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    • 3. 发明授权
    • Heat treatment apparatus and method of forming a thin film using the
apparatus
    • 热处理装置及使用该装置形成薄膜的方法
    • US5164012A
    • 1992-11-17
    • US635209
    • 1990-12-28
    • Hisashi Hattori
    • Hisashi Hattori
    • H01L21/223C23C16/24C23C16/44C23C16/455C30B25/14H01L21/205H01L21/22H01L21/31
    • C23C16/45574C23C16/24C23C16/45576C23C16/45578C30B25/14
    • A heat treatment apparatus having a reaction furnace including a reaction chamber for accommodating a plurality of objects, major surfaces of which are faced to each other at intervals, and a heater provided outside the reaction chamber, gas supply tube for introducing a gas into the reaction chamber therethrough, flow-directing unit for directing gas flow in a first direction substantially parallel to the surfaces of the objects, gas exhaust tube for exhausting a gas outside the reaction chamber, and moving unit for moving the gas flow in a second direction different from the first direction. A method of forming thin films on objects of heat treatment having the steps of causing a first gas flow introduced from a first gas supply tube and a second gas flow introduced from a second gas supply tube to meet each other, thereby producing a third gas flow flowing in a direction substantially parallel to the surfaces of the objects, major surfaces of which are faced to each other at intervals, disposed in a reaction chamber, and controlling flow rate of the first and second gas flows, thereby moving the position of the third gas flow in a second direction different from the first direction.
    • 一种具有反应炉的热处理装置,该反应炉包括用于容纳多个物体的反应室,主反应室的主表面间隔地彼此相对;以及设置在反应室外部的加热器,用于将气体引入反应器的气体供给管 通过其流动引导单元,用于引导基本上平行于物体表面的第一方向的气流,用于排出反应室外的气体的排气管,以及用于沿不同于第二方向的第二方向移动气流的移动单元 第一个方向。 一种在热处理对象上形成薄膜的方法,其特征在于,使从第一气体供给管引入的第一气流和从第二气体供给管引入的第二气流彼此相遇,从而产生第三气流 在基本平行于物体的表面的方向上流动,其主表面间隔设置在反应室中,并且控制第一和第二气体流动的流量,从而移动第三和第二气体的位置 气体沿与第一方向不同的第二方向流动。
    • 5. 发明授权
    • Gas dispersion nozzle apparatus for fluidized bed furnace
    • 流化床炉用气体分散喷嘴装置
    • US5354039A
    • 1994-10-11
    • US159936
    • 1993-12-01
    • Hidemitsu TakenoshitaHisashi HattoriYoichiro Hanada
    • Hidemitsu TakenoshitaHisashi HattoriYoichiro Hanada
    • B01J8/44F27B15/10F27D19/00F27B15/00
    • B01J8/44F27B15/10F27D19/00F27D2019/0018F27D2019/0068
    • A gas diffusing nozzle device for a fluidized bed furnace having high thermal resistance and durability especially, in a high-temperature environment and capable of being manufactured at a low cost, fluidizing a fluid layer uniformly using a fluidized gas jet with a low pressure loss and controlling the flow rate of the fluidized gas jet at the outer circumferential and central portions of the interior of a retort (11) in an arbitrary and individual manner. This device is provided with a circumferential gas supply pipe (19), a central gas supply pipe (24), and a circumferential gas diffusing nozzle section (14) and a central gas diffusing nozzle section (15) respectively connected to these two gas supply pipes. Each of the gas diffusing nozzle sections has a plurality of nozzle pipes (16b, 22) with a plurality of downwardly directed fluid gas ejection ports (17) formed in the lower surfaces thereof, and at least one ring-shaped nozzle pipe (16a, 21) joined to the free ends of these nozzle pipes.
    • 一种用于流化床炉的气体扩散喷嘴装置,具有高耐热性和耐久性,特别是在高温环境下,能够以低成本制造,使用低压损失的流化气体射流均匀地流化流体层, 以任意和个别的方式控制蒸馏器(11)内部的外圆周和中心部分的流化气体射流的流速。 该装置设置有分别连接到这两个气体供给管(19),中心气体供给管(24)和周向气体扩散喷嘴部(14)和中心气体扩散喷嘴部(15) 管道。 每个气体扩散喷嘴部分具有多个在其下表面中形成有多个向下指向的流体气体喷射口(17)的喷嘴管(16b,22),并且至少一个环形喷嘴管(16a, 21)连接到这些喷嘴管的自由端。
    • 9. 发明授权
    • Fluidized-bed incineration equipment for removing organic substances
    • 用于去除有机物质的流化床焚烧设备
    • US4708068A
    • 1987-11-24
    • US897969
    • 1986-08-20
    • Hisashi HattoriHidemitsu TakenoshitaYoichiro Hanada
    • Hisashi HattoriHidemitsu TakenoshitaYoichiro Hanada
    • F23G5/30
    • F23G5/30F23G2201/50F23J2217/104
    • An incineration equipment for removing organic substances from various parts of an extruder in a plastics forming machine, has a combustion chamber formed in the upper portion of a heating furnace accommodating a fluidized-bed consisting of refractory particles therein, into which furnace the various parts are to be thrown, and a burning system for heating the fluidized-bed and also for causing gaseous decomposed polymers produced by thermal decomposition of the organic substances and mixed with air fed from the bottom of the furnace through a porous dispersion plate to burn in the combustion chamber. This burning system connects through a single directional control valve with a fuel tank and an air tank, and it comprises a burner having its tip end opened in the combustion chamber, and a temperature sensor for sensing the temperature in the furnace and outputting an operation signal for actuating the directional control valve in accordance with the sensed furnace temperature.
    • 在塑料成形机中从挤出机的各个部分除去有机物质的焚烧装置具有形成在容纳由其中的耐火材料颗粒组成的流化床的加热炉的上部的燃烧室,各个部件 以及用于加热流化床的燃烧系统,以及用于引起通过有机物质的热分解产生的气态分解聚合物,并与通过多孔分散板从炉底进料的空气混合燃烧以在燃烧中燃烧 房间。 该燃烧系统通过单个方向控制阀与燃料箱和空气罐连接,并且其包括其末端在燃烧室中打开的燃烧器和用于感测炉中的温度并输出操作信号的温度传感器 用于根据所感测的炉温驱动方向控制阀。