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1. 发明授权

US08818265B2 Interface for communication between voltage domains 有权
标题翻译：电压域之间的通信接口
公开(公告)号：US08818265B2
公开(公告)日：2014-08-26
申请号：US13454815
申请日：2012-04-24
申请人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
发明人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
IPC分类号： H04B5/00 , H01L21/70 , H01L29/00 , H01L21/02 , H03K17/00 , H04B1/44
CPC分类号： H04B1/44 , H03K17/00
摘要： One or more embodiments provide circuitry for isolation and communication of signals between circuits operating in different voltage domains using capacitive coupling. The embodiments utilize capacitive structures having increased breakdown voltage in comparison to previous parallel plate implementations. The capacitive isolation is provided by parallel plate capacitive structures, each implemented to have parallel plates of different horizontal sizes. Due to the difference in horizontal size, edges of the parallel plates, where electric fields are the strongest, are laterally offset from the region where the parallel plates overlap. As a result, breakdown voltage between the parallel plates is increased.
摘要翻译：一个或多个实施例提供用于使用电容耦合在不同电压域中工作的电路之间的信号的隔离和通信的电路。与先前的平行板实现相比，这些实施例利用具有增加的击穿电压的电容结构。电容隔离由平行板电容结构提供，每个电容结构被实现为具有不同水平尺寸的平行板。由于水平尺寸的差异，电场最强的平行板的边缘与平行板重叠的区域横向偏移。结果，平行板之间的击穿电压增加。

2. 发明申请

US20130281033A1 INTERFACE FOR COMMUNICATION BETWEEN VOLTAGE DOMAINS 有权
标题翻译：电压域之间的通信接口
公开(公告)号：US20130281033A1
公开(公告)日：2013-10-24
申请号：US13454815
申请日：2012-04-24
申请人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
发明人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
IPC分类号： H04B1/44
CPC分类号： H04B1/44 , H03K17/00
摘要： One or more embodiments provide circuitry for isolation and communication of signals between circuits operating in different voltage domains using capacitive coupling. The embodiments utilize capacitive structures having increased breakdown voltage in comparison to previous parallel plate implementations. The capacitive isolation is provided by parallel plate capacitive structures, each implemented to have parallel plates of different horizontal sizes. Due to the difference in horizontal size, edges of the parallel plates, where electric fields are the strongest, are laterally offset from the region where the parallel plates overlap. As a result, breakdown voltage between the parallel plates is increased.
摘要翻译：一个或多个实施例提供用于使用电容耦合在不同电压域中工作的电路之间的信号的隔离和通信的电路。与先前的平行板实现相比，这些实施例利用具有增加的击穿电压的电容结构。电容隔离由平行板电容结构提供，每个电容结构被实现为具有不同水平尺寸的平行板。由于水平尺寸的差异，电场最强的平行板的边缘与平行板重叠的区域横向偏移。结果，平行板之间的击穿电压增加。

3. 发明授权

US08833171B2 Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：US08833171B2
公开(公告)日：2014-09-16
申请号：US13592570
申请日：2012-08-23
申请人： Willem Frederik Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
发明人： Willem Frederik Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
IPC分类号： G01L11/00 , G01L9/12 , G01L9/00
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译：可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。膜在其中具有多个开口，其将气体进入和离开室。当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。

4. 发明授权

US08716619B2 MEMS switch 有权
标题翻译： MEMS开关
公开(公告)号：US08716619B2
公开(公告)日：2014-05-06
申请号：US13306675
申请日：2011-11-29
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
IPC分类号： H01H13/62
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.
摘要翻译：一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。下部致动电极布置在衬底上方。可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。使用三条更多的信号线使得能够实现对称的致动力，或者使单个可移动电极或两者都能实现多个开关功能。

5. 发明申请

US20120091546A1 Microphone 审中-公开
标题翻译：麦克风
公开(公告)号：US20120091546A1
公开(公告)日：2012-04-19
申请号：US13265535
申请日：2010-04-20
申请人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
发明人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译：麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。

