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1. 发明申请

US20050031288A1 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US20050031288A1
公开(公告)日：2005-02-10
申请号：US10634941
申请日：2003-08-05
申请人： Joel Kubby , Jun Ma , Kristine German , Peter Gulvin , Pinyen Lin
发明人： Joel Kubby , Jun Ma , Kristine German , Peter Gulvin , Pinyen Lin
IPC分类号： B81B3/00 , G02B6/35 , G02B6/36
CPC分类号： G02B6/3576 , B81B3/0018 , G02B6/3566 , G02B6/3584
摘要： A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。每个光束的中点附加或耦合到正交耦合光束。每个阵列光束具有具有对应的光束加热参数值的光束加热参数。光束加热参数值基于预定图案在波束阵列上变化。当束被加热装置加热时，光束阵列中光束温度的分布变得不对称，从而使光束阵列发生弯曲。光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。耦合光束运动反过来操作包括的光波导开关。光束阵列中的光束通过焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种加热。

2. 发明申请

US20060127029A1 Cantilever beam MEMS variable optical attenuator 失效
标题翻译：悬臂梁MEMS可变光衰减器
公开(公告)号：US20060127029A1
公开(公告)日：2006-06-15
申请号：US11010769
申请日：2004-12-13
申请人： Pinyen Lin , Yao Wang , Jun Ma , Xueyuan Liu , Peter Gulvin , Kristine German , Joel Kubby
发明人： Pinyen Lin , Yao Wang , Jun Ma , Xueyuan Liu , Peter Gulvin , Kristine German , Joel Kubby
IPC分类号： G02B6/00
CPC分类号： G02B6/3508 , G02B6/266 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3594 , G02B6/3596
摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

3. 发明申请

US20050031253A1 Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same 失效
标题翻译：具有偏转光束段中性轴的热致动器和包括该中间轴的光波导开关
公开(公告)号：US20050031253A1
公开(公告)日：2005-02-10
申请号：US10772693
申请日：2004-02-05
申请人： Jun Ma , Joel Kubby , Kristine German , Peter Gulvin , Pinyen Lin
发明人： Jun Ma , Joel Kubby , Kristine German , Peter Gulvin , Pinyen Lin
IPC分类号： B81B3/00 , G02B6/35 , G02B6/26
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments with beam segment lengths. Each beam segment has a beam segment neutral axis, thus forming a corresponding plurality of beam segment neutral axes. The beam segment neutral axes are offset along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in the predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括具有梁段长度的多个梁段。每个光束段具有光束段中性轴线，从而形成相应的多个光束段中性轴线。光束段中性轴基于预定图案沿光束长度偏移。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

4. 发明申请

US20050031252A1 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US20050031252A1
公开(公告)日：2005-02-10
申请号：US10772564
申请日：2004-02-05
申请人： Jun Ma , Joel Kubby , Kristine German , Peter Gulvin , Pinyen Lin
发明人： Jun Ma , Joel Kubby , Kristine German , Peter Gulvin , Pinyen Lin
IPC分类号： G02B26/02 , B81B3/00 , G02B6/35
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括多个梁段。每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。光束段宽度基于预定图案沿着光束长度变化。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

5. 发明申请

US20060291794A1 Waveguide shuttle MEMS variable optical attenuator 失效
标题翻译：波导梭MEMS可变光衰减器
公开(公告)号：US20060291794A1
公开(公告)日：2006-12-28
申请号：US11154019
申请日：2005-06-16
申请人： Xueyuan Liu , Peter Gulvin , Kristine German , Yao Wang , Jun Ma , Pinyen Lin , Joel Kubby , Kathleen Feinberg
发明人： Xueyuan Liu , Peter Gulvin , Kristine German , Yao Wang , Jun Ma , Pinyen Lin , Joel Kubby , Kathleen Feinberg
IPC分类号： G02B6/00
CPC分类号： G02B6/358 , G02B6/266 , G02B6/3508 , G02B6/3544 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

6. 发明申请

US20050286850A1 WAVEGUIDE STRUCTURES AND METHODS 失效
标题翻译：波形结构和方法
公开(公告)号：US20050286850A1
公开(公告)日：2005-12-29
申请号：US10878834
申请日：2004-06-28
申请人： Kristine German , Peter Gulvin , Joel Kubby , Pinyen Lin , Xueyuan Liu , Yao Wang
发明人： Kristine German , Peter Gulvin , Joel Kubby , Pinyen Lin , Xueyuan Liu , Yao Wang
IPC分类号： G02B6/10 , G02B6/122
CPC分类号： G02B6/122 , G02B6/105
摘要： A waveguide structure has a base having a base height (h) above a substrate and a rectangular waveguide having a waveguide height (H) above the substrate and a waveguide width (W) between opposing sides of the waveguide.
摘要翻译：波导结构具有在基板上方具有基底高度（h）的基部和在基板上方具有波导高度（H）的矩形波导和波导的相对侧之间的波导宽度（W）。

