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    • 3. 发明授权
    • Thermal management substrate
    • 热管理基板
    • US07695564B1
    • 2010-04-13
    • US11051749
    • 2005-02-03
    • Miroslav MicovicPeter DeelmanYakov Royter
    • Miroslav MicovicPeter DeelmanYakov Royter
    • C30B25/02
    • H01L21/76254
    • The present invention is directed to a method for fabricating a thermal management substrate having a Silicon (Si) layer on a polycrystalline diamond film, or on a diamond-like-carbon (DLC) film. The method comprises acts of fabricating a separation by implantation of oxygen (SIMOX) wafer; depositing a polycrystalline diamond film onto the SIMOX wafer; and removing various layers of the SIMOX wafer to leave a Si overlay layer that is epitaxially fused with the polycrystalline diamond film. In the case of the DLC film, the method comprises acts of ion-implanting a Si wafer; depositing an amorphous DLC film onto the Si wafer; and removing various layers of the Si wafer to leave a Si overlay structure epitaxially fused with the DLC film.
    • 本发明涉及一种用于制造在多晶金刚石膜上或在金刚石碳(DLC)膜上具有硅(Si)层的热管理基板的方法。 该方法包括通过注入氧(SIMOX)晶片制造分离的作用; 将多晶金刚石膜沉积到SIMOX晶片上; 并移除SIMOX晶片的各层以留下与多晶金刚石膜外延熔合的Si覆盖层。 在DLC膜的情况下,该方法包括离子注入Si晶片的动作; 在Si晶片上沉积非晶态DLC膜; 并去除Si晶片的各个层以留下与DLC膜外延融合的Si覆盖结构。