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1. 发明申请

US20060112969A1 WET CLEANING OF ELECTROSTATIC CHUCKS 有权
标题翻译：静电清洁剂的清洁
公开(公告)号：US20060112969A1
公开(公告)日：2006-06-01
申请号：US11000388
申请日：2004-12-01
申请人： Hong Shih , Tuochuan Huang , Catherine Zhou , Bruno Morel , Brian McMillin , Paul Mulgrew , Armen Avoyan
发明人： Hong Shih , Tuochuan Huang , Catherine Zhou , Bruno Morel , Brian McMillin , Paul Mulgrew , Armen Avoyan
IPC分类号： B08B3/12 , B08B3/00 , B08B5/00 , B08B3/10 , C23G1/02 , B08B7/00
CPC分类号： H01L21/6831 , B08B3/12 , H01L21/6704
摘要： A non-destructive and simple method for cleaning a new or used electrostatic chuck comprises a wet cleaning process, which removes contaminants deposited on a surface of the electrostatic chuck.
摘要翻译：用于清洁新的或使用过的静电卡盘的非破坏性和简单的方法包括湿式清洁工艺，其去除沉积在静电卡盘的表面上的污染物。

2. 发明申请

US20080179581A1 Picket fence kit 审中-公开
标题翻译： Picket围栏套件
公开(公告)号：US20080179581A1
公开(公告)日：2008-07-31
申请号：US11999904
申请日：2007-12-08
申请人： Paul Mulgrew
发明人： Paul Mulgrew
IPC分类号： E04H17/24 , E04H17/16
CPC分类号： E04H17/1439 , E06B11/02
摘要： A picket fence kit for a picket fence section includes an enclosure, a hollow post, a hollow top rail, a hollow bottom rail, and a plurality of pickets. The enclosure surrounds the post. The post surrounds the two rails and the plurality of pickets, and each rail surrounds a plurality of pickets. Pickets are axially aligned with each other in pairs, two rails are located side-by-side within the post, and two pairs of axially aligned pickets are positioned side-by-side within a rail. The post further surrounds a pair of axially aligned pickets not surrounded by a rail. The kit further includes a post cap, a shipping cap, a plurality of picket caps, a set of rail brackets and a set of self-tapping screws. A picket fence kit for a for a picket fence gate includes an enclosure, a hollow post, a first gate upright, a second gate upright, a hollow top rail, a hollow bottom rail, and a plurality of pickets. The enclosure surrounds the post. The post surrounds the first gate upright, the second gate upright, the hollow top rail, the hollow bottom rail, and the plurality of pickets.
摘要翻译：用于铲斗围栏部分的围栏套件包括外壳，空心柱，中空顶轨，中空底轨和多个桩。外壳围绕着柱子。该柱围绕两个轨道和多个桩，并且每个轨道围绕多个桩。咬合件成对地彼此轴向对准，两个轨道并排设置在柱内，并且两对轴向对准的支杆并排定位在轨道内。该柱还包围不被轨道围绕的一对轴向对准的支柱。该套件还包括一个柱盖，一个运输盖，多个桩帽，一组轨道托架和一套自攻螺钉。一种用于栅栏栅栏栅栏的栅栏套件包括外壳，空心柱，第一门立柱，第二门立柱，中空顶轨，中空底轨和多个桩。外壳围绕着柱子。该柱围绕第一门直立，第二门竖立，中空顶轨，中空底轨和多个桩。

3. 发明授权

US07052553B1 Wet cleaning of electrostatic chucks 有权
标题翻译：湿式清洁静电卡盘
公开(公告)号：US07052553B1
公开(公告)日：2006-05-30
申请号：US11000388
申请日：2004-12-01
申请人： Hong Shih , Tuochuan Huang , Catherine Zhou , Bruno Morel , Brian McMillin , Paul Mulgrew , Armen Avoyan
发明人： Hong Shih , Tuochuan Huang , Catherine Zhou , Bruno Morel , Brian McMillin , Paul Mulgrew , Armen Avoyan
IPC分类号： B08B6/00
CPC分类号： H01L21/6831 , B08B3/12 , H01L21/6704
摘要： A non-destructive and simple method for cleaning a new or used electrostatic chuck comprises a wet cleaning process, which removes contaminants deposited on a surface of the electrostatic chuck.
摘要翻译：用于清洁新的或使用过的静电卡盘的非破坏性和简单的方法包括湿式清洁工艺，其去除沉积在静电卡盘的表面上的污染物。