7. 发明申请

US20060228069A1 Actuator and systems and methods 失效
标题翻译：执行器及系统及方法
公开(公告)号：US20060228069A1
公开(公告)日：2006-10-12
申请号：US11094411
申请日：2005-03-31
申请人： Peter Gulvin , Jun Ma , Pinyen Lin
发明人： Peter Gulvin , Jun Ma , Pinyen Lin
IPC分类号： G02B6/26
CPC分类号： B81B3/0024 , B81B2201/045
摘要： An actuator system that includes two beams that are formed into a diamond pattern. A crossbar is positioned at a midsection to connect the two beams. When power is applied to the two beams, the diamond pattern is driven vertically. An actuator system may also include a substrate and a first layer above a second layer on the substrate. The first and second layers include upper and lower beams joined together at one end of the layers. A method of forming an actuator system includes forming a first layer above a second layer on a substrate, joining the first and second layers together at one end of the layers, and forming upper and lower beams. The upper and lower beams may be different in width, length and thickness to control a vertical movement of the actuator system.
摘要翻译：一种致动器系统，包括形成为菱形图案的两个梁。横梁位于中部以连接两个梁。当向两个光束施加电力时，垂直驱动金刚石图案。致动器系统还可以包括衬底和衬底上的第二层上方的第一层。第一层和第二层包括在层的一端处连接在一起的上梁和下梁。形成致动器系统的方法包括在衬底上形成第二层以上的第一层，在层的一端将第一层和第二层结合在一起，并形成上梁和下梁。上梁和下梁的宽度，长度和厚度可以不同，以控制致动器系统的垂直运动。

8. 发明申请

US20060222287A1 Actuator and latching systems and methods 失效
标题翻译：执行器和锁定系统和方法
公开(公告)号：US20060222287A1
公开(公告)日：2006-10-05
申请号：US11094408
申请日：2005-03-31
申请人： Peter Gulvin , Yao Wang , Jun Ma , Kathleen Feinberg , Pinyen Lin
发明人： Peter Gulvin , Yao Wang , Jun Ma , Kathleen Feinberg , Pinyen Lin
IPC分类号： G02B6/35 , G02B6/28
CPC分类号： G02B6/3508 , G02B6/357 , G02B6/358
摘要： An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.
摘要翻译：用于路由信号的光学开关包括连接到路由信号的波导的闩锁接收器和包括连接到下板的上板，下板和闩锁的致动器，致动器的下板在功率为施加到下板，使得闩锁垂直移动并接合闩锁接收器。闭锁系统包括开关，其包括形成为在闩锁的一端包括延伸部的闩锁，闩锁由电力驱动，形成为接收闩锁的闩锁接收器和控制闩锁延伸到当电源被施加到闩锁时，将闩锁接收器接合，并且当电源从闩锁移除时，控制闩锁的延伸以锁定到锁定接收器上。

9. 发明申请

US20060110101A1 Microfabrication process for control of waveguide gap size 失效
标题翻译：用于控制波导间隙尺寸的微加工工艺
公开(公告)号：US20060110101A1
公开(公告)日：2006-05-25
申请号：US10995965
申请日：2004-11-23
申请人： Pinyen Lin , Joel Kubby , Yao Wang
发明人： Pinyen Lin , Joel Kubby , Yao Wang
IPC分类号： G02B6/26 , C03B37/022 , C03B37/16 , G02B6/42
CPC分类号： G02B6/3508 , G02B6/136 , G02B6/3544 , G02B6/356 , G02B6/3576 , G02B6/358 , G02B6/3584 , G02B6/3596 , G02B2006/12097
摘要： A method for forming a gap (16) of a width (d) which meets selected tolerance limits includes forming sidewalls (80, 82) in a microstructure, the sidewalls defining a gap (16) therebetween. The gap has a width defined between the sidewalls. The width of the gap between the sidewalls is determined. Where the determined width of the gap is below the selected tolerance limits for the width of the gap, the sidewalls are consumed to form a gap which meets the selected tolerance limits. The gap may be incorporated in a waveguide device (10) of a microswitch (100) and selectively connect input and output waveguides (130, 132).
摘要翻译：用于形成宽度（d）的满足所选公差极限的间隙（16）的方法包括在微观结构中形成侧壁（80,82），所述侧壁在它们之间限定间隙（16）。该间隙具有限定在侧壁之间的宽度。确定侧壁之间的间隙的宽度。在确定的间隙的宽度低于间隙宽度的所选公差极限的情况下，侧壁被消耗以形成满足所选公差极限的间隙。该间隙可以结合在微动开关（100）的波导装置（10）中并选择性地连接输入和输出波导（130,132）。

10. 发明申请

US20070242920A1 Fabry-Perot tunable filter using a bonded pair of transparent substrates 失效
标题翻译：法布里 - 珀罗可调滤波器，使用一对粘合的透明基板
公开(公告)号：US20070242920A1
公开(公告)日：2007-10-18
申请号：US11405774
申请日：2006-04-18
申请人： Pinyen Lin , Peter Gulvin , Yao Wang , Lalit Mestha
发明人： Pinyen Lin , Peter Gulvin , Yao Wang , Lalit Mestha
IPC分类号： G02B6/26
CPC分类号： G01J3/26 , G02B6/29358 , G02B6/29395 , G02B26/001
摘要： A tunable Fabry-Perot filter (8, 118, 218, 318, 418) includes substrates (10, 12) with parallel generally planar facing principal surfaces (14, 16) including spaced apart facing reflective surface regions (20, 22) that are at least partially reflective over a wavelength range and define an optical gap (Gopt) therebetween. At least one substrate of the pair of substrates is light transmissive over the selected wavelength range to enable optical coupling with the optical gap. Electrodes (24, 26) are disposed on the facing principal surfaces of the substrates. The electrodes on the facing principal surfaces of the substrates are define an electrode gap therebetween such that electrical biasing of the electrodes simultaneously modifies the optical and electrode gaps.
摘要翻译：可调谐的法布里 - 珀罗滤光器（8,118,218,318,418）包括具有平行大致平面的主要表面（14,16）的衬底（10,12），该主表面包括间隔开的面对的反射表面区域（20,22）在波长范围内至少部分地反射并在其间限定光学间隙（G opt）。一对基板中的至少一个基板在所选择的波长范围内是透光的，以使得能够与光学间隙进行光耦合。电极（24,26）设置在基板的相对的主表面上。衬底的相对主表面上的电极在其间限定电极间隙，使得电极的电偏置同时改变光学和电极间隙。

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