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1. 发明授权

US07393439B2 Integrated microfeature workpiece processing tools with registration systems for paddle reactors 有权
标题翻译：集成的微型工件加工工具，具有桨式反应堆的配准系统
公开(公告)号：US07393439B2
公开(公告)日：2008-07-01
申请号：US10733807
申请日：2003-12-11
申请人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
发明人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
IPC分类号： C25D17/16 , C25B9/18 , C25C7/00
CPC分类号： C25D17/001 , C25D17/02 , C25D21/10
摘要： Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.
摘要翻译：公开了具有配准系统的安装模块的工具。安装模块包括用于精确定位处理室的定位元件和将工件移至和离开处理室的输送系统。模块的定位元件之间的相对位置是固定的，使得当处理室被移除并被另一处理室更换时，输送系统不需要重新校准。处理室包括用于在工件的处理表面处搅拌处理液体的桨装置。处理室中的桨装置，处理室和电极被配置为减少由工件表面上的桨形成的电阴影的可能性，并且当桨叶往复运动时考虑对电场的三维效应相对于工件。

2. 发明授权

US07390383B2 Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces 有权
标题翻译：用于在微型工件加工过程中增强传质的鞍座和外壳
公开(公告)号：US07390383B2
公开(公告)日：2008-06-24
申请号：US10734098
申请日：2003-12-11
申请人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
发明人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
IPC分类号： C25D17/00 , C25D17/02 , C25F7/00 , C25D7/12 , C25F3/30
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.
摘要翻译：公开了用于处理微特征工件的鞍座和外壳。具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。桨叶的往复行程可能会转移以进一步减少阴影。

3. 发明授权

US07390382B2 Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods 有权
标题翻译：具有多个电极和/或封闭的往复式桨的反应器及相关方法
公开(公告)号：US07390382B2
公开(公告)日：2008-06-24
申请号：US10734100
申请日：2003-12-11
申请人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
发明人： Paul R. McHugh , Gregory J. Wilson , Daniel J. Woodruff , Nolan Zimmerman , James J. Erickson
IPC分类号： C25F7/00 , C25D17/02 , C25D17/00 , C25D7/12 , C25F3/30
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece. An electric field control element positioned between the electrodes and the workpiece circumferentially varies the effect of the thieving electrode current to account for effects created by elongated paddles as they oscillate proximate to the workpiece.
摘要翻译：公开了具有多个电极和/或封闭的往复式叶片的反应器。反应器可以包括与处理位置间隔开的多个电极，以提供靠近处理位置的虚拟电极，用于将材料转移到工件或从工件传送材料。可以将磁体定位成靠近处理平面以定向沉积在工件上的感应敏感材料。电极可以从反应器中移除，而不会使它们通过磁体，以减少电极和磁体之间的干扰。工件可以由可旋转的工件支撑件承载以使工件定向以进行加工。电极中的至少一个可以作为电流窃贼工作，以减少在工件周边处的终端效应。定位在电极和工件之间的电场控制元件周向地改变了窃电电极电流的影响，以解决细长桨叶在靠近工件振荡时产生的效应。

4. 发明授权

US07252714B2 Apparatus and method for thermally controlled processing of microelectronic workpieces 失效
标题翻译：微电子工件热控加工的装置和方法
公开(公告)号：US07252714B2
公开(公告)日：2007-08-07
申请号：US10295302
申请日：2002-11-15
申请人： Kyle M. Hanson , Robert W. Batz, Jr. , Rajesh Baskaran , Nolan Zimmerman , Zhongmin Hu , Gregory J. Wilson , Paul R. McHugh
发明人： Kyle M. Hanson , Robert W. Batz, Jr. , Rajesh Baskaran , Nolan Zimmerman , Zhongmin Hu , Gregory J. Wilson , Paul R. McHugh
IPC分类号： B05C3/00
CPC分类号： H01L21/6723 , C23C18/1676 , H01L21/67109 , Y10T137/0318
摘要： Apparatus and method for thermally controlled processing of microelectronic workpieces with liquids. An apparatus in accordance with and embodiment of the invention includes a process vessel configured to carry a processing liquid, such as an electroless processing liquid. The vessel has a thermally transmissive wall for transferring heat to and/or from the processing liquid within. A heat transfer device, such as a reservoir that receives processing liquid spilling over from the process vessel, transfers heat to or from the processing liquid within the process vessel. The heat transfer device can also transfer heat to or from an internal or external heat source, such as a conduit carrying a heat transfer fluid, or an electrical resistance heater. The interaction between the microelectronic workpiece and the processing liquid can be further controlled by controlling the rate at which the microelectronic workpiece rotates and/or the manner in which the microelectronic workpiece is introduced to and/or withdrawn from the processing liquid.
摘要翻译：用液体对微电子工件进行热处理的装置和方法。根据本发明的实施例的装置包括配置成承载诸如无电处理液体的处理液体的处理容器。容器具有用于将热量传递到和/或内部的处理液体的热传递壁。传热装置，例如容纳从处理容器溢出的处理液体的储存器，将热量传递到处理容器内或从处理容器内的处理液体。传热装置还可以将热量传递到内部或外部热源，例如承载传热流体的导管或电阻加热器。通过控制微电子工件旋转的速度和/或微电子工件被引入和/或从处理液中取出的方式，可以进一步控制微电子工件和处理液之间的相互作用。