6. 发明授权

US08027143B2 MEMS tunable device 有权
标题翻译： MEMS可调谐器件
公开(公告)号：US08027143B2
公开(公告)日：2011-09-27
申请号：US12090004
申请日：2006-10-10
申请人： Theodoor Gertrudis Silvester Maria Rijks , Peter Gerard Steeneken
发明人： Theodoor Gertrudis Silvester Maria Rijks , Peter Gerard Steeneken
IPC分类号： H01G7/00 , H01G7/06 , H01G5/16 , H01G5/019
CPC分类号： H01G5/16
摘要： A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.
摘要翻译：微机电装置具有基板（60），可移动元件（15），布置在基板上的一对电极（40）和用于移动可移动元件的可移动元件，以及控制器（50）电极。为了将可移动元件移动到中间位置，在运动期间施加一个或多个脉冲，定时以补偿运动的低于或超过阻尼。这可以减少稳定延迟。它可以应用于可调谐RF电容。为了控制间隙的减小，最大电源电平的单个脉冲补偿器件的固有慢度和过阻尼。为了补偿在阻尼下，脉冲具有对应于谐振频率的周期，并且包括高于和低于最终供应水平的峰谷，使得连续的峰和谷更靠近给定的供给水平。

7. 发明授权

US08018307B2 Micro-electromechanical device and module and method of manufacturing same 有权
标题翻译：微机电装置及其制造方法
公开(公告)号：US08018307B2
公开(公告)日：2011-09-13
申请号：US10561854
申请日：2004-06-23
申请人： Jozef Thomas Martinus Van Beek , Peter Gerard Steeneken
发明人： Jozef Thomas Martinus Van Beek , Peter Gerard Steeneken
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2059/0027 , H01H2059/0045
摘要： The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
摘要翻译：本发明的MEMS元件具有第一，第二和第三中间第三电极。给予增加的动态范围，其中由第二和第三电极构成的可切换电容器设置在输入和输出之间的信号路径中，并且由第一和第三电极构成的可切换电容器设置在信号路径和地面。本发明的MEMS元件非常适合于集成在无源元件网络中。

8. 发明申请

US20090201623A1 CAPACITIVE RF-MEMS DEVICE WITH INTEGRATED DECOUPLING CAPACITOR 有权
标题翻译：具有集成解耦电容器的电容式RF-MEMS器件
公开(公告)号：US20090201623A1
公开(公告)日：2009-08-13
申请号：US11913285
申请日：2006-04-21
申请人： Peter Gerard Steeneken
发明人： Peter Gerard Steeneken
IPC分类号： H01G5/16 , H01G7/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0072 , Y10T29/435
摘要： The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
摘要翻译：本发明提供一种包括垂直集成去耦电容器（14）的电容式RF-MEMS器件。因此，去耦电容器（14）不占用额外的面积。此外，根据本发明的RF-MEMS需要更少的互连，这也节省了空间，并且降低了RF路径中的串联电感/电阻。

9. 发明授权

US08803623B2 MEMS resonator and method of controlling the same 有权
标题翻译： MEMS谐振器及其控制方法
公开(公告)号：US08803623B2
公开(公告)日：2014-08-12
申请号：US13446398
申请日：2012-04-13
申请人： Kim Phan Le , Peter Gerard Steeneken , Jozef Thomas Martinus Van Beek
发明人： Kim Phan Le , Peter Gerard Steeneken , Jozef Thomas Martinus Van Beek
IPC分类号： H03B5/32 , H01L41/047 , H03H9/13 , H03H9/52
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2426 , H03H2009/02496
摘要： A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要翻译： MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化，温度。这意味着谐振频率较少依赖于温度。

10. 发明授权

US08513745B2 MEMS switch and fabrication method 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US08513745B2
公开(公告)日：2013-08-20
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/84
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

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