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1. 发明授权

US07088559B2 Integrated interconnect and method of manufacture therefor 有权
公开(公告)号：US07088559B2
公开(公告)日：2006-08-08
申请号：US10059892
申请日：2002-01-29
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou
IPC分类号： G11B5/56
CPC分类号： G11B5/5552
摘要： An integrated interface structure for a nested body to provide an electrical connection. The interface structure includes nested bond pads which electrically interface with leads. The nested bond pads are fabricated on a microstructure to provide an interface to drive circuitry for transducer elements of a slider or head supported by the microstructure.

2. 发明授权

US06829119B2 Disc drive microactuator with lateral position sensor 失效
公开(公告)号：US06829119B2
公开(公告)日：2004-12-07
申请号：US10279404
申请日：2002-10-24
申请人： Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
发明人： Wayne A. Bonin , Peter Crane , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A read/write head microactuator includes first and second insulating deposits that are flat, spaced apart by an air gap, and laterally movable responsive to a microactuator electrical drive current. First and second flat, interdigitated drive electrode deposits are deposited on the first insulating deposit. A flat, digitated sense electrode deposit is deposited on the second insulating deposit. The sense electrode deposit provides a relative position output. The sense electrode deposit faces both the drive electrode deposits across the air gap.

3. 发明授权

US06683758B2 Fabrication method for integrated microactuator coils 有权
标题翻译：集成微致动器线圈的制造方法
公开(公告)号：US06683758B2
公开(公告)日：2004-01-27
申请号：US09866942
申请日：2001-05-29
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Lee Walter , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer , Peter Crane , Brian Dufrene
IPC分类号： G11B556
CPC分类号： G11B5/5552
摘要： A method for fabricating an integrated coil-on-keeper assembly for use in a magnetic circuit to actuate a microactuator. The assembly is formed on a keeper substrate by patterning an insulator layer, plating at least one coil layer and patterning another insulator layer on top of each coil layer. The keeper substrate is etched to form the top keeper of the coil-on-keeper assembly.
摘要翻译：一种用于制造集成的线圈保持器组件的方法，用于在磁路中使用以致动微型致动器。通过图案化绝缘体层，镀覆至少一个线圈层并且在每个线圈层的顶部上构图另一个绝缘体层，从而在保持器基板上形成组件。保持器衬底被蚀刻以形成线圈保持器组件的顶部保持器。

4. 发明授权

US06614628B2 Moving coil micro actuator with reduced rotor mass 失效
公开(公告)号：US06614628B2
公开(公告)日：2003-09-02
申请号：US10051366
申请日：2002-01-18
申请人： Peter Crane , Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou
发明人： Peter Crane , Wayne A. Bonin , Roger L. Hipwell, Jr. , Zine-Eddine Boutaghou
IPC分类号： G11B556
CPC分类号： G11B5/596 , G11B5/5552 , H02K3/26 , H02K41/03
摘要： A disc drive has a disc rotatable about an axis, a slider carrying a transducing head for transducing data with a disc, and a dual stage actuation assembly supporting the slider to position the transducing head adjacent a selected radial track of the disc. The dual stage actuation assembly includes a movable actuator arm and a suspension assembly supported by the actuator arm. The suspension assembly includes a gimbal. The dual stage actuation assembly further includes a microactuator. The microactuator includes a stator having a top surface and a bottom surface wherein the gimbal is connected to the top surface of the stator. A rotor is operatively connected to the stator and the rotor supports the slider. A magnetic keeper structure is supported by the stator such that the rotor moves with respect to the magnetic keeper structure.

5. 发明授权

US06733681B1 Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
标题翻译：用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片
公开(公告)号：US06733681B1
公开(公告)日：2004-05-11
申请号：US09707698
申请日：2000-11-07
申请人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
发明人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
IPC分类号： B81C100
CPC分类号： B81C1/00357 , B81C2201/019 , Y10T29/49025
摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.
摘要翻译：用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

6. 发明授权

US07126792B2 Slider for a data storage device including transducer level micro-positioning and method of fabrication therefor 有权
公开(公告)号：US07126792B2
公开(公告)日：2006-10-24
申请号：US10286652
申请日：2002-11-01
申请人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
发明人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
IPC分类号： G11B21/20 , G11B5/54 , G11B7/09
CPC分类号： G11B5/6005 , G11B5/5552
摘要： A head having micro-positioning control. The head includes a slider body and a transducer body coupled to the slider body through a flexible interface. The transducer body is spaced from the slider body to form a gap therebetween. Micro-positioning actuators are coupled to the transducer body in the gap to provide micro-positioning control. In an embodiment for an air bearing slider, the gap includes off-track and fly height positioning control.

