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    • 1. 发明授权
    • Scroll type compressor having a thrust bearing for the drive shaft
    • 涡旋式压缩机具有用于驱动轴的止推轴承
    • US5503539A
    • 1996-04-02
    • US260990
    • 1994-06-16
    • Nobuyuki NakajimaMasakuni IshikawaSusumu Saito
    • Nobuyuki NakajimaMasakuni IshikawaSusumu Saito
    • F04C18/02F04C23/00F04C29/00F04C29/02F04C29/12F04C18/04
    • F04C18/0215F04C29/0057F04C23/008
    • A scroll compressor reduces the load applied to the thrust bearing, to prevent a thrust bearing from seizing and to improve the service life of the thrust bearing. It comprises an electric motor that is provided within a high pressure space inside a sealed case with a stator fixed within the sealed case and a rotor fixed to a drive shaft. An oscillating shaft is decentered on and extends from the drive shaft. An oscillating scroll member has an insertion hole into which the oscillating shaft is inserted. A fixed scroll member forms a compression space by fitting into the oscillating scroll member, and a block secures the fixed scroll member inside the sealed case and clamps the oscillating scroll member so that it can oscillate freely between the block and the fixed scroll member. The thrust bearing is provided between the drive shaft and the block to hold the lower end of the drive shaft so that it can rotate freely. The internal diameter of the thrust bearing is approximately equal to the external diameter of the oscillating shaft. As a result, the sliding contact surface at the thrust bearing can be reduced to an absolute minimum so that friction at the thrust bearing is reduced, thereby achieving the aforementioned objectives of reducing the load applied to the thrust bearing, preventing the thrust bearing from seizing and improving the service life of the thrust bearing.
    • 涡旋压缩机降低了施加到推力轴承的负载,以防止止推轴承卡住并提高止推轴承的使用寿命。 它包括电机,其设置在密封壳体内的高压空间内,定子固定在密封壳体内,转子固定在驱动轴上。 摆动轴偏心并从驱动轴延伸。 摆动涡旋构件具有插入该摆动轴的插入孔。 固定涡旋构件通过装配到摆动涡旋构件中形成压缩空间,并且块将固定涡旋构件固定在密封壳体内部并夹紧摆动涡旋构件,使得其可以在块和固定涡旋构件之间自由摆动。 推力轴承设置在驱动轴和块之间,以保持驱动轴的下端,使其能够自由旋转。 推力轴承的内径大致等于摆动轴的外径。 因此,推力轴承上的滑动接触面可以减小到绝对最小值,使得止推轴承处的摩擦力减小,从而达到减轻施加在推力轴承上的载荷的上述目的,防止止推轴承卡住 并提高推力轴承的使用寿命。
    • 3. 发明授权
    • Scroll type compressor having an oil seal bearing for the drive shaft
    • 涡旋式压缩机具有用于驱动轴的油封轴承
    • US5472328A
    • 1995-12-05
    • US284991
    • 1994-08-04
    • Susumu SaitoNobukazu TakagiKiyohiro HaradaYukio KazahayaSeiji KuchikiMasakuni IshikawaNobuyuki Nakajima
    • Susumu SaitoNobukazu TakagiKiyohiro HaradaYukio KazahayaSeiji KuchikiMasakuni IshikawaNobuyuki Nakajima
    • F04C29/02F04C18/04F04C27/00
    • F04C29/02
    • In order to provide a simple structure to achieve sufficient lubrication and sealing in the various areas of a scroll compressor where sliding contact occurs, a spiral groove that communicates between a high-pressure side space and an area at an upper portion of a main bearing is formed on the external circumferential surface of the drive shaft where it comes in contact with and slides against the main bearing. A seal bearing is provided in a drive shaft-receiving block between the high-pressure side space and a low pressure side space to seal off the high-pressure side space from the low pressure side space. An oil supply hole is provided that communicates between the high-pressure side space and an oscillation space which is formed by an oscillating scroll member and an oscillating shaft. With this, a first oil passage that lubricates the main bearing and a second oil passage that lubricates an oscillating shaft-insertion hole are formed. A seal washer, the surface of which is polished to a specific roughness, is provided between the seal bearing and the drive shaft and, in addition, an elastic member is provided between the seal bearing and the block.
    • 为了提供简单的结构,以便在发生滑动接触的涡旋压缩机的各个区域中实现足够的润滑和密封,在高压侧空间和主轴承的上部区域之间连通的螺旋槽是 形成在驱动轴的外周面上,在其与其接触并与主轴承滑动。 密封轴承设置在高压侧空间与低压侧空间之间的驱动轴接收块中,以将高压侧空间与低压侧空间密封。 提供了一种供油孔,其连通高压侧空间和由摆动涡旋件和摆动轴形成的振荡空间。 由此,形成润滑主轴承的第一油路和润滑摆动轴插入孔的第二油路。 在密封轴承和驱动轴之间设置密封垫圈,其表面被抛光到特定的粗糙度,此外,在密封轴承和块之间设置有弹性构件。
    • 4. 发明授权
    • Thrust bearing arrangement for a drive shaft of a scroll compressor
    • 用于涡旋压缩机的驱动轴的推力轴承装置
    • US5413469A
    • 1995-05-09
    • US261102
    • 1994-06-16
    • Nobuyuki NakajimaMasakuni IshikawaSusumu Saito
    • Nobuyuki NakajimaMasakuni IshikawaSusumu Saito
    • F04C29/00F01C1/04
    • F04C29/0021
    • To reduce a load applied to the thrust bearing, to prevent the thrust bearing from seizing and to improve the service life of the thrust bearing, the thrust bearing is provided between a drive shaft and a block to seal a high-pressure side space from a low-pressure side space. By providing an oil supply through hole, one end of which opens into high-pressure side space and the other end of which opens into a space formed by inserting the shaft into the insertion hole, high-pressure lubricating oil can be supplied to the space. The constric within the shaft with the effect of the constriction clearance is formed between the aforementioned oscillating shaft and the insertion hole, and a pressure differential between the two ends of the drive shaft is eliminated. Furthermore, by forming a circular oil groove at a sliding surface where the aforementioned thrust bearing and the drive shaft are in contact with each other and communicating channels that communicate between the circular oil groove and an external circumferential area of the aforementioned thrust bearing, the high-pressure lubricating oil is induced to the circular oil groove and the communicating channels to apply an upward force to the drive shaft.
