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    • 2. 发明授权
    • Switch
    • 开关
    • US06891454B1
    • 2005-05-10
    • US10625154
    • 2003-07-23
    • Yasuyuki NaitoYoshito NakanishiNorisato ShimizuKunihiko Nakamura
    • Yasuyuki NaitoYoshito NakanishiNorisato ShimizuKunihiko Nakamura
    • B81B3/00H01H47/22H01H53/02H01H59/00H01P1/10H01P1/12H01H51/22
    • H01P1/127H01H59/0009
    • A switch for switching over a propagation path of external signal by contacting or non-contacting a movable member to or from an electrode. The switch comprises an input port for inputting an external signal, a movable member connected to the input port, a first electrode for propagating the external signal, a first control power supply connected to the first electrode and for generating a control signal, a second electrode for blocking the external signal, and a second control power supply connected to the second electrode and for generating a control signal. The first control power supply provides a control signal to the first electrode. The movable member is displaced by a driving force generated based on a potential difference between the movable member and first electrode and a potential difference between the movable member and second electrode, thereby being contacted to the first or second electrode.
    • 用于通过使可动构件接触或不接触电极来切换外部信号的传播路径的开关。 开关包括用于输入外部信号的输入端口,连接到输入端口的可动件,用于传播外部信号的第一电极,连接到第一电极并用于产生控制信号的第一控制电源,用于产生控制信号的第二电极 用于阻挡外部信号,以及连接到第二电极并用于产生控制信号的第二控制电源。 第一控制电源向第一电极提供控制信号。 通过基于可动构件和第一电极之间的电位差产生的驱动力和可动构件与第二电极之间的电位差而使可动构件位移,从而与第一或第二电极接触。
    • 3. 发明授权
    • Switch
    • 开关
    • US07209019B2
    • 2007-04-24
    • US11201541
    • 2005-08-11
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • H01H51/22
    • H01H59/0009H01G5/40H01H2001/0078H01H2059/0027
    • A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
    • 开关包括电压施加装置,用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势,以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势,引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束,第一和第二光束可以高速电耦合在一起。 此外,在面向第一和第二光束的第三光束上产生静电力,以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时,第二光束向第三光束移动,从而释放电耦合的第一和第二光束。
    • 4. 发明授权
    • Switch with current potential control
    • 切换电流电位控制
    • US06982616B2
    • 2006-01-03
    • US10624381
    • 2003-07-22
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • H01H51/22
    • H01H59/0009H01G5/40H01H2001/0078H01H2059/0027
    • A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
    • 开关包括电压施加装置,用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势,以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势,引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束,第一和第二光束可以高速电耦合在一起。 此外,在面向第一和第二光束的第三光束上产生静电力,以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时,第二光束向第三光束移动,从而释放电耦合的第一和第二光束。
    • 6. 发明申请
    • Switch
    • 开关
    • US20050270128A1
    • 2005-12-08
    • US11201541
    • 2005-08-11
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • B81B3/00H01H49/00H01H59/00H01H51/22
    • H01H59/0009H01G5/40H01H2001/0078H01H2059/0027
    • A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
    • 开关包括电压施加装置,用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势,以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势,引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束,第一和第二光束可以高速电耦合在一起。 此外,在面向第一和第二光束的第三光束上产生静电力,以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时,第二光束向第三光束移动,从而释放电耦合的第一和第二光束。
    • 7. 发明授权
    • Variable capacitor and method for manufacturing same
    • 可变电容器及其制造方法
    • US06813135B2
    • 2004-11-02
    • US10626963
    • 2003-07-25
    • Kunihiko NakamuraYoshito NakanishiNorisato ShimizuYasuyuki Naito
    • Kunihiko NakamuraYoshito NakanishiNorisato ShimizuYasuyuki Naito
    • H01G500
    • H01G5/18Y10T29/435
    • A variable capacitor of the invention includes a beam having flexibility and an electrode provided close to the beam in order to form a capacitor with the beam. By applying a voltage to between the beam and the electrode to thereby deflect the beam by an electrostatic force, a capacitance between the both is changed. The deflected beam and the electrode are placed into contact through an insulation layer formed on a surface of at least one thereof, to change a contact area thereof, thereby changing the capacitance. Meanwhile, the electrode is divided in plurality. A recess is formed such that one electrode is lower than a height of another electrode surface. By applying a voltage to the beam and the electrode corresponding to the recess, the beam is pulled to an inside of the recess, thereby enabling to eliminate stiction.
