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    • 2. 发明申请
    • Actuator and latching systems and methods
    • 执行器和锁定系统和方法
    • US20060222287A1
    • 2006-10-05
    • US11094408
    • 2005-03-31
    • Peter GulvinYao WangJun MaKathleen FeinbergPinyen Lin
    • Peter GulvinYao WangJun MaKathleen FeinbergPinyen Lin
    • G02B6/35G02B6/28
    • G02B6/3508G02B6/357G02B6/358
    • An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.
    • 用于路由信号的光学开关包括连接到路由信号的波导的闩锁接收器和包括连接到下板的上板,下板和闩锁的致动器,致动器的下板在功率为 施加到下板,使得闩锁垂直移动并接合闩锁接收器。 闭锁系统包括开关,其包括形成为在闩锁的一端包括延伸部的闩锁,闩锁由电力驱动,形成为接收闩锁的闩锁接收器和控制闩锁延伸到 当电源被施加到闩锁时,将闩锁接收器接合,并且当电源从闩锁移除时,控制闩锁的延伸以锁定到锁定接收器上。
    • 3. 发明申请
    • Cantilever beam MEMS variable optical attenuator
    • 悬臂梁MEMS可变光衰减器
    • US20060127029A1
    • 2006-06-15
    • US11010769
    • 2004-12-13
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • G02B6/00
    • G02B6/3508G02B6/266G02B6/3566G02B6/357G02B6/358G02B6/3594G02B6/3596
    • An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
    • 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。
    • 4. 发明申请
    • Thermal actuator and an optical waveguide switch including the same
    • 热致动器和包括其的光波导开关
    • US20050031288A1
    • 2005-02-10
    • US10634941
    • 2003-08-05
    • Joel KubbyJun MaKristine GermanPeter GulvinPinyen Lin
    • Joel KubbyJun MaKristine GermanPeter GulvinPinyen Lin
    • B81B3/00G02B6/35G02B6/36
    • G02B6/3576B81B3/0018G02B6/3566G02B6/3584
    • A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
    • 热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。 每个光束的中点附加或耦合到正交耦合光束。 每个阵列光束具有具有对应的光束加热参数值的光束加热参数。 光束加热参数值基于预定图案在波束阵列上变化。 当束被加热装置加热时,光束阵列中光束温度的分布变得不对称,从而使光束阵列发生弯曲。 光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。 耦合光束运动反过来操作包括的光波导开关。 光束阵列中的光束通过焦耳加热,涡流加热,传导加热,对流加热和辐射加热中的任何一种加热。
    • 9. 发明申请
    • Actuator and systems and methods
    • 执行器及系统及方法
    • US20060228069A1
    • 2006-10-12
    • US11094411
    • 2005-03-31
    • Peter GulvinJun MaPinyen Lin
    • Peter GulvinJun MaPinyen Lin
    • G02B6/26
    • B81B3/0024B81B2201/045
    • An actuator system that includes two beams that are formed into a diamond pattern. A crossbar is positioned at a midsection to connect the two beams. When power is applied to the two beams, the diamond pattern is driven vertically. An actuator system may also include a substrate and a first layer above a second layer on the substrate. The first and second layers include upper and lower beams joined together at one end of the layers. A method of forming an actuator system includes forming a first layer above a second layer on a substrate, joining the first and second layers together at one end of the layers, and forming upper and lower beams. The upper and lower beams may be different in width, length and thickness to control a vertical movement of the actuator system.
    • 一种致动器系统,包括形成为菱形图案的两个梁。 横梁位于中部以连接两个梁。 当向两个光束施加电力时,垂直驱动金刚石图案。 致动器系统还可以包括衬底和衬底上的第二层上方的第一层。 第一层和第二层包括在层的一端处连接在一起的上梁和下梁。 形成致动器系统的方法包括在衬底上形成第二层以上的第一层,在层的一端将第一层和第二层结合在一起,并形成上梁和下梁。 上梁和下梁的宽度,长度和厚度可以不同,以控制致动器系统的垂直运动。