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    • 7. 发明申请
    • LIQUID CARBON DIOXIDE SUPPLY DEVICE AND SUPPLY METHOD
    • 液体二氧化碳供应装置和供应方法
    • US20150075636A1
    • 2015-03-19
    • US14376102
    • 2013-01-29
    • ORGANO CORPORATION
    • Hiroshi SugawaraYoshinori Ono
    • H01L21/02H01L21/67
    • H01L21/02101B01D5/006B01D2256/22B01D2257/70B08B7/0021C01B32/50F17C7/02F17C7/04F25J2220/80F25J2220/82F25J2220/84Y02P20/123Y10S134/902Y10T137/0402Y10T137/794
    • Provided are a supply apparatus and a supply method for supplying fluid carbon dioxide that are energy-saving and efficient. The supply apparatus for supplying fluid carbon dioxide includes: a circulation system including a purifying unit that removes impurities and contaminants from the carbon dioxide, a storage unit that includes a condenser for changing gaseous carbon dioxide passed through the purifying unit into liquid carbon dioxide, a supply unit that includes a first pump for supplying the liquid carbon dioxide in the storage unit to a use point, and a return line through which excess carbon dioxide supplied from the supply unit but not used at the use point is returned to the storage unit; and a carbon dioxide introduction unit that introduces carbon dioxide, as a starting material or recovered gas, to the circulation system. The carbon dioxide introduction unit includes a second pump for increasing the pressure of the carbon dioxide and the second pump introduces the carbon dioxide to the circulation system.
    • 提供一种用于供应节能且高效的流体二氧化碳的供应装置和供给方法。 用于供应流体二氧化碳的供应装置包括:循环系统,包括从二氧化碳中除去杂质和污染物的净化单元,包括用于将通过净化单元的气态二氧化碳转化为液态二氧化碳的冷凝器的储存单元, 供给单元,其包括用于将存储单元中的液体二氧化碳供应到使用点的第一泵;以及从供应单元供应但在使用点未使用的过量二氧化碳的返回管线返回到存储单元; 以及二氧化碳引入单元,其将二氧化碳作为原料或回收气体引入循环系统。 二氧化碳引入单元包括用于增加二氧化碳压力的第二泵,而第二泵将二氧化碳引入循环系统。