    • 本发明的可变电容器包括具有柔性的光束和靠近光束设置的电极,以便与光束形成电容器。 通过在光束和电极之间施加电压从而通过静电力使光束偏转,两者之间的电容发生变化。 偏转的光束和电极通过形成在其至少一个的表面上的绝缘层而接触,以改变其接触面积,从而改变电容。 同时,电极被分成多个。 形成凹部,使得一个电极低于另一个电极表面的高度。 通过对与凹部对应的光束和电极施加电压,将光束拉到凹部的内部,从而能够消除静电。
    • 8. 发明授权
    • MEMS switch
    • MEMS开关
    • US07405635B2
    • 2008-07-29
    • US10572142
    • 2004-12-20
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • H01P1/10
    • H01H59/0009H01H2001/0078
    • It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio.An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer 38, 40, a second conductive layer 30, 32 and a dielectric layer 34, 36 sandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam 42; at least one of the conductive beam 42 and the three-layer structure beams is displaced on a plane parallel to the substrate 46 due to an electrostatic force so that the conductive beam 42 and the first conductive layer 38, 40 can come into contact with each other; and a conductive path is formed between the conductive beam 42 and the second conductive layer 30, 32 when the conductive beam 42 and the first conductive layer are in contact with each other.
    • 它是提供一种易于制造,微观且能够获得足够的开/关电容变化率的MEMS开关。 MEMS开关包括衬底46,形成在衬底表面上的导电束42和形成在衬底的表面上且与导电束相对设置的三层结构梁B 1和B 2。 MEMS开关的特征在于:三层结构梁中的每一个包括夹在第一导电层和第二导电层之间的第一导电层38,40,第二导电层30,32和介电层34,36 ; 第一导电层与导电束42相对; 导电束42和三层结构光束中的至少一个由于静电力而在平行于衬底46的平面上移位,使得导电束42和第一导电层38,40可以与每个 其他; 并且当导电束42和第一导电层彼此接触时,在导电束42和第二导电层30,32之间形成导电路径。
    • 9. 发明申请
    • Mems switch
    • Mems开关
    • US20070092180A1
    • 2007-04-26
    • US10572142
    • 2004-12-20
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • G02B6/26
    • H01H59/0009H01H2001/0078
    • It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio. An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer 38, 40, a second conductive layer 30, 32 and a dielectric layer 34, 36 sandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam 42; at least one of the conductive beam 42 and the three-layer structure beams is displaced on a plane parallel to the substrate 46 due to an electrostatic force so that the conductive beam 42 and the first conductive layer 38, 40 can come into contact with each other; and a conductive path is formed between the conductive beam 42 and the second conductive layer 30, 32 when the conductive beam 42 and the first conductive layer are in contact with each other.
    • 它是提供一种易于制造,微观且能够获得足够的开/关电容变化率的MEMS开关。 MEMS开关包括衬底46,形成在衬底表面上的导电束42和形成在衬底的表面上且与导电束相对设置的三层结构梁B 1和B 2。 MEMS开关的特征在于:三层结构梁中的每一个包括夹在第一导电层和第二导电层之间的第一导电层38,40,第二导电层30,32和介电层34,36 ; 第一导电层与导电束42相对; 导电束42和三层结构光束中的至少一个由于静电力而在平行于衬底46的平面上移位,使得导电束42和第一导电层38,40可以与每个 其他; 并且当导电束42和第一导电层彼此接触时,在导电束42和第二导电层30,32之间形成导电路径。