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1. 发明申请

US20130147567A1 OSCILLATOR 有权
标题翻译：振荡器
公开(公告)号：US20130147567A1
公开(公告)日：2013-06-13
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

2. 发明授权

US08570112B2 Oscillator with MEMS resonator 有权
标题翻译：具有MEMS谐振器的振荡器
公开(公告)号：US08570112B2
公开(公告)日：2013-10-29
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

3. 发明申请

US20130047746A1 MEMS PRESSURE SENSOR 有权
标题翻译： MEMS压力传感器
公开(公告)号：US20130047746A1
公开(公告)日：2013-02-28
申请号：US13583379
申请日：2012-04-02
申请人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
发明人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
IPC分类号： G01L1/10
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译：包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力基于由检测电路检测到的AC信号的传输特性。

4. 发明授权

US08698257B2 Resonator and production method thereof 有权
标题翻译：谐振器及其制作方法
公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

5. 发明授权

US08516905B2 MEMS pressure sensor 有权
标题翻译： MEMS压力传感器
公开(公告)号：US08516905B2
公开(公告)日：2013-08-27
申请号：US13583379
申请日：2012-04-02
申请人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
发明人： Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
IPC分类号： G01L1/10 , G01B7/16
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译：包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力基于由检测电路检测到的AC信号的传输特性。

6. 发明申请

US20120091547A1 RESONATOR AND PRODUCTION METHOD THEREOF 有权
标题翻译：谐振器及其生产方法
公开(公告)号：US20120091547A1
公开(公告)日：2012-04-19
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

7. 发明授权

US07639103B2 Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator 失效
标题翻译：压电滤波器，天线双工器以及采用压电谐振器的通信装置
公开(公告)号：US07639103B2
公开(公告)日：2009-12-29
申请号：US11812013
申请日：2007-06-14
申请人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70
CPC分类号： H03H9/588 , H03H3/04 , H03H9/587 , H03H2003/023 , H03H2003/0414
摘要： A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.
摘要翻译：压电滤波器包括基板和设置在同一基板上的多个压电谐振器。每个压电谐振器包括形成在基板中的空腔，形成在基板上的覆盖空腔的下电极，形成在下电极上的压电材料层和形成在压电材料层上的上电极。至少一个压电谐振器具有由多个单元形成的空腔。

8. 发明授权

US07417360B2 Piezoelectric resonator and method for producing the same 失效
标题翻译：压电谐振器及其制造方法
公开(公告)号：US07417360B2
公开(公告)日：2008-08-26
申请号：US11580032
申请日：2006-10-13
申请人： Tomohide Kamiyama , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki
发明人： Tomohide Kamiyama , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki
IPC分类号： H01L41/053
CPC分类号： H03H3/02 , H03H9/02118 , H03H9/0514 , H03H9/132 , H03H9/172 , H03H9/564 , H03H9/568 , H03H9/706
摘要： An upper electrode is provided on one main surface of a piezoelectric layer, and a lower electrode is provided on the other main surface thereof. A vibration section is an area in which the lower electrode, the piezoelectric layer and the upper electrode overlap in a vertical projection direction. Line electrodes for respectively connecting the lower electrode and the upper electrode to input/output electrodes are provided on the one main surface and the other main surface of the piezoelectric layer. The vibration section is placed on (connected to) the substrate via the support section. The support section is provided on an area of the piezoelectric layer excluding the area on which the vibration section is provided and the area on which the input/output electrodes and the line electrodes are provided.
摘要翻译：上电极设置在压电层的一个主表面上，下电极设置在另一个主表面上。振动部是下部电极，压电体层和上部电极在垂直方向上重叠的区域。用于将下电极和上电极分别连接到输入/输出电极的线电极设置在压电层的一个主表面和另一个主表面上。振动部分经由支撑部分放置在（连接到）基板上。支撑部设置在除了设置振动部的区域以外的压电层的区域和设置有输入输出电极和线电极的区域。

9. 发明申请

US20090133237A1 PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC RESONATORS 审中-公开
标题翻译：压电元件及制造压电谐振器的方法
公开(公告)号：US20090133237A1
公开(公告)日：2009-05-28
申请号：US12338189
申请日：2008-12-18
申请人： Keiji ONISHI , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
发明人： Keiji ONISHI , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
IPC分类号： H01L41/24
CPC分类号： H03H9/132 , H03H3/02 , H03H9/0514 , H03H9/13 , H03H9/172 , H03H9/175 , H03H2003/025 , Y10T29/42
摘要： A piezoelectric resonator comprises a piezoelectric material layer 101, a first electrode 102 formed on one major surface of the piezoelectric material layer 101, and having a cross-section in the shape of a trapezoid whose longer side contacts the piezoelectric material layer 101, and a second electrode 103 formed on the other major surface of the piezoelectric material layer 101, and having a cross-section in the shape of a trapezoid whose longer side contacts the piezoelectric material layer 101.
摘要翻译：压电谐振器包括压电材料层101，形成在压电材料层101的一个主表面上的第一电极102，并且具有长边接触压电材料层101的梯形形状的横截面，以及第二电极103形成在压电材料层101的另一个主表面上，并且具有长边与压电材料层101接触的梯形形状的横截面。

10. 发明申请

US20070085633A1 Device including piezoelectric thin film and method for producing the same 失效
标题翻译：包括压电薄膜的装置及其制造方法
公开(公告)号：US20070085633A1
公开(公告)日：2007-04-19
申请号：US11580139
申请日：2006-10-13
申请人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
发明人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
IPC分类号： H03H9/54
CPC分类号： H03H9/173 , H01H57/00 , H01H2057/006 , H03H3/02 , H03H2003/021
摘要： An acoustic resonator according to the present invention includes a substrate 105, a support section 104 provided on the substrate 105, a lower electrode 103 provided on the support section 104, a piezoelectric body 101 provided on the lower electrode 103, and an upper electrode 102 provided on the piezoelectric body 101. The lower electrode 103, the piezoelectric body 101 and the upper electrode 102 form a vibration section 107. The support section 104 for supporting the vibration section 107 is shaped such that at least one portion of a vertical cross-section thereof has a curvature.
摘要翻译：根据本发明的声谐振器包括基板105，设置在基板105上的支撑部分104，设置在支撑部分104上的下电极103，设置在下电极103上的压电体101和上电极102 设置在压电体101上。下电极103，压电体101和上电极102形成振动部107。用于支撑振动部分107的支撑部分104成形为使得其垂直横截面的至少一部分具有曲率。

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