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    • 5. 发明授权
    • Method and apparatus relating to specimen cells for scanning electron
microscopes
    • 与扫描电子显微镜的样品池相关的方法和装置
    • US4705949A
    • 1987-11-10
    • US802091
    • 1985-11-25
    • John W. Grimes, IIHamlin JenningsPaul W. Brown
    • John W. Grimes, IIHamlin JenningsPaul W. Brown
    • H01J37/20G21K5/08
    • H01J37/20
    • Disclosed is an improved specimen cell for maintaining a scanning electron microscope specimen under nearly physiological conditions during observation when said specimen includes liquids having a relatively high vapor pressure. A cavity in the specimen cell mounts an open or closed specimen module which is scanned by the electron beam through a small aperture. During preparation of the electron microscope for observation, the aperture is closed by a door so as to prevent evaporation of liquids from the specimen. The door is mechanically or electronically opened to facilitate observation thus minimizing the exposure of the specimen to the desiccation and/or destructive vacuum effects. Furthermore, the aperture is sized so as to provide a resistance to vapor flow through the aperture while permitting bidirectional electron flow facilitating the electron microscopic observation of the specimen. In a further embodiment, an open specimen module is provided which can be replenished with liquid or fluid, which can be vibrated, raised and/or lowered and which can be heated or cooled as desired during observation of the specimen.
    • 公开了一种用于在观察期间在几乎生理条件下维持扫描电子显微镜样品的改进的样品池,当所述样品包括具有较高蒸气压的液体时。 样品池中的空腔安装了一个开放或封闭的样品模块,该样品模块被电子束通过一个小孔径扫描。 在用于观察的电子显微镜的制备期间,孔被门关闭,以防止液体从样品中蒸发。 门机械地或电子地打开以便于观察,从而最小化样品暴露于干燥和/或破坏性真空效应。 此外,孔的尺寸被设计成提供对通过孔的蒸汽流的阻力,同时允许双向电子流促进样品的电子显微观察。 在另一个实施例中,提供一个开放的样品模块,其可以被补充液体或流体,其可以被振动,升高和/或降低,并且可以在观察样品期间根据需要被加热或冷却。