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    • 1. 发明授权
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US06753232B2
    • 2004-06-22
    • US10139329
    • 2002-05-07
    • Noh-Yeal KwakSang Wook Park
    • Noh-Yeal KwakSang Wook Park
    • H01L21336
    • H01L21/265H01L21/2236H01L21/2652H01L21/26586H01L29/4941
    • The present invention discloses a method for fabricating a semiconductor device. A stabilized junction is formed by simultaneously adjusting diffusion in a channel direction and a depth direction by restricting transient enhanced diffusion and oxidation enhanced diffusion, and reducing a short channel effect and diffusion in the depth direction, by positioning a nitrified oxide film between a gate electrode and a nitride film spacer formed at side walls of the gate electrode in order to remove defects generated due to stress differences between the gate electrode and the nitride film spacer in a formation process of a PMOS transistor. It is thus possible to form a device having an ultra shallow junction which is not influenced by miniaturization.
    • 本发明公开了一种半导体器件的制造方法。 通过在栅电极之间定位硝化氧化膜,通过同时调节通道方向和深度方向上的扩散,通过限制瞬时增强的扩散和氧化增强的扩散以及减小短沟道效应和深度方向的扩散来形成稳定的结 以及形成在栅电极的侧壁处的氮化物膜间隔物,以便在PMOS晶体管的形成过程中消除由于栅电极和氮化物膜间隔物之间​​的应力差而产生的缺陷。 因此,可以形成不受小型化影响的具有超浅结的装置。
    • 6. 发明授权
    • Domestic injection type ultrasonic washing apparatus
    • 国产注射式超声波清洗机
    • US07581553B2
    • 2009-09-01
    • US11271340
    • 2005-11-10
    • Ki Hun KimSeong Keun LimHyun Chul LeeSang Wook Park
    • Ki Hun KimSeong Keun LimHyun Chul LeeSang Wook Park
    • B08B3/02
    • B08B3/02A23N12/02B05B1/14B05B17/0646B08B3/12B08B2203/0288
    • Disclosed herein is a domestic injection-type ultrasonic washing apparatus comprising an oscillator module and an injector module. The oscillator module includes an oscillation circuit unit provided with various elements to generate electric vibration, ultrasonic vibrators located underneath the oscillation circuit unit and electrically connected to the oscillation circuit unit to convert the electric vibration to mechanical vibration, and a radiation plate having vibrator seating openings. The injector module includes a raw water inlet portion, a fluid passage housing having an inner fluid passage to allow inlet raw water to pass while coming into contact with the radiation plate, and injection nozzles to ultrasonically vibrate and inject the raw water. The washing apparatus achieves reduction in the size thereof, and ease of assembly, repair and exchange of damaged modules. Also, the washing apparatus shows improved radiation effect and uniform supply of wash water.
    • 本文公开了一种家用注射型超声波清洗装置,其包括振荡器模块和注射器模块。 所述振荡器模块包括具有产生电振动的各种元件的振荡电路单元,位于所述振荡电路单元下方并与振荡电路单元电连接以将电振动转换为机械振动的超声波振子,以及具有振动器座部开口 。 喷射器模块包括原水入口部分,流体通道壳体,其具有内部流体通道,以允许入口原水在与辐射板接触的同时通过;以及喷嘴,用于超声振动并注入原水。 洗涤装置的尺寸减小,易于组装,修理和损坏的模块的更换。 此外,洗涤装置显示改善的辐射效果和洗涤水的均匀供应。