4. 发明授权

US08545639B2 Method of cleaning aluminum plasma chamber parts 有权
标题翻译：铝等离子体室部件的清洗方法
公开(公告)号：US08545639B2
公开(公告)日：2013-10-01
申请号：US13285203
申请日：2011-10-31
申请人： Hong Shih , John Daugherty , Dean J. Larson , Tuochuan Huang , Armen Avoyan , Jeremy Chang , Sivakami Ramanathan , Robert Anderson , Yan Fang , Duane Outka , Paul Mulgrew
发明人： Hong Shih , John Daugherty , Dean J. Larson , Tuochuan Huang , Armen Avoyan , Jeremy Chang , Sivakami Ramanathan , Robert Anderson , Yan Fang , Duane Outka , Paul Mulgrew
IPC分类号： C23G1/00 , C23G1/02 , B08B3/00
CPC分类号： H01J37/32853 , C11D7/08 , C11D11/0047 , H01J37/32862
摘要： A method of cleaning a surface of a component of a plasma chamber, wherein the component has an aluminum or anodized aluminum surface, the method including the steps of: soaking the surface of the component in a diluted sulfuric peroxide (DSP) solution; spray rinsing the surface with water following removal of the surface from the DSP solution; soaking the surface in a dilute nitric acid (HNO3) solution; spray rinsing the surface with water following removal of the surface from the dilute nitric acid solution; and repeating at least twice the steps of soaking the surface in dilute nitric acid followed by spray rinsing the surface.
摘要翻译：一种清洁等离子体室的部件的表面的方法，其中所述部件具有铝或阳极氧化的铝表面，所述方法包括以下步骤：将所述部件的表面浸入稀释的硫酸过氧化物（DSP）溶液中; 在从DSP溶液中除去表面后，用水冲洗表面; 将表面浸入稀硝酸（HNO3）溶液中; 在从稀硝酸溶液中除去表面后，用水冲洗表面; 并重复至少两次将表面浸入稀硝酸的步骤，然后喷淋冲洗该表面。

5. 发明申请

US20130104930A1 METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS 有权
标题翻译：清洁铝等离子体室部件的方法
公开(公告)号：US20130104930A1
公开(公告)日：2013-05-02
申请号：US13285203
申请日：2011-10-31
申请人： Hong Shih , John Daugherty , Dean J. Larson , Tuochuan Huang , Armen Avoyan , Jeremy Chang , Sivakami Ramanathan , Robert Anderson , Yan Fang , Duane Outka , Paul Mulgrew
发明人： Hong Shih , John Daugherty , Dean J. Larson , Tuochuan Huang , Armen Avoyan , Jeremy Chang , Sivakami Ramanathan , Robert Anderson , Yan Fang , Duane Outka , Paul Mulgrew
IPC分类号： C23G1/02
CPC分类号： H01J37/32853 , C11D7/08 , C11D11/0047 , H01J37/32862
摘要： A method of cleaning a surface of a component of a plasma chamber, wherein the component has an aluminum or anodized aluminum surface, the method including the steps of: soaking the surface of the component in a diluted sulfuric peroxide (DSP) solution; spray rinsing the surface with water following removal of the surface from the DSP solution; soaking the surface in a dilute nitric acid (HNO3) solution; spray rinsing the surface with water following removal of the surface from the dilute nitric acid solution; and repeating at least twice the steps of soaking the surface in dilute nitric acid followed by spray rinsing the surface.
摘要翻译：一种清洁等离子体室的部件的表面的方法，其中所述部件具有铝或阳极氧化的铝表面，所述方法包括以下步骤：将所述部件的表面浸入稀释的硫酸过氧化物（DSP）溶液中; 在从DSP溶液中除去表面后，用水冲洗表面; 将表面浸入稀硝酸（HNO3）溶液中; 在从稀硝酸溶液中除去表面后，用水冲洗表面; 并重复至少两次将表面浸入稀硝酸的步骤，然后喷淋冲洗该表面。

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