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    • 10. 发明授权
    • Fluid distribution unit for dividing a stream of fluid into a plurality of partial streams
    • 流体分配单元,用于将流体流分成多个部分流
    • US07168447B2
    • 2007-01-30
    • US10433039
    • 2002-01-08
    • Oliver StadelJürgen SchmidtUlrich Krause
    • Oliver StadelJürgen SchmidtUlrich Krause
    • F16L41/00C23C16/00
    • C23C16/45574C23C16/45563C23C16/45572Y10T137/2196Y10T137/2224Y10T137/6579Y10T137/85938
    • The invention relates to a liquid distribution unit (10, 20) for dividing a liquid current into a plurality of partial currents. Said unit comprises at least one liquid inlet (13, 23) for the supplied liquid current, a plurality of liquid outlets (14; 24) for the partial currents, and a plurality of channels (15, 25) connecting the liquid inlets (13, 23) to the liquid outlets (14, 24). Said unit is characterised in that the channels (15, 25) symmetrically and respectively branch off (16, 26) into upstream channels (15a, 15b, 15c, 15d, 15c; 25a, 25b, 25c, 25d, 25c) and each connection leading from the liquid inlet (13; 23 ) to one of the liquid outlets (14; 24) comprises the same channels (15, 25) and the same branches (16, 26). A liquid distribution device for the divided distributiion of at least two different liquids; comprises a plurality of such liquid distribution units (10, 20) placed flatly on top of each other. One of the liquids is distributed in each liquid distribution unit (10, 20) and the other(s) is/are guided through separate passages (17, 27) in an undistributed manner. One such liquid distribution device can especially be embodied as a device for supplying gases for a CVD coating installation. In this case, at least one liquid distribution unit (10) is provided for a precursor gas optionally having a carrier gas, and at least one other liquid distribution unit (20) is provided for a reactive gas.
    • 本发明涉及一种用于将液体电流分成多个部分电流的液体分配单元(10,20)。 所述单元包括用于供应的液流的至少一个液体入口(13,23),用于部分电流的多个液体出口(14; 24)和连接液体入口(13)的多个通道(15,25) ,23)连接到液体出口(14,24)。 所述单元的特征在于通道(15,25)对称并分别分支(16,26)进入上游通道(15a,15b,15c,15d,15c; 25a,25b,25c ,25d,25c),并且从所述液体入口(13; 23)引导到所述液体出口(14; 24)中的一个的每个连接包括相同的通道(15,25)和相同的分支(16,26)。 一种用于分配至少两种不同液体的液体分配装置; 包括彼此平坦地放置的多个这样的液体分配单元(10,20)。 其中一个液体分布在每个液体分配单元(10,20)中,另一个液体以未分配的方式被引导通过单独的通道(17,27)。 一种这样的液体分配装置可以特别地被实施为用于为CVD涂层设备供应气体的装置。 在这种情况下,为任选地具有载气的前体气体提供至少一个液体分配单元(10),并且为反应气体提供至少一个其它液体分配单元(20)。