5. 发明授权

US07294243B2 Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof 有权
标题翻译：微电子工件电化学处理接触组件及其制造方法
公开(公告)号：US07294243B2
公开(公告)日：2007-11-13
申请号：US10497670
申请日：2002-12-05
申请人： Nolan Zimmerman , Gregory J. Wilson , Steve L. Eudy
发明人： Nolan Zimmerman , Gregory J. Wilson , Steve L. Eudy
IPC分类号： C25D17/00
CPC分类号： C25D17/001 , C25D7/123 , C25D17/06
摘要： Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assembly (400) can comprise a support member (410) that includes an inner wall (412) which defines an opening (414) configured to receive the workpiece and a plurality of contacts (420). The individual contacts (420) include a conductor (440) and a cover (430). The conductor (440) can comprise a proximal section (435) projecting inwardly into the opening (414) relative to the support member (410), a distal section (436) extending from the proximal section (435), and an inert exterior (444) at least at the distal section (436). The cover (430) comprises a dielectric element that covers at least the proximal section of the conductor, but does not cover at least a portion of the distal section of the core. The exposed portion of the distal section of the core, accordingly, defines a conductive contact site for contacting a conductive layer (e.g., a seed layer) on the workpiece.
摘要翻译：微电子工件电化学处理接触组件。接触组件（400）可包括支撑构件（410），该支撑构件包括内壁（412），所述内壁限定了构造成容纳工件的开口（414）和多个触点（420）。各个触点（420）包括导体（440）和盖（430）。导体（440）可以包括相对于支撑构件（410）向内伸入开口（414）的近端部分（435），从近侧部分（435）延伸的远端部分（436）和惰性外部 444），至少在远端部分（436）。盖（430）包括覆盖导体的至少近端部分但不覆盖芯的远端部分的至少一部分的电介质元件。因此，芯的远端部分的暴露部分限定了用于接触工件上的导电层（例如种子层）的导电接触部位。

6. 发明申请

US20050045474A1 Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof 有权
标题翻译：微电子工件电化学处理接触组件及其制造方法
公开(公告)号：US20050045474A1
公开(公告)日：2005-03-03
申请号：US10497670
申请日：2002-12-05
申请人： Nolan Zimmerman , Gregory Wilson , Steve Eudy
发明人： Nolan Zimmerman , Gregory Wilson , Steve Eudy
IPC分类号： C25D7/12 , C25D17/06
CPC分类号： C25D17/001 , C25D7/123 , C25D17/06
摘要： Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assembly (400) can comprise a support member (410) that includes an inner wall (412) which defines an opening (414) configured to receive the work-piece and a plurality of contacts (420). The individual contacts (420) include a conductor (440) and a cover (430). The conductor (440) can comprise a proximal section (435) projecting inwardly into the opening (414) relative to the support member (410), a distal section (436) extending from the proximal section (435), and an inert exterior (444) at least at the distal section (436). The cover (430) comprises a dielectric element that covers at least the proximal section of the conductor, but does not cover at least a portion of the distal section of the core. The exposed portion of the distal section of the core, accordingly, defines a conductive contact site for contacting a conductive layer (e.g., a seed layer) on the workpiece.
摘要翻译：微电子工件电化学处理接触组件。接触组件（400）可以包括支撑构件（410），该支撑构件包括内壁（412），内壁限定了构造成容纳工件的多个触点（420）的开口（414）。各个触点（420）包括导体（440）和盖（430）。导体（440）可以包括相对于支撑构件（410）向内伸入开口（414）的近端部分（435），从近侧部分（435）延伸的远端部分（436）和惰性外部 444），至少在远端部分（436）。盖（430）包括覆盖导体的至少近端部分但不覆盖芯的远端部分的至少一部分的电介质元件。因此，芯的远端部分的暴露部分限定了用于接触工件上的导电层（例如种子层）的导电接触部位。

