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    • 1. 发明授权
    • Sulfuric acid recycle apparatus
    • 硫酸回收设备
    • US06782901B2
    • 2004-08-31
    • US10045327
    • 2001-11-07
    • Okimitsu YasudaSeiichi Fujii
    • Okimitsu YasudaSeiichi Fujii
    • B08B300
    • H01L21/67057B08B3/00C01B17/88Y10S134/902
    • A sulfuric acid recycle apparatus capable of concentrating sulfuric acid, which is lowered in concentration upon completion of a wafer cleaning process, to a level to be recycled is provided. The sulfuric acid recycle apparatus for recycling sulfuric acid in a wafer cleaning fluid prepared by mixing sulfuric acid and hydrogen peroxide solution comprises a reaction bath having two openings formed of at least an introduction port and a discharge port for obtaining concentrated sulfuric acid by concentrating sulfuric acid in the wafer cleaning waste fluid introduced from the introduction port upon completion of a wafer cleaning process, then discharging the concentrated sulfuric acid from the discharge port, a wafer processing bath for processing wafers, and a supply unit for supplying the concentrated sulfuric acid to the wafer processing bath.
    • 提供了一种能够浓缩硫酸的硫酸回收设备,其在晶圆清洗过程完成时浓度降低到待循环水平。 通过混合硫酸和过氧化氢溶液制备的晶片清洗液中的硫酸回收硫酸回收装置包括一个具有至少一个引入口和排出口形成的两个开口的反应槽,用于通过浓缩硫酸获得浓硫酸 在晶圆清洗工序完成后从引入口导入的晶片清洗废液中,然后从排出口排出浓硫酸,处理晶片的晶片处理槽,以及将浓硫酸供给到 晶圆加工浴。
    • 3. 发明授权
    • Magnetic head device with slidable and adjustable magnetic head
    • 具有可滑动和可调节磁头的磁头设备
    • US5471439A
    • 1995-11-28
    • US9064
    • 1993-01-26
    • Yoshio KatayamaSeiichi FujiiSadao UchiyamaRyouichi SoejimaHitoshi MooriHideo Yoshida
    • Yoshio KatayamaSeiichi FujiiSadao UchiyamaRyouichi SoejimaHitoshi MooriHideo Yoshida
    • G11B11/10G11B11/105G11B5/54
    • G11B11/10595G11B11/10534G11B11/10576
    • A magneto-optical recording and reproducing apparatus for recording a recording data on a magneto-optical disk through magnetic field modulation is provided with a magnetic head device for applying a recording magnetic field corresponding to a recording signal current onto the magneto-optical disk. The magnetic head means is composed of coil support means including a hollow tubular portion, coil means provided outside the hollow tubular portion of the coil support means, magnetic head means, provided within the hollow tubular portion of the coil support means so as to be capable of freely sliding, for generating the recording magnetic field by supplying the recording signal current into the coil means, and elastic support means for supporting the magnetic head means so as to place it in a stand-by position where the magnetic head means and the magneto-optical disk do not interfere with one another by a push-up force exerted on the magnetic head means in the direction moving away from the magneto-optical disk. The magnetic head means is moved toward the magneto-optical disk in a direction opposite to the push-up force exerted by the elastic support means so as to come in contact with the magneto-optical disk using an electromagnetic force generated by supplying the recording signal current into the coil means.