    • 为了减轻施加在推力轴承上的负荷,为了防止止推轴承卡住并提高推力轴承的使用寿命,推力轴承设置在驱动轴和块之间,以将高压侧空间与 低压侧空间。 通过提供一个供油通孔,其一端通向高压侧空间,另一端通过将轴插入到插入孔中而形成空间,可以将高压润滑​​油供给到空间 。 在上述摆动轴与插入孔之间形成有在收缩间隙作用下的轴内的结构,并且消除了驱动轴的两端之间的压力差。 此外,通过在上述推力轴承和驱动轴彼此接触的滑动面处形成圆形的油槽,并且在圆形油槽与上述推力轴承的外周面之间连通的连通流路, 压力润滑油被引导到圆形油槽和连通通道,向驱动轴施加向上的力。
    • 7. 发明授权
    • Substrate processing control method and storage medium
    • 基板处理控制方法和存储介质
    • US07824931B2
    • 2010-11-02
    • US12511749
    • 2009-07-29
    • Susumu SaitoAkitaka Shimizu
    • Susumu SaitoAkitaka Shimizu
    • H01L21/66
    • H01L21/67069H01L21/67242H01L22/12H01L22/26H01L2924/0002H01L2924/00
    • In a substrate processing control method, a first process acquires a first-reflectance-spectrum of a beam reflected from the first-fine-structure and a second-reflectance-spectrum of a beam reflected from the second-fine-structure for each of varying-pattern-dimensions of the first-fine-structure when the pattern-dimension of the first-fine-structure is varied. A second process acquires reference-spectrum-data for each of the varying-pattern-dimensions of the first-fine-structure by overlapping the first-reflectance-spectrum with the second-reflectance-spectrum. A third process actually measures beams reflected from the first and the second-fine-structure, respectively, after irradiating light beam on to the substrate and acquiring reflectance-spectrums of the actual-measured beams as actual-measured spectrum data. A fourth process compares the actual-measured spectrum data with the respective reference-spectrum data and acquiring, as the measured pattern-dimension, one of the varying-pattern-dimensions corresponding to reference-spectrum data that is closely matches with the actual-measured spectrum data. A final process ends the processing of the substrate if the measured pattern-dimension reaches a value.
    • 在基板处理控制方法中,第一处理取得从第一微细结构反射的光束的第一反射光谱和从第二微细结构反射的光束的第二反射光谱, 当第一微细结构的图案尺寸变化时,第一微细结构的图案尺寸。 第二过程通过将第一反射光谱与第二反射光谱重叠来获取第一精细结构的每个变化图形尺寸的参考光谱数据。 第三处理实际上是在将光束照射到衬底上之后分别测量从第一和第二微细结构反射的光束,并且将实测光束的反射光谱作为实测光谱数据进行测量。 第四个过程将实际测量的频谱数据与相应的参考频谱数据进行比较,并且将与参考频谱数据相对应的变化模式维度中的一个与实际测量的频谱数据紧密匹配,作为测量的模式维度 频谱数据。 如果测量的图案尺寸达到一个值,则最后的处理结束衬底的处理。
    • 8. 发明授权
    • Plasma processing method and plasma processing apparatus for performing accurate end point detection
    • 用于执行精确终点检测的等离子体处理方法和等离子体处理装置
    • US07662646B2
    • 2010-02-16
    • US11687428
    • 2007-03-16
    • Kosuke OgasawaraSusumu SaitoSyuji Nozawa
    • Kosuke OgasawaraSusumu SaitoSyuji Nozawa
    • H01L21/00
    • H01J37/32935H01J37/32963H01L22/26
    • In a plasma processing method, a correlation between substrate type data and optical data is obtained by using a multivariate analysis; substrate type data is obtained from optical data based on the correlation when initiating a plasma processing; and a substrate type is determined by using the obtained substrate type data. Further, a setting data set corresponding to the determined substrate type is selected from setting data sets, each for detecting a plasma processing end point of the plasma processing, each of the setting data sets being stored in advance in a data storage unit; an end point of the plasma processing is detected based on the selected setting data set; and the plasma processing is terminated at the detected end point.
    • 在等离子体处理方法中,通过使用多元分析获得基板类型数据和光学数据之间的相关性; 基于等离子体处理时的相关性,从光学数据获得基板型数据; 并且通过使用所获得的基板类型数据来确定基板类型。 此外,从设置数据组中选择与所确定的基板类型相对应的设置数据集,每个设置数据组用于检测等离子体处理的等离子体处理结束点,每个设置数据集被预先存储在数据存储单元中; 基于所选择的设置数据集来检测等离子体处理的终点; 并且在检测到的终点处终止等离子体处理。