7. 发明授权

US07000459B2 Strain sensor patterned on MEMS flex arms 失效
标题翻译：应变传感器图案化在MEMS柔性臂上
公开(公告)号：US07000459B2
公开(公告)日：2006-02-21
申请号：US10463775
申请日：2003-06-17
申请人： Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
发明人： Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
IPC分类号： G01B5/28
CPC分类号： G11B5/5552 , G01L1/2206
摘要： A micromechanical assembly couples to a positioning member and to a body having an aerodynamic surface subject to aerodynamic forces. The micromechanical assembly comprises a substrate including a flexible beam joining a first substrate portion that is attachable to the positioning member to a second substrate portion that is attachable to the body. The substrate includes a substrate surface extending at least over the flexible beam. A lithographic pattern is formed on the substrate surface. The lithographic pattern includes at least a first impedance element that senses flexing of the flexible beam. Contact pads are coupled to the lithographic pattern for coupling to a flex measurement circuit.
摘要翻译：微机械组件连接到定位构件和耦合到具有经受空气动力的空气动力学表面的主体。微机械组件包括基板，该基板包括将可附接到定位构件的第一基板部分连接到可附接到主体的第二基板部分的柔性梁。衬底包括至少在柔性梁上延伸的衬底表面。在基板表面上形成平版印刷图案。光刻图案至少包括感应柔性光束弯曲的第一阻抗元件。接触焊盘耦合到光刻图案以耦合到柔性测量电路。

8. 发明授权

US06643099B1 Transducer formed on a sacrificial metal substrate 失效
标题翻译：传感器形成在牺牲金属基板上
公开(公告)号：US06643099B1
公开(公告)日：2003-11-04
申请号：US09728778
申请日：2000-12-01
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter
IPC分类号： G11B560
CPC分类号： G11B5/6005 , G11B5/102 , G11B5/105 , G11B5/11 , G11B5/3103 , G11B5/3146 , G11B5/48 , H05K3/205 , H05K3/4007 , H05K2201/0367
摘要： A transducer assembly in which an electric current is passed through plating solution in recesses of a metal substrate to plate electrical contact bumps having bump fronts in the recesses and exposed bump backs. The transducer is partially formed on the substrate, sealing the exposed bump backs. One or more vacuum processes are performed to complete formation of the transducer. At least a portion of the metal substrate is etched away to expose the bump fronts of the electrical contact bumps.
摘要翻译：一种换能器组件，其中电流通过电镀溶液在金属基底的凹槽中，以在具有凸起前部的凹部和暴露的凸起背面中电镀接触凸块。传感器部分地形成在基板上，密封暴露的凸起背。执行一个或多个真空处理以完成换能器的形成。金属基板的至少一部分被蚀刻掉以露出电接触凸块的凸块前端。

9. 发明授权

US06387778B1 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag 有权
标题翻译：用于使用反应离子蚀刻滞后的微机电系统装置的可破坏的系绳
公开(公告)号：US06387778B1
公开(公告)日：2002-05-14
申请号：US09649536
申请日：2000-08-28
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： H01L21301
CPC分类号： B81C1/00873 , B81C2201/0132
摘要： Utilizing reactive ion etching (RIE) lag, tethers are fabricated that reliably hold devices in place during processing and storage, yet are easily broken to remove the parts from the wafer as desired, without requiring excessive force that could damage the devices. The tethers are fabricated by slightly narrowing the periphery etch feature at several places. By adjusting the ratio of the main periphery width to the necked width at the tethers, the final thickness of the tether can be controlled to a small fraction of the wafer thickness, so that tethers defined by readily achievable feature sizes will reliably hold the parts in place until removal is desired. Since the tethers are now only a fraction of the wafer thickness, they will reliably break to release the part at a force level that will not damage the part.
摘要翻译：利用反应离子蚀刻（RIE）滞后，制造了在加工和存储期间可靠地将装置保持在适当位置的系链，但是容易断裂以根据需要从晶片中除去部件，而不需要可能损坏装置的过大的力。系绳是通过在几个地方略微缩小周边蚀刻特征来制造的。通过调节主臂周边宽度与系绳颈缩宽度的比例，可以将系绳的最终厚度控制在晶片厚度的一小部分，从而可以容易地达到的特征尺寸所限定的系绳将可靠地保持在地方，直到需要去除。由于系绳现在只是晶片厚度的一部分，它们将可靠地断裂，以不会损坏零件的力水平释放零件。

10. 发明授权

US06785086B1 Transducer-level microactuator with dual-axis control 失效
标题翻译：带双轴控制的传感器级微型致动器
公开(公告)号：US06785086B1
公开(公告)日：2004-08-31
申请号：US09815679
申请日：2001-03-23
申请人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
发明人： Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr. , Barry D. Wissman , Lee Walter , Barbara J. Ihlow-Mahrer
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.
摘要翻译：用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。转子部分通过多个弹簧连接到定子部分。转子部分承载换能头。定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

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