    • 通过磁场调制将磁记录数据记录在磁光盘上的磁光记录和重放装置设置有用于将对应于记录信号电流的记录磁场施加到磁 - 光盘上的磁头装置。 磁头装置由包括中空管状部分的线圈支撑装置,设置在线圈支撑装置的中空管状部分外侧的线圈装置,设置在线圈支撑装置的中空管状部分内的磁头装置,以便能够 用于通过将记录信号电流供给到线圈装置中来产生记录磁场的弹性支撑装置,以及用于支撑磁头装置以便将其放置在磁头装置和磁电机的待机位置的弹性支撑装置 光盘不会通过在远离磁光盘的方向上施加在磁头装置上的上推力相互干扰。 磁头装置以与由弹性支撑装置施加的上推力相反的方向朝向磁光盘移动,以便通过提供记录信号产生的电磁力与磁光盘接触 电流进入线圈装置。
    • 4. 发明授权
    • Robot simulation device, and robot simulation program
    • 机器人模拟装置,机器人仿真程序
    • US07606633B2
    • 2009-10-20
    • US10550285
    • 2003-03-25
    • Hirofumi HosokawaSeiichi Fujii
    • Hirofumi HosokawaSeiichi Fujii
    • G06F19/00
    • B25J9/1666B25J9/1671G05B2219/40317
    • A robot simulation device is provided. It includes a virtual robot working environment in which a virtual robot has a task of transferring a virtual object from a start point to a goal point, the simulation device determining the path of travel. A task simulation is executed in response to the virtual robot working environment and the path of travel. The task simulation determines a robot activity region where the virtual robot can operate and an interference region where the virtual robot encounters obstacles. Thereafter the device creates a desired executed simulation in which the virtual robot can operate without encountering obstacles.
    • 提供机器人模拟装置。 它包括虚拟机器人工作环境,其中虚拟机器人具有将虚拟对象从起点传送到目标点的任务,模拟装置确定行进路径。 响应于虚拟机器人的工作环境和行进路径执行任务模拟。 任务模拟确定虚拟机器人可以操作的机器人活动区域和虚拟机器人遇到障碍物的干扰区域。 此后,设备创建所需的执行模拟,其中虚拟机器人可以在不遇到障碍物的情况下操作。
    • 5. 发明申请
    • Robot simulation device, and robot simulation program
    • 机器人模拟装置,机器人仿真程序
    • US20060184275A1
    • 2006-08-17
    • US10550285
    • 2003-03-25
    • Hirofumi HosokawaSeiichi Fujii
    • Hirofumi HosokawaSeiichi Fujii
    • G06F19/00
    • B25J9/1666B25J9/1671G05B2219/40317
    • A robot simulation device, capable of simulating if a robot can transfer an object without any interference in a working space where obstacles are disposed. The device comprises of an input device, a display, a processing unit, computing programs and an output device of teaching programs. And the device further comprises of: (1) a two-dimensional display part having coordinate axes, (2) a means of displaying the obstacles and working space, a means of displaying a path of the moving robot, and a means of displaying the transferred object by the robot, on the display, (3) a means of interpolating the path by designating moving points of a central point of the moving transferred object, (4) a means of displaying the path of the moving transferred object in the working space, and (5) a means of displaying a region where the path interferes with the obstacles.
    • 一种机器人模拟装置,能够模拟机器人能够在没有任何干扰的情况下将物体传送到设置障碍物的工作空间中。 该装置包括输入装置,显示器,处理单元,计算程序和教学程序的输出装置。 该装置还包括:(1)具有坐标轴的二维显示部件,(2)显示障碍物和工作空间的装置,显示移动机器人的路径的装置,以及显示装置 通过机器人在显示器上传送的物体,(3)通过指定移动的被转移对象的中心点的移动点来插入路径的装置,(4)在工作中显示移动的被转移对象的路径的装置 空间,(5)显示路径干扰障碍物的区域的方法。
    • 6. 发明授权
    • Exhaust gas processing system
    • 废气处理系统
    • US5735919A
    • 1998-04-07
    • US766124
    • 1996-12-16
    • Seiichi FujiiHiroshi Nagano
    • Seiichi FujiiHiroshi Nagano
    • B01D45/16B04B15/02
    • B01D45/16
    • An exhaust gas processing system is provided with a particle separating apparatus capable of separating and removing particles contained in an exhaust gas from the exhaust gas disposed between a front and a back exhaust pipes forming the exhaust gas discharge line. The particle separating apparatus includes a gas vessel defining a gas chamber for receiving the exhaust gas containing particles and discharged through a rear end portion of the front exhaust pipe, and an exhaust gas guide member disposed in the gas chamber and having guide walls defining an internal space and provided with openings through which the internal space communicates with the gas chamber. The guide walls are formed so as to guide the exhaust gas discharged into the gas chamber through the rear end portion of the front exhaust pipe so that the exhaust gas flows in vertical, whirling currents in the gas chamber. A particle receiving unit of a particle container is connected to a particle discharge unit of the particle separating apparatus. The gas contained in the particle container is replaced with an inert gas by a gas replacing apparatus before separating the particle container from the particle separating apparatus.
