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    • 6. 发明授权
    • Ceramic heater and method for producing ceramic heater
    • 陶瓷加热器和陶瓷加热器的制造方法
    • US07329842B2
    • 2008-02-12
    • US11590812
    • 2006-11-01
    • Takuma KushihashiNoboru KimuraMasaki Seki
    • Takuma KushihashiNoboru KimuraMasaki Seki
    • H05B3/06
    • H05B3/143H01L21/67103
    • A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.
    • 一种陶瓷加热器,包括由绝缘陶瓷制成的板构件,其中形成有一对或多个通孔,由一端具有电源端子的导电陶瓷制成的杆构件。 杆构件插入板构件中的通孔中。 由导电陶瓷制成的导电层形成在板件上; 并且在导电层上形成由绝缘陶瓷制成的涂层。 杆构件的一个端面具有与板构件的主表面相同的平面,导电层具有形成在板构件的主表面上的加热器图案,并且杆构件电绝缘不会短路 彼此相对的主表面。
    • 7. 发明授权
    • Air balancing device
    • 空气平衡装置
    • US06802241B2
    • 2004-10-12
    • US10258401
    • 2002-10-23
    • Noboru Kimura
    • Noboru Kimura
    • F15B11028
    • B66D3/18B66F3/242B66F3/247
    • A pressure regulating valve (20) for adjusting a pressure of a supply/discharge passage (10) to a pressure balanced against a weight of a body to be carried (1) is provided. The supply/discharge passage (10) is connected to a working chamber (8) of a cylinder (2) for raising and lowering the body to be carried (1). A control valve (38) for increasing and decreasing a pressure in a control passage (28) in accordance with a balance between the weight of the body to be carried (1) and a working force in a reaction force chamber (42) to which a pilot pressure is introduced from the control passage (28) is also provided. The pressure regulating valve (20) comprises a pressure regulating chamber (26) connected to the control passage (28) via an opening/closing valve (48), a pilot chamber (30) to which the pilot pressure from the control passage (28) is constantly introduced, and a control chamber (32) to which a pilot pressure from the supply/discharge passage (10), and it adjusts the pressure of the supply/discharge passage (10) to the pressure balanced against the weight of the body to be carried (1) by balancing a working force in the pressure regulating chamber (26) with working forces in the pilot chamber (30) and the control chamber (32).
    • 本发明提供一种压力调节阀(20),用于将供给/排出通道(10)的压力调节至与被承载物体(1)的重量相平衡的压力。 供给排出通路(10)与缸体(2)的工作室(8)连接,用于使待搬运物体(1)升降。 一种控制阀(38),用于根据被搬运物体(1)的重量和反作用力室(42)中的作用力之间的平衡来增加和减少控制通道(28)中的压力, 还提供了从控制通道(28)引入的先导压力。 压力调节阀(20)包括通过开/关阀(48)连接到控制通道(28)的压力调节室(26),来自控制通道(28)的先导压力的先导室 )以及来自供给/排出通道(10)的先导压力的控制室(32),并且将供给/排出通道(10)的压力调节到相对于 (1)通过在压力调节室(26)中的作用力与先导室(30)和控制室(32)中的作用力平衡。
    • 10. 发明授权
    • Heating element
    • 加热元件
    • US07952054B2
    • 2011-05-31
    • US11783581
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00C23C16/00
    • H01L21/67103H05B3/143
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件,其中在保护层上形成电阻率或硬度被控制的耐腐蚀层,即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过, 由此,能够避免由于导电层,特别是电源端子部分的腐蚀而导致的劣化,另外即使具有卡盘图案也能够实现作为静电卡盘的高功能,并且具有长的使用寿命并且是 能够以低成本生产。