7. 发明申请

US20080011450A1 Apparatus and Method for Thermally Controlled Processing of Microelectronic Workpieces 审中-公开
标题翻译：微电子工件热处理设备及方法
公开(公告)号：US20080011450A1
公开(公告)日：2008-01-17
申请号：US11776952
申请日：2007-07-12
申请人： Kyle Hanson , Robert Batz , Rajesh Baskaran , Nolan Zimmerman , Zhongmin Hu , Gregory Wilson , Paul McHugh
发明人： Kyle Hanson , Robert Batz , Rajesh Baskaran , Nolan Zimmerman , Zhongmin Hu , Gregory Wilson , Paul McHugh
IPC分类号： B05B1/00 , F17D3/00
CPC分类号： H01L21/6723 , C23C18/1676 , H01L21/67109 , Y10T137/0318
摘要： Apparatus and method for thermally controlled processing of microelectronic workpieces with liquids. An apparatus in accordance with and embodiment of the invention includes a process vessel configured to carry a processing liquid, such as an electroless processing liquid. The vessel has a thermally transmissive wall for transferring heat to and/or from the processing liquid within. A heat transfer device, such as a reservoir that receives processing liquid spilling over from the process vessel, transfers heat to or from the processing liquid within the process vessel. The heat transfer device can also transfer heat to or from an internal or external heat source, such as a conduit carrying a heat transfer fluid, or an electrical resistance heater. The interaction between the microelectronic workpiece and the processing liquid can be further controlled by controlling the rate at which the microelectronic workpiece rotates and/or the manner in which the microelectronic workpiece is introduced to and/or withdrawn from the processing liquid.
摘要翻译：用液体对微电子工件进行热处理的装置和方法。根据本发明的实施例的装置包括配置成承载诸如无电处理液体的处理液体的处理容器。容器具有用于将热量传递到和/或内部的处理液体的热传递壁。传热装置，例如容纳从处理容器溢出的处理液体的储存器，将热量传递到处理容器内或从处理容器内的处理液体。传热装置还可以将热量传递到内部或外部热源，例如承载传热流体的导管或电阻加热器。通过控制微电子工件旋转的速度和/或微电子工件被引入和/或从处理液中取出的方式，可以进一步控制微电子工件和处理液之间的相互作用。

8. 发明申请

US20050000817A1 Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods 有权
标题翻译：具有多个电极和/或封闭的往复式桨的反应器及相关方法
公开(公告)号：US20050000817A1
公开(公告)日：2005-01-06
申请号：US10734100
申请日：2003-12-11
申请人： Paul McHugh , Gregory Wilson , Daniel Woodruff , Nolan Zimmerman , James Erickson
发明人： Paul McHugh , Gregory Wilson , Daniel Woodruff , Nolan Zimmerman , James Erickson
IPC分类号： C25D5/00
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece. An electric field control element positioned between the electrodes and the workpiece circumferentially varies the effect of the thieving electrode current to account for effects created by elongated paddles as they oscillate proximate to the workpiece.
摘要翻译：公开了具有多个电极和/或封闭的往复式叶片的反应器。反应器可以包括与处理位置间隔开的多个电极，以提供靠近处理位置的虚拟电极，用于将材料转移到工件或从工件传送材料。可以将磁体定位成靠近处理平面以定向沉积在工件上的感应敏感材料。电极可以从反应器中移除，而不会使它们通过磁体，以减少电极和磁体之间的干扰。工件可以由可旋转的工件支撑件承载以使工件定向以进行加工。电极中的至少一个可以作为电流窃贼工作，以减少在工件周边处的终端效应。定位在电极和工件之间的电场控制元件周向地改变了窃电电极电流的影响，以解决细长桨叶在靠近工件振荡时产生的效应。

9. 发明申请

US20050006241A1 Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces 有权
标题翻译：用于在微型工件加工过程中增强传质的鞍座和外壳
公开(公告)号：US20050006241A1
公开(公告)日：2005-01-13
申请号：US10734098
申请日：2003-12-11
申请人： Paul McHugh , Gregory Wilson , Daniel Woodruff , Nolan Zimmerman , James Erickson
发明人： Paul McHugh , Gregory Wilson , Daniel Woodruff , Nolan Zimmerman , James Erickson
IPC分类号： C25D5/00
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.
摘要翻译：公开了用于处理微特征工件的鞍座和外壳。具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。桨叶的往复行程可能会转移以进一步减少阴影。

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