    • 废气处理系统设置有能够从形成排气排出管线的前后排气管之间的废气中分离除去废气中含有的粒子的粒子分离装置。 颗粒分离装置包括:气体容器,其限定用于接收含有颗粒的废气并通过前排气管的后端部分排出的气室;以及排气导引构件,其设置在气室中并具有限定内部的导向壁 空间并设置有开口,内部空间通过该开口与气体室连通。 引导壁形成为引导通过前排气管的后端部排出到气室中的废气,使得废气在气室中以垂直的旋转电流流动。 颗粒容器的颗粒接收单元连接到颗粒分离装置的颗粒排放单元。 在将颗粒容器与颗粒分离装置分离之前,通过气体置换装置将包含在颗粒容器中的气体替换为惰性气体。
    • 7. 发明授权
    • Disk recording/reproduction device of reduced thickness with driving
mechanism for moving heads parallel to the disk face
    • 具有与盘面平行的移动头的驱动机构的厚度减小的盘片记录/再现装置
    • US5648943A
    • 1997-07-15
    • US455397
    • 1995-05-31
    • Yoshiyuki OmiSeiichi FujiiSadao UchiyamaShigeki TsujiMasanobu KatsukiYoshio Katayama
    • Yoshiyuki OmiSeiichi FujiiSadao UchiyamaShigeki TsujiMasanobu KatsukiYoshio Katayama
    • G11B11/10G11B11/105G11B17/04G11B17/043G11B11/00G11B5/00G11B33/02
    • G11B17/0434G11B11/10558
    • A disk recording/reproduction device according to the present invention includes: a recording medium including a disk and a protective case for the disk; loading mechanism for guiding the recording medium from a first position outside the disk recording/reproduction device in a first direction in a linear manner, then to a second position located inside the disk recording/reproduction device, and thereafter in a second direction perpendicular to the first direction to a third position, the first position allowing the recording medium to be taken out and the third position allowing information to be recorded on the recording medium; a pickup; a pickup driving mechanism for moving the pickup in parallel to a recording face of the disk; a magnetic head opposing the pickup so as to interpose the disk and moving in parallel to the disk integrally with the pickup; and head position switching mechanism for detaching the magnetic head from the disk and positioning the magnetic head in either a recordable position or a stand-by position. A position retention mechanism locates the recording medium in a fourth position between the second and third positions. The magnetic head moves to the recordable position when the recording medium is in the third position. The magnetic head and the pickup move between a position opposing the protective case and a retracted position away from the position opposing the protective case. When the recording medium is in the fourth position, the magnetic head and the pickup are moved from the position opposing the protective case to the retracted position and from the retracted position to the position opposing the protective case.
    • 根据本发明的盘记录/再现装置包括:包括盘的记录介质和用于盘的保护壳; 用于将记录介质从盘记录/再现装置外部的第一位置沿第一方向以线性方式引导到位于盘记录/再现装置内部的第二位置,然后在与第二方向垂直的第二方向上引导记录介质 第一方向到第三位置,允许记录介质被取出的第一位置和允许信息被记录在记录介质上的第三位置; 皮卡 用于将拾取器平行移动到盘的记录面的拾取驱动机构; 磁头,其与拾音器相对,以便插入盘并与拾取器一体地平行于盘移动; 以及用于将磁头从盘上分离并将磁头定位在可记录位置或待机位置的头位置切换机构。 位置保持机构将记录介质定位在第二和第三位置之间的第四位置。 当记录介质处于第三位置时,磁头移动到可记录位置。 磁头和拾取器在与保护壳体相对的位置和远离与保护壳体相对的位置的缩回位置之间移动。 当记录介质处于第四位置时,磁头和拾取器从与保护壳相对的位置移动到缩回位置并且从缩回位置移动到与保护壳相对的位置。