯元件基本上是共面的和交错的,使得只有隔离侧壁分隔相邻的芯元件。 具体实施例涉及其他处理操作,例如不同类型的金属的选择性电镀以形成核心元件和/或沉积和蚀刻离开隔离层以在核心元件上形成隔离侧壁。
    • 4. 发明授权
    • Method of making a controlled seam laminated magnetic core for high frequency on-chip power inductors
    • 制造用于高频片上功率电感器的可控缝层压磁芯的方法
    • US08314676B1
    • 2012-11-20
    • US13098656
    • 2011-05-02
    • Peter SmeysAndrei PapouPeter JohnsonAnuraag Mohan
    • Peter SmeysAndrei PapouPeter JohnsonAnuraag Mohan
    • H01F5/00H01F7/06H01L27/08
    • H01F17/0033H01F41/046Y10T29/4902Y10T29/49075Y10T29/49078
    • A controlled seam magnetic core lamination utilizable in an inductor structure includes a magnetic base and first and second spaced-apart magnetic sidewalls extending substantially orthogonally from the base to define a seam therebetween. The controlled seam magnetic core lamination is utilizable in an inductor structure that includes: a non-conductive lower mold; a plurality of spaced-apart controlled seam lower laminations formed in the lower mold, each magnetic lower lamination having a horizontal base and first and second spaced-apart sidewalls extending substantially vertically upward from the base to define a seam therebetween; a non-conductive isolation layer formed on the lower mold and the magnetic lower laminations; a conductive trace formed on the isolation layer; a non-conductive upper mold formed over the isolation layer and the conductive trace; and a plurality of spaced-apart controlled seam magnetic upper laminations formed in the upper mold, each magnetic upper lamination having a horizontal base and first and second spaced-apart sidewalls that extend substantially vertically upward from the base to define a seam therebetween.
    • 可用于电感器结构的受控接缝磁芯层叠体包括磁性基座和从基座基本正交地延伸的第一和第二隔开的磁性侧壁,以在其间限定接缝。 受控接缝磁芯层叠可用于电感器结构,其包括:非导电下模; 形成在下模具中的多个间隔开的受控接缝下层叠片,每个磁下层层叠件具有水平底座以及从底座基本垂直向上延伸的第一和第二间隔开的侧壁,以在其间限定接缝; 形成在下模具和磁性下层叠板上的非导电隔离层; 形成在隔离层上的导电迹线; 形成在隔离层和导电迹线上的非导电上模; 以及形成在上模具中的多个间隔开的受控接缝磁性上层叠片,每个磁性上层压板具有水平底座和第一和第二隔开的侧壁,其从基座基本上垂直向上延伸以在其间限定接缝。
    • 5. 发明申请
    • METHOD OF MAKING A CONTROLLED SEAM LAMINATED MAGNETIC CORE FOR HIGH FREQUENCY ON-CHIP POWER INDUCTORS
    • 制造用于高频片上功率电感器的受控海绵层压磁芯的方法
    • US20120280781A1
    • 2012-11-08
    • US13098656
    • 2011-05-02
    • Peter SmeysAndrei PapouPeter JohnsonAnuraag Mohan
    • Peter SmeysAndrei PapouPeter JohnsonAnuraag Mohan
    • H01F27/24H01F41/02
    • H01F17/0033H01F41/046Y10T29/4902Y10T29/49075Y10T29/49078
    • A controlled seam magnetic core lamination utilizable in an inductor structure includes a magnetic base and first and second spaced-apart magnetic sidewalls extending substantially orthogonally from the base to define a seam therebetween. The controlled seam magnetic core lamination is utilizable in an inductor structure that includes: a non-conductive lower mold; a plurality of spaced-apart controlled seam lower laminations formed in the lower mold, each magnetic lower lamination having a horizontal base and first and second spaced-apart sidewalls extending substantially vertically upward from the base to define a seam therebetween; a non-conductive isolation layer formed on the lower mold and the magnetic lower laminations; a conductive trace formed on the isolation layer; a non-conductive upper mold formed over the isolation layer and the conductive trace; and a plurality of spaced-apart controlled seam magnetic upper laminations formed in the upper mold, each magnetic upper lamination having a horizontal base and first and second spaced-apart sidewalls that extend substantially vertically upward from the base to define a seam therebetween.
    • 可用于电感器结构的受控接缝磁芯层叠体包括磁性基座和从基座基本正交地延伸的第一和第二隔开的磁性侧壁,以在其间限定接缝。 受控接缝磁芯层叠可用于电感器结构,其包括:非导电下模; 形成在下模具中的多个间隔开的受控接缝下层叠片,每个磁下层片具有水平底座和第一和第二间隔开的侧壁,从侧面基本垂直向上延伸以在其间限定接缝; 形成在下模具和磁性下层叠板上的非导电隔离层; 形成在隔离层上的导电迹线; 形成在隔离层和导电迹线上的非导电上模; 以及形成在上模具中的多个间隔开的受控接缝磁性上层叠片,每个磁性上层压板具有水平底座和第一和第二隔开的侧壁,其从基座基本上垂直向上延伸以在其间限定接缝。
    • 8. 发明授权
    • Integrated circuits with inductors
    • 集成电路与电感器
    • US07755463B2
    • 2010-07-13
    • US12250382
    • 2008-10-13
    • Peter J. HopperPeter JohnsonPeter SmeysAndrei Papou
    • Peter J. HopperPeter JohnsonPeter SmeysAndrei Papou
    • H01F5/00H01F27/28H01F21/06H01F27/30H01F27/24H02M1/00G05F1/00
    • H01L23/5227H01F17/0006H01F41/046H01L2924/0002Y10T29/4902Y10T29/49071Y10T29/49073Y10T29/49075Y10T29/49124Y10T29/4913H01L2924/00
    • The claimed invention relates to arrangements of inductors and integrated circuit dice. One embodiment pertains to an integrated circuit die that has an inductor formed thereon. The inductor includes an inductor winding having a winding input and a winding output. The inductor also comprises an inductor core array having at least first and second sets of inductor core elements that are magnetically coupled with the inductor winding. Each inductor core element in the first set of inductor core elements is formed from a first metallic material. Each inductor core element in the second set of inductor core elements is formed from a second metallic material that has a different magnetic coercivity than the first magnetic material. The inductor further comprises a set of spacers that electrically isolate the inductor core elements. Some embodiments involve multiple inductor windings and/or multiple inductor core elements that magnetically interact in various ways. Particular embodiments involve core elements having different compositions and/or sizes.
    • 所要求保护的发明涉及电感器和集成电路芯片的布置。 一个实施例涉及其上形成有电感器的集成电路管芯。 电感器包括具有绕组输入和绕组输出的电感器绕组。 电感器还包括电感器芯阵列,其具有与电感器绕组磁耦合的至少第一组和第二组电感器芯体元件。 第一组电感器芯元件中的每个电感器芯体元件由第一金属材料形成。 第二组电感器芯元件中的每个电感器芯体元件由具有与第一磁性材料不同的磁矫顽力的第二金属材料形成。 电感器还包括一组将电感器芯元件电隔离的间隔件。 一些实施例涉及以各种方式磁性相互作用的多个电感器绕组和/或多个电感器核心元件。 具体实施方案涉及具有不同组成和/或尺寸的核心元件。