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1. 发明授权

US06606153B2 Process and assembly for non-destructive surface inspections 失效
公开(公告)号：US06606153B2
公开(公告)日：2003-08-12
申请号：US09901998
申请日：2001-07-10
申请人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
发明人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
IPC分类号： G01N2188
CPC分类号： G01N21/9501
摘要： A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.

2. 发明授权

US07477371B2 Process and assembly for non-destructive surface inspections 有权
公开(公告)号：US07477371B2
公开(公告)日：2009-01-13
申请号：US11464766
申请日：2006-08-15
申请人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
发明人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
IPC分类号： G01N21/00
CPC分类号： G01N21/9501
摘要： A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.

3. 发明授权

US07102744B2 Process and assembly for non-destructive surface inspections 有权
公开(公告)号：US07102744B2
公开(公告)日：2006-09-05
申请号：US10619109
申请日：2003-07-10
申请人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
发明人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
IPC分类号： G01N21/88
CPC分类号： G01N21/9501
摘要： A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.

4. 发明授权

US06271916B1 Process and assembly for non-destructive surface inspections 失效
标题翻译：非破坏性表面检查的工艺和组装
公开(公告)号：US06271916B1
公开(公告)日：2001-08-07
申请号：US08770491
申请日：1996-12-20
申请人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
发明人： Norbert Marxer , Kenneth P. Gross , Hubert Altendorfer , George Kren
IPC分类号： G01N2188
CPC分类号： G01N21/9501
摘要： A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.
摘要翻译：光束沿着垂直于表面的方向指向表面。使表面移动，使得光束沿着螺旋路径扫描表面。椭圆镜被放置成其轴线沿着表面法线收集由表面散射的光以及在距表面法线的收集角度处的表面上的任何异常。在一些应用中，其沿着表面法线的轴的透镜装置也用于收集由表面散射的光和任何异常。由镜子和透镜散射的光可以被引导到相同或不同的检测器。优选地，通过第一检测器检测由表面在从轴的收集角度的第一范围内的表面散射的光，并且由第二检测器检测在距离轴的第二收集角度范围内由表面散射的光。收集角度的两个范围是不同的，一个检测器被优化以检测来自大颗粒和缺陷的散射，并且另一个检测器被优化以检测来自小颗粒和缺陷的光。

5. 发明申请

US20070103676A1 Process and Assembly for Non-Destructive Surface Inspections 有权
标题翻译：非破坏性表面检查的过程和装配
公开(公告)号：US20070103676A1
公开(公告)日：2007-05-10
申请号：US11464766
申请日：2006-08-15
申请人： Norbert Marxer , Kenneth Gross , Hubert Altendorfer , George Kren
发明人： Norbert Marxer , Kenneth Gross , Hubert Altendorfer , George Kren
IPC分类号： G01N21/88
CPC分类号： G01N21/9501
摘要： A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector. The two ranges of collection angles are different, with one detector optimized to detect scattering from large particles and defects and the other detector optimized to detect light from small particles and defects.
摘要翻译：光束沿着垂直于表面的方向指向表面。使表面移动，使得光束沿着螺旋路径扫描表面。椭圆镜被放置成其轴线沿着表面法线收集由表面散射的光和表面上的任何异常，其收集角度远离表面法线。在一些应用中，其沿着表面法线的轴的透镜装置也用于收集由表面散射的光和任何异常。由镜子和透镜散射的光可以被引导到相同或不同的检测器。优选地，通过第一检测器检测由表面在从轴的收集角度的第一范围内的表面散射的光，并且由第二检测器检测在距离轴的第二收集角度范围内由表面散射的光。收集角度的两个范围是不同的，一个检测器被优化以检测来自大颗粒和缺陷的散射，并且另一个检测器被优化以检测来自小颗粒和缺陷的光。

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