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    • 4. 发明授权
    • Electrode and Group III nitride-based compound semiconductor light-emitting device having the electrode
    • 具有电极的电极和III族氮化物系化合物半导体发光元件
    • US07646036B2
    • 2010-01-12
    • US12068247
    • 2008-02-04
    • Takahiro KozawaKazuyoshi TomitaToshiya UemuraShigemi Horiuchi
    • Takahiro KozawaKazuyoshi TomitaToshiya UemuraShigemi Horiuchi
    • H01L33/00
    • H01L33/405H01L33/32H01L33/42
    • An object of the invention is to prevent migration of silver contained in an electrode of a Group III nitride-based compound semiconductor light-emitting device. A positive electrode is formed on a p-type layer. In the positive electrode, an ITO light-transmitting electrode layer, a silver alloy reflecting electrode layer, a diffusion-preventing layer in which a Ti layer and a Pt layer are stacked, and a gold thick-film electrode are sequentially stacked on the p-type layer. The reflecting electrode layer made of a silver alloy contains palladium (Pd) and copper (Cu) as additives and also contains oxygen (O). By virtue of this structure, migration of silver from the silver alloy reflecting electrode layer and blackening of the interface between the silver alloy layer and the ITO light-transmitting electrode layer disposed thereunder are prevented, whereby light extraction efficiency can be enhanced.
    • 本发明的目的是防止在III族氮化物系化合物半导体发光元件的电极中含有的银的迁移。 正电极形成在p型层上。 在正极中,将ITO透光电极层,银合金反射电极层,层叠有Ti层和Pt层的扩散防止层和金厚膜电极依次层叠在p 型层。 由银合金制成的反射电极层包含钯(Pd)和铜(Cu)作为添加剂,并且还含有氧(O)。 由于这种结构,防止银从银合金反射电极层的迁移以及布置在其上的银合金层和ITO透光电极层之间的界面变黑,从而可以提高光提取效率。