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    • 2. 发明授权
    • Method for producing quartz glass crucible
    • 生产石英玻璃坩埚的方法
    • US08286447B2
    • 2012-10-16
    • US12169838
    • 2008-07-09
    • Hiroshi KishiMinoru Kanda
    • Hiroshi KishiMinoru Kanda
    • C03B19/01C03B19/06
    • C03B19/095C30B15/10C30B35/002
    • A method of producing a quartz glass crucible by arc melting a quartz powder molded product loaded on the inner side of a mold while performing vacuum suction, includes initiating the melting of quartz powder from the rim edge of a quartz powder molded product, subsequently lowering the arc electrode or raising the mold to heat and melt the sections on the downside of the rim edge. The method is preferably carried out such that the inner surface of the crucible is sealed within a time corresponding to 10% of the total arc time starting from the initiation of arc melting, and the seal thickness is 3 mm or less. The quartz glass crucible thus produced is useful for the pulling up of silicon single crystals and has a uniform glass layer with fewer internal bubbles.
    • 通过电弧熔融装载在模具内侧的石英粉末成形体同时进行真空抽吸来制造石英玻璃坩埚的方法包括从石英粉末成型品的边缘开始熔融石英粉末,随后将 电弧电极或提升模具以加热和熔化边缘边缘的下侧的部分。 该方法优选进行,使得坩埚的内表面在从电弧熔化开始起的总电弧时间的10%的时间内密封,并且密封厚度为3mm以下。 由此制造的石英玻璃坩埚可用于提升硅单晶,并且具有均匀的具有较少内部气泡的玻璃层。
    • 4. 发明申请
    • SILICA GLASS CRUCIBLE, METHOD OF MANUFACTURING THE SAME AND PULLING METHOD
    • 二氧化硅玻璃巧克力,制造方法和拉伸方法
    • US20100319608A1
    • 2010-12-23
    • US12303139
    • 2008-09-29
    • Minoru Kanda
    • Minoru Kanda
    • C30B15/10C03C10/14C30B15/00
    • C03B19/095C30B15/10C30B35/002Y10T117/1024
    • A silica glass crucible including an outer surface layer formed of a bubble-containing silica glass layer and an inner surface layer formed of a silica glass layer whose bubbles are invisible to the naked eye, so as to sufficiently disperse heat from the external radiation thereby preventing temperature irregularity in the silicon melt, and at the same time, exhibit excellent heat conductivity thereby giving a uniformly heated state over a wide range in the entire crucible without taking a long time for increasing the temperature to form a silicon melt, wherein an intermediate layer is interposed between the outer surface layer and the inner surface layer while in the intermediate layer, a bubble-containing silica glass layer (bubble-containing layer) including bubbles with a diameter of 100 μm or smaller by 0.1% or more in the volumetric bubble content and a silica glass layer (transparent glass layer) including the bubbles by 0.05% or less in the volumetric bubble content are laminated.
    • 一种二氧化硅玻璃坩埚,其包括由含气泡的石英玻璃层形成的外表面层和由石墨玻璃层形成的内表面层,所述内表面层的气泡对肉眼不可见,从而充分地分散来自外部辐射的热量,从而防止 硅熔体中的温度不均匀性,并且同时显示出优异的导热性,从而在整个坩埚中在宽范围内均匀地加热状态,而不需要较长时间来提高温度以形成硅熔体,其中中间层 介于外表面层和内表面层之间,而在中间层中,在体积气泡中包含直径为100μm或更小直径为0.1%或更大的气泡的含气泡石英玻璃层(含气泡层) 含量和包含气泡的二氧化硅玻璃层(透明玻璃层)的体积气泡含量为0.05%以下 ted。
    • 5. 发明申请
    • METHOD AND APPARATUS FOR MANUFACTURING VITREOUS SILICA CRUCIBLE
    • 用于制造维生素二氧化硅可溶性的方法和装置
    • US20100229599A1
    • 2010-09-16
    • US12303134
    • 2008-07-25
    • Takeshi FujitaMinoru Kanda
    • Takeshi FujitaMinoru Kanda
    • C03C1/00
    • C03B19/095C30B15/10
    • In order to provide method and apparatus for manufacturing a vitreous silica crucible with little mixing of foreign matter and stable arc during arc melting, the method and apparatus for manufacturing a vitreous silica crucible have a device which blows off air from the side of arc electrodes toward a melting space of a mold, and air discharge ports which discharge the air within the heating furnace, and perform forced supply of air into the melting space during melting to make the atmospheric pressure of the melting space higher than the surroundings, and preferably, form an air pressure difference of 100 Pa or more between the melting space and the surroundings, thereby performing melting.
    • 为了提供在电弧熔化期间少量异物混合和稳定电弧的制造石英玻璃坩埚的方法和装置,用于制造石英玻璃坩埚的方法和装置具有从电弧电极的侧面吹出空气的装置 模具的熔化空间和排出加热炉内的空气的排气口,并且在熔融期间强制地将空气送入熔融空间,使熔融空间的大气压力高于周围环境,优选形成 熔融空间与周围环境之间的空气压差为100Pa以上,进行熔融。
    • 10. 发明申请
    • VITREOUS SILICA CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL AND METHOD OF MANUFACTURING THE SAME
    • 用于拉丝硅单晶的耐火二氧化硅巧克力及其制造方法
    • US20120160159A1
    • 2012-06-28
    • US13394284
    • 2010-08-10
    • Toshiaki SudoMakiko KodamaMinoru KandaHiroshi Kishi
    • Toshiaki SudoMakiko KodamaMinoru KandaHiroshi Kishi
    • C30B15/10C03B20/00
    • C03B19/095C30B15/10C30B29/06C30B29/18C30B35/002Y02P40/57Y10T117/1032
    • The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.
    • 本发明提供一种可以在拉拔硅单晶时抑制坩埚在高温下的侧壁降低的石英玻璃坩埚,以及制造这种石英玻璃坩埚的方法。 玻璃状石英玻璃坩埚10包括设置在坩埚的外表面侧并且含有大量气泡的不透明玻璃状石英层11和设置在内表面侧的透明氧化硅玻璃层12。 不透明玻璃状石英层11包括设置在坩埚上部的第一不透明玻璃状石英部分11a和设置在坩埚下部的第二不透明玻璃状石英部分11b。 第二不透玻璃状二氧化硅部11b的比重为1.7〜2.1,第一不透明玻璃状石英部11a的比重为1.4〜1.8,小于第二不透明玻璃状二氧化硅部的比重。 用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末的粒度分布比第二不透明玻璃状二氧化硅部分11b的粒度分布宽,并且用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末包含比 第二不透明玻璃状石英部分11b。