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    • 9. 发明申请
    • EDGE DETECTION METHOD
    • 边缘检测方法
    • US20100027032A1
    • 2010-02-04
    • US12510591
    • 2009-07-28
    • Masayuki DohiItsuko SakaiTakayuki SakaiShunji KikuchiTakuto InoueAkihiro HoriMasayuki Narita
    • Masayuki DohiItsuko SakaiTakayuki SakaiShunji KikuchiTakuto InoueAkihiro HoriMasayuki Narita
    • G01B11/00
    • G01B11/028H01L21/67259
    • An edge detection method includes preparing a transparent substrate which includes a first main face having a first main region and a first peripheral region and a second main face having a second main region and a second peripheral region, the first peripheral region having an inclination angle of θa1 and the second peripheral region having an inclination angle of θa2, causing measuring light to enter the first peripheral region from a direction perpendicular to the first main region, detecting a non-emitting region where the measuring light is not emitted from the second peripheral region, and detecting an edge of the transparent substrate on the basis of the non-emitting region, wherein if a refractive index of the transparent substrate is n, the inclination angles θa1 and θa2 satisfy the following expression: n×sin(θa1+θa2−arcsin(sin θa1/n))≧1
    • 边缘检测方法包括制备透明基板,其包括具有第一主区域和第一周边区域的第一主面和具有第二主区域和第二周边区域的第二主面,所述第一周边区域具有倾斜角 θa1和第二外围区域具有θa2的倾斜角度,使得测量光从垂直于第一主区域的方向进入第一周边区域,检测测量光不从第二周边区域发射的不发射区域 ,并且基于所述不发射区域检测所述透明基板的边缘,其中如果所述透明基板的折射率为n,则所述倾斜角度θa1和θa2满足以下表达式:nxsin(θa1+θa2-arcsin( sinθa1/ n))> = 1