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1. 发明申请

US20140091871A1 MEMS ELEMENT AND OSCILLATOR 有权
标题翻译： MEMS元件和振荡器
公开(公告)号：US20140091871A1
公开(公告)日：2014-04-03
申请号：US14031143
申请日：2013-09-19
申请人： Seiko Epson Corporation
发明人： Ryuji Kihara
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/0271 , B81B2203/0118 , B81B2203/019 , H03B5/30 , H03H9/2457 , H03H2009/02251 , H03H2009/02488 , H03H2009/02511
摘要： A MEMS element includes: a substrate; a first electrode formed above the substrate; and a second electrode having a support portion and a beam portion, the support portion being formed above the substrate, the beam portion extending from the support portion, being formed in a state of having a gap between the first electrode and the beam portion, and being capable of vibrating in a thickness direction of the substrate. The width of the beam portion decreases with distance from a base of the beam portion toward a tip of the beam portion. The central length of the beam portion is larger than the lengths of ends of the beam portion. The width of the base of the beam portion is larger than the central length of the beam portion.
摘要翻译： MEMS元件包括：基板; 形成在所述衬底上的第一电极; 以及具有支撑部和梁部的第二电极，所述支撑部形成在所述基板的上方，所述梁部从所述支撑部延伸，形成为在所述第一电极和所述梁部之间具有间隙的状态，以及能够在基板的厚度方向上振动。梁部分的宽度随着从梁部分的基部朝向梁部分的尖端的距离而减小。梁部分的中心长度大于梁部分的端部长度。梁部分的基部的宽度大于梁部分的中心长度。

2. 发明授权

US08653716B2 Method and device for suppressing hysteresis of resonators through simultaneous resonance 有权
标题翻译：谐振器通过同时谐振抑制磁滞的方法和装置
公开(公告)号：US08653716B2
公开(公告)日：2014-02-18
申请号：US13040670
申请日：2011-03-04
申请人： Sebastien Hentz , Najib Kacem
发明人： Sebastien Hentz , Najib Kacem
IPC分类号： H02N1/00 , H03L7/00
CPC分类号： G01C19/56 , H03H9/02244 , H03H9/02259 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H2009/02488 , H03H2009/02496
摘要： An electromechanical resonator including: at least one deformable element, and at least one electrode that simultaneously supplies, to the at least one deformable element, at least one first actuating force at a first frequency, and a second actuating force at a second frequency, the first and the second frequencies creating at least two simultaneous resonances with a primary resonance at a frequency ω0 equal to the first frequency and the second frequency being equal to a subharmonic resonant frequency (kω0, with k>1) of the resonator, or to a superharmonic resonant frequency (ω0/k, with k>1).
摘要翻译：一种机电谐振器，包括：至少一个可变形元件，以及至少一个电极，其同时向所述至少一个可变形元件提供至少一个第一频率的第一致动力和第二频率的第二致动力，第一和第二频率在等于第一频率的频率ω0和第二频率等于谐振器的次谐波共振频率（komega0，k> 1）产生至少两个同时谐振的初级谐振，或者形成为超谐振共振频率（ω= 0，k，k> 1）。

3. 发明授权

US08516905B2 MEMS pressure sensor 有权
标题翻译： MEMS压力传感器
公开(公告)号：US08516905B2
公开(公告)日：2013-08-27
申请号：US13583379
申请日：2012-04-02
申请人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
发明人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
IPC分类号： G01L1/10 , G01B7/16
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译：包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力基于由检测电路检测到的AC信号的传输特性。

4. 发明申请

US20100295632A1 Resonators, resonator arrays, apparatus and methods 有权
标题翻译：谐振器，谐振器阵列，装置和方法
公开(公告)号：US20100295632A1
公开(公告)日：2010-11-25
申请号：US12470855
申请日：2009-05-22
申请人： Markku Anttoni Oksanen , Ilkka Tittonen , Mika Petteri Koskenvuori
发明人： Markku Anttoni Oksanen , Ilkka Tittonen , Mika Petteri Koskenvuori
IPC分类号： H03H9/00
CPC分类号： H03H9/2436 , H03H9/462 , H03H9/505 , H03H2009/0237 , H03H2009/02488
摘要： A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry.
摘要翻译：谐振器包括具有多个对称轴的基本盘形部分，并且被配置为通过围绕多个对称轴对称地变形而以多个谐振模式谐振。

5. 发明申请

US20100283353A1 MEMS RESONATORS 有权
标题翻译： MEMS谐振器
公开(公告)号：US20100283353A1
公开(公告)日：2010-11-11
申请号：US12601038
申请日：2008-05-28
申请人： CASPER VAN DER AVOORT
发明人： CASPER VAN DER AVOORT
IPC分类号： H03H9/24
CPC分类号： H03H9/2452 , H03H9/02244 , H03H9/02259 , H03H2009/02488 , H03H2009/02496
摘要： A MEMS piezoresistive resonator (8, 78) is driven at a higher order eigenmode (32) than the fundamental eigenmode (31). The route of flow of a sense current (22) is arranged in relation to a characteristic of the higher order eigenmode (32), for example by being at a point of maximum displacement (50) or at a point of maximum rate of change with respect to distance (x) of displacement of the higher order eigenmode (32). The route of flow of the sense current (22) may be arranged by fabricating the MEMS piezoresistive resonator (8, 78) with a trench (15) formed between two beams (11, 12) of the MEMS piezoresistive resonator (8, 78), the end of the trench being located at the above mentioned position.
摘要翻译： MEMS压阻谐振器（8,78）以比基本本征模式（31）高的本征模式（32）被驱动。感测电流（22）的流动路径相对于高阶本征模式（32）的特性被布置，例如通过位于最大位移（50）的点或最大变化速度的点处，相对于高阶本征模式（32）的位移距离（x）。感测电流（22）的流动路径可以通过用形成在MEMS压阻谐振器（8,78）的两个光束（11,12）之间的沟槽（15）制造MEMS压阻谐振器（8,78）来布置，沟槽的端部位于上述位置。

