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    • 2. 发明授权
    • Switch
    • 开关
    • US06891454B1
    • 2005-05-10
    • US10625154
    • 2003-07-23
    • Yasuyuki NaitoYoshito NakanishiNorisato ShimizuKunihiko Nakamura
    • Yasuyuki NaitoYoshito NakanishiNorisato ShimizuKunihiko Nakamura
    • B81B3/00H01H47/22H01H53/02H01H59/00H01P1/10H01P1/12H01H51/22
    • H01P1/127H01H59/0009
    • A switch for switching over a propagation path of external signal by contacting or non-contacting a movable member to or from an electrode. The switch comprises an input port for inputting an external signal, a movable member connected to the input port, a first electrode for propagating the external signal, a first control power supply connected to the first electrode and for generating a control signal, a second electrode for blocking the external signal, and a second control power supply connected to the second electrode and for generating a control signal. The first control power supply provides a control signal to the first electrode. The movable member is displaced by a driving force generated based on a potential difference between the movable member and first electrode and a potential difference between the movable member and second electrode, thereby being contacted to the first or second electrode.
    • 用于通过使可动构件接触或不接触电极来切换外部信号的传播路径的开关。 开关包括用于输入外部信号的输入端口,连接到输入端口的可动件,用于传播外部信号的第一电极,连接到第一电极并用于产生控制信号的第一控制电源,用于产生控制信号的第二电极 用于阻挡外部信号,以及连接到第二电极并用于产生控制信号的第二控制电源。 第一控制电源向第一电极提供控制信号。 通过基于可动构件和第一电极之间的电位差产生的驱动力和可动构件与第二电极之间的电位差而使可动构件位移,从而与第一或第二电极接触。
    • 4. 发明授权
    • MEMS switch
    • MEMS开关
    • US07405635B2
    • 2008-07-29
    • US10572142
    • 2004-12-20
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • Akinori HashimuraYasuyuki NaitoKunihiko NakamuraYoshito Nakanishi
    • H01P1/10
    • H01H59/0009H01H2001/0078
    • It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio.An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer 38, 40, a second conductive layer 30, 32 and a dielectric layer 34, 36 sandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam 42; at least one of the conductive beam 42 and the three-layer structure beams is displaced on a plane parallel to the substrate 46 due to an electrostatic force so that the conductive beam 42 and the first conductive layer 38, 40 can come into contact with each other; and a conductive path is formed between the conductive beam 42 and the second conductive layer 30, 32 when the conductive beam 42 and the first conductive layer are in contact with each other.
    • 它是提供一种易于制造,微观且能够获得足够的开/关电容变化率的MEMS开关。 MEMS开关包括衬底46,形成在衬底表面上的导电束42和形成在衬底的表面上且与导电束相对设置的三层结构梁B 1和B 2。 MEMS开关的特征在于:三层结构梁中的每一个包括夹在第一导电层和第二导电层之间的第一导电层38,40,第二导电层30,32和介电层34,36 ; 第一导电层与导电束42相对; 导电束42和三层结构光束中的至少一个由于静电力而在平行于衬底46的平面上移位,使得导电束42和第一导电层38,40可以与每个 其他; 并且当导电束42和第一导电层彼此接触时,在导电束42和第二导电层30,32之间形成导电路径。
    • 5. 发明授权
    • Electromechanical filter
    • 机电过滤器
    • US07397326B2
    • 2008-07-08
    • US10578040
    • 2004-11-19
    • Yasuyuki NaitoYoshito Nakanishi
    • Yasuyuki NaitoYoshito Nakanishi
    • H03H9/46
    • H03H9/02393H03H2009/02496H03H2009/02511H03H2009/02519
    • A small-size electromechanical filter that can be highly integrated and can be tuned is provided.An electromechanical filter includes a conductor acting as a signal line (movable electrode) 101, a magnetic field generating portion 102 for generating a magnetic field passing through the conductor, and a drive electrode 103 for changing the magnetic field passing through the signal line by displacing relative positions of the conductor and the magnetic field generating portion, whereby a tuning of a ferromagnetic resonance frequency, which is difficult to realize in the prior art, can be realized by changing the magnetic field passing through the signal line.
    • 提供了可以高度集成并可以调谐的小尺寸机电滤波器。 机电滤波器包括用作信号线(可移动电极)101的导体,用于产生通过导体的磁场的磁场产生部分102和用于通过移位来改变通过信号线的磁场的驱动电极103 可以通过改变通过信号线的磁场来实现现有技术中难以实现的铁磁共振频率的调谐,从而可以实现导体和磁场产生部分的相对位置。
    • 6. 发明申请
    • Electromechanical Switch
    • 机电开关
    • US20080078662A1
    • 2008-04-03
    • US11577017
    • 2005-10-18
    • Yasuyuki NaitoYoshito Nakanishi
    • Yasuyuki NaitoYoshito Nakanishi
    • H01H57/00
    • H01P1/127H01G5/16H01H59/0009H01L2924/0002H01L2924/00
    • Providing an electromechanical switch equipped with a mechanism for preventing occurrence of self-actuation in order to embody a highly-reliable electromechanical switch, and electric equipment using the same.An electromechanical filter of the present invention is an electromechanical switch formed on a substrate. The switch has a fixed electrode which is to become a signal transmission line, and a movable electrode formed in a levitating manner while being spaced from the fixed electrode with a gap therebetween. An insulating film is provided on the fixed electrode, and an actuator is formed around the movable electrode formed on a post section. Thereby, an electromechanical switch equipped with a movable electrode fixing mechanism which prevents occurrence of self-actuation, which has hitherto been difficult to realize, is materialized.
    • 提供一种机电开关,其具有用于防止自动致动的机构,以体现高度可靠的机电开关,以及使用该机电开关的电气设备。 本发明的机电式滤波器是在基板上形成的机电开关。 该开关具有成为信号传输线的固定电极和与固定电极间隔开间隔地形成为悬浮状态的可动电极。 在固定电极上设置绝缘膜,并且在形成在支柱部分上的可动电极周围形成致动器。 因此,实现了迄今为止难以实现的具有防止发生自动致动的可动电极固定机构的机电开关。
    • 7. 发明授权
    • Switch with current potential control
    • 切换电流电位控制
    • US06982616B2
    • 2006-01-03
    • US10624381
    • 2003-07-22
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • Yoshito NakanishiNorisato ShimizuKunihiko NakamuraYasuyuki Naito
    • H01H51/22
    • H01H59/0009H01G5/40H01H2001/0078H01H2059/0027
    • A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
    • 开关包括电压施加装置,用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势,以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势,引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束,第一和第二光束可以高速电耦合在一起。 此外,在面向第一和第二光束的第三光束上产生静电力,以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时,第二光束向第三光束移动,从而释放电耦合的第一和第二光束。