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    • 3. 发明申请
    • SEMICONDUCTOR DEVICE FOR TESTING SEMICONDUCTOR PROCESS AND METHOD THEREOF
    • 用于测试半导体工艺的半导体器件及其方法
    • US20080246502A1
    • 2008-10-09
    • US11695610
    • 2007-04-03
    • Chia-Nan HongYi-Hua ChangChin-Yi Chang
    • Chia-Nan HongYi-Hua ChangChin-Yi Chang
    • G01R31/02
    • G01R31/2884G01R31/2831
    • A semiconductor device for testing a semiconductor process applied to manufacturing the semiconductor device is disclosed. The semiconductor device includes at least a testing group. The testing group includes a first testing block and a second testing. The first testing block includes: a first input node; a first output node; a plurality of first selecting nodes; a first reference device, coupled to the first input node and the first output node; and a first target device, coupled to the first selecting nodes and the first output node. The second testing block includes: a second input node; a second output node; a plurality of second selecting nodes; a second reference device, coupled to the second input node and the second output node; and a second target device, coupled to the second selecting nodes and the second output node.
    • 公开了一种用于测试半导体器件的半导体器件,该半导体器件用于制造半导体器件。 半导体器件至少包括测试组。 测试组包括第一个测试块和第二个测试。 第一测试块包括:第一输入节点; 第一输出节点; 多个第一选择节点; 耦合到第一输入节点和第一输出节点的第一参考装置; 以及耦合到所述第一选择节点和所述第一输出节点的第一目标设备。 第二测试块包括:第二输入节点; 第二输出节点; 多个第二选择节点; 耦合到所述第二输入节点和所述第二输出节点的第二参考装置; 以及耦合到所述第二选择节点和所述第二输出节点的第二目标设备。
    • 4. 发明授权
    • Semiconductor device for testing semiconductor process and method thereof
    • 用于半导体工艺测试的半导体器件及其方法
    • US07603598B2
    • 2009-10-13
    • US11695610
    • 2007-04-03
    • Chia-Nan HongYi-Hua ChangChin-Yi Chang
    • Chia-Nan HongYi-Hua ChangChin-Yi Chang
    • G01R31/28
    • G01R31/2884G01R31/2831
    • A semiconductor device for testing a semiconductor process applied to manufacturing the semiconductor device is disclosed. The semiconductor device includes at least a testing group. The testing group includes a first testing block and a second testing block. The first testing block includes: a first input node; a first output node; a plurality of first selecting nodes; a first reference device, coupled to the first input node and the first output node; and a first target device, coupled to the first selecting nodes and the first output node. The second testing block includes: a second input node; a second output node; a plurality of second selecting nodes; a second reference device, coupled to the second input node and the second output node; and a second target device, coupled to the second selecting nodes and the second output node.
    • 公开了一种用于测试半导体器件的半导体器件,该半导体器件用于制造半导体器件 半导体器件至少包括测试组。 测试组包括第一测试块和第二测试块。 第一测试块包括:第一输入节点; 第一输出节点; 多个第一选择节点; 耦合到第一输入节点和第一输出节点的第一参考装置; 以及耦合到所述第一选择节点和所述第一输出节点的第一目标设备。 第二测试块包括:第二输入节点; 第二输出节点; 多个第二选择节点; 耦合到所述第二输入节点和所述第二输出节点的第二参考装置; 以及耦合到所述第二选择节点和所述第二输出节点的第二目标设备。
    • 6. 发明授权
    • Integrated circuit chip with high area utilization rate
    • 集成电路芯片具有较高的面积利用率
    • US07078930B2
    • 2006-07-18
    • US10907608
    • 2005-04-07
    • Tin-Hao LinChia-Nan Hong
    • Tin-Hao LinChia-Nan Hong
    • H03K19/00
    • H01L22/34H01L2924/0002H01L2924/00
    • An integrated circuit chip with a high area utilization rate includes: a plurality of logic circuits in a logic area; a first input and output circuit near a first side of the logic area for exchanging signals with the logic circuit; a second input and output circuit near a second side of the logic area for exchanging signals with the logic circuit; a plurality of first probe pads coupled to the first and the second input and output circuits for inputting or outputting signals to the first and the second input and output circuits; a corner cell comprising a plurality of wires coupled to the first and the second input and output circuits for exchanging signals between the first and the second input and output circuits; and a first process monitor circuit formed in the corner cell for monitoring a semiconductor process of the integrated circuit chip.
    • 具有高面积利用率的集成电路芯片包括:逻辑区域中的多个逻辑电路; 靠近用于与逻辑电路交换信号的逻辑区域的第一侧的第一输入和输出电路; 靠近逻辑区域的第二侧的第二输入和输出电路,用于与逻辑电路交换信号; 耦合到第一和第二输入和输出电路的多个第一探针焊盘,用于向第一和第二输入和输出电路输入或输出信号; 角电池包括耦合到第一和第二输入和输出电路的多条导线,用于在第一和第二输入和输出电路之间交换信号; 以及形成在角电池中的用于监视集成电路芯片的半导体工艺的第一处理监视电路。
    • 8. 发明申请
    • Integrated Circuit Chip With High Area Utilization Rate
    • 高面积利用率的集成电路芯片
    • US20060071685A1
    • 2006-04-06
    • US10907608
    • 2005-04-07
    • Tin-Hao LinChia-Nan Hong
    • Tin-Hao LinChia-Nan Hong
    • H03K19/173
    • H01L22/34H01L2924/0002H01L2924/00
    • An integrated circuit chip with a high area utilization rate includes: a plurality of logic circuits in a logic area; a first input and output circuit near a first side of the logic area for exchanging signals with the logic circuit; a second input and output circuit near a second side of the logic area for exchanging signals with the logic circuit; a plurality of first probe pads coupled to the first and the second input and output circuits for inputting or outputting signals to the first and the second input and output circuits; a corner cell comprising a plurality of wires coupled to the first and the second input and output circuits for exchanging signals between the first and the second input and output circuits; and a first process monitor circuit formed in the corner cell for monitoring a semiconductor process of the integrated circuit chip.
    • 具有高面积利用率的集成电路芯片包括:逻辑区域中的多个逻辑电路; 靠近用于与逻辑电路交换信号的逻辑区域的第一侧的第一输入和输出电路; 靠近逻辑区域的第二侧的第二输入和输出电路,用于与逻辑电路交换信号; 耦合到第一和第二输入和输出电路的多个第一探针焊盘,用于向第一和第二输入和输出电路输入或输出信号; 角电池包括耦合到第一和第二输入和输出电路的多条导线,用于在第一和第二输入和输出电路之间交换信号; 以及形成在角电池中的用于监视集成电路芯片的半导体工艺的第一处理监视电路。