6. 发明申请

US20160087550A1 VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT 审中-公开
标题翻译：振动器，电子设备和移动对象
公开(公告)号：US20160087550A1
公开(公告)日：2016-03-24
申请号：US14856898
申请日：2015-09-17
申请人： Seiko Epson Corporation
发明人： Kazuyuki NAGATA , Ryuji KIHARA
IPC分类号： H02N1/00
CPC分类号： B81B3/0072 , B81B2201/0271 , H03H3/0072 , H03H9/10 , H03H9/2405 , H03H2009/02385 , H03H2009/0244 , H03H2009/02488
摘要： To reduce concentration of stress near a connection of a connection portion between a support portion and a fixed base portion of a vibration section of a MEMS vibrator and to achieve a reduction in vibration leakage, a structure of the vibrator includes a portion which extends from a fixed base portion and supports a vibration section and of which a width decreases in a direction directed from the fixed base portion to the vibration section.
摘要翻译：为了减少MEMS振动器的振动部分的支撑部分和固定基部之间的连接部分的连接处的应力集中，并且为了减少振动泄漏，振动器的结构包括从固定基部并且支撑振动部分，并且其宽度在从固定基部指向振动部分的方向上减小。

7. 发明授权

US08902022B2 Resonator and method of controlling the same 有权
标题翻译：谐振器及其控制方法
公开(公告)号：US08902022B2
公开(公告)日：2014-12-02
申请号：US13430275
申请日：2012-03-26
申请人： Casper van der Avoort , Andreas Bernardus Maria Jansman
发明人： Casper van der Avoort , Andreas Bernardus Maria Jansman
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/02259 , H03H9/02433 , H03H9/2452 , H03H2009/02251 , H03H2009/02488
摘要： A resonator comprising a resonator body and actuation electrodes for driving the resonator into a resonant mode, in which the resonator body vibrates parallel to a first axis. The resonator comprises means to apply a voltage to the resonator in a direction perpendicular to the first axis direction. This serves to shift the frequency of resonant modes other than the principal resonant mode, and this allows increased amplitude of output signal from the resonator.
摘要翻译：一种谐振器，包括谐振器体和用于将谐振器驱动到共振模式的致动电极，其中谐振器体平行于第一轴振动。谐振器包括在垂直于第一轴线方向的方向上向谐振器施加电压的装置。这用于移动主谐振模式以外的谐振模式的频率，并且这允许来自谐振器的输出信号的幅度增加。

8. 发明授权

US08854150B2 Resonator and method of controlling the same 有权
标题翻译：谐振器及其控制方法
公开(公告)号：US08854150B2
公开(公告)日：2014-10-07
申请号：US13446894
申请日：2012-04-13
申请人： Casper van der Avoort , Jozef Thomas Martinus van Beek
发明人： Casper van der Avoort , Jozef Thomas Martinus van Beek
IPC分类号： H03B5/30 , H01L41/053 , H03H9/09 , H03H9/17 , H03H9/54 , H03H9/02 , H03H9/24
CPC分类号： H03H9/02433 , H03H9/02338 , H03H9/2452 , H03H2009/02456 , H03H2009/02488
摘要： A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.
摘要翻译：一种谐振器，其中除了在节点处的正常锚固件之外，提供第二锚定装置以及在谐振器本体和第二锚定装置之间的相关联的连接臂。连接臂在非节点处连接到谐振器体，使得它不连接到形成固定连接的正常位置。连接臂用于抑制横向振动模式。

9. 发明授权

US08072117B2 Thermal-mechanical signal processing 有权
标题翻译：热机械信号处理
公开(公告)号：US08072117B2
公开(公告)日：2011-12-06
申请号：US11358917
申请日：2006-02-20
申请人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H02N10/00 , H02N2/00
CPC分类号： H03D1/00 , G02B26/0858 , H03B5/30 , H03C1/46 , H03D1/02 , H03D3/34 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/2436 , H03H2009/02488 , H03H2009/02511
摘要： A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.
摘要翻译：源信号被转换成具有转换为机械运动的时变温度场。在一个实施例中，通过利用微制造的快速响应，测辐射热表型射频功率计，提供源信号到时变温度场的转换。谐振型微机械热致动器可用于温度读出和解调。

10. 发明申请

US20110121682A1 SIGNAL AMPLIFICATION BY HIERARCHAL RESONATING STRUCTURES 有权
公开(公告)号：US20110121682A1
公开(公告)日：2011-05-26
申请号：US12681428
申请日：2007-10-11
申请人： Pritiraj Mohanty , Alexei Gaidarzhy , Guiti Zolfagharkhani , Fardad Hashemi
发明人： Pritiraj Mohanty , Alexei Gaidarzhy , Guiti Zolfagharkhani , Fardad Hashemi
IPC分类号： H03H9/50
CPC分类号： H03H9/2405 , H03H9/02244 , H03H2009/02488
摘要： An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements with a characteristic frequency and coupled to each of the first level major elements to form a second level hierarchy in which a signal is effectively amplified by vibrating each of the plurality of major elements in at least one mode determined by the geometry and dimensions of the first level sub-micron minor elements.

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