会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • MEMS PRESSURE SENSOR
    • MEMS压力传感器
    • US20130047746A1
    • 2013-02-28
    • US13583379
    • 2012-04-02
    • Kunihiko NakamuraTomohiro IwasakiTakehiko YamakawaKeiji Onishi
    • Kunihiko NakamuraTomohiro IwasakiTakehiko YamakawaKeiji Onishi
    • G01L1/10
    • G01L9/0019H03H9/2463H03H2009/02488
    • A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
    • 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108,其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构,用于根据外部施加的压力移动所述至少一个电极,以便改变所述间隙; 连接到检测电路,其检测从输入电极到输出电极的AC信号的传输特性,输入和输出电极是振动器102和至少一个电极108中的一个和另一个,并且检测到压力 基于由检测电路检测到的AC信号的传输特性。
    • 10. 发明授权
    • Mechanical resonator
    • 机械谐振器
    • US07453332B2
    • 2008-11-18
    • US10538319
    • 2004-03-24
    • Kunihiko Nakamura
    • Kunihiko Nakamura
    • H03H9/46H03H9/52
    • H03H9/2405H03H9/2457H03H2009/02496H03H2009/02511
    • A mechanical resonator is constructed such that it has a vibration body that performs a mechanical resonant vibration and also has an electrode located in the vicinity of the vibration body and such that it is shaped into the surface shape of the electrode when deformed during a resonance mode of the vibration body, whereby the electrostatic capacitance change per unit vibration displacement amount can be enlarged. In this way, a mechanical resonator can be realized which performs an effective electricity-to-machine or machine-to-electricity conversion. Moreover, this mechanical resonator can be used to realize a small-sized, high-performance filter circuit or switch circuit in a high-density integrated electrical circuit.
    • 机械共振器被构造成使得其具有执行机械共振振动的振动体,并且还具有位于振动体附近的电极,并且使得其在共振模式期间变形时被成形为电极的表面形状 的振动体,从而可以扩大每单位振动位移量的静电电容变化。 以这种方式,可以实现机械谐振器,其执行有效的电对机或机对电转换。 此外,该机械谐振器可用于在高密度集成电路中实现小尺寸,高性能的滤波器电路或开关电路。