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1. 发明申请

US20010006172A1 Electrically heated substrate with multiple ceramic parts each having different volume resitivities 有权
公开(公告)号：US20010006172A1
公开(公告)日：2001-07-05
申请号：US09753481
申请日：2001-01-03
申请人： NGK Insulators, Ltd.
发明人： Yuji Katsuda , Kiyoshi Araki , Tsuneaki Ohashi
IPC分类号： H01L021/205
CPC分类号： H05B3/748 , H05B3/283 , H05B3/74 , Y10T29/49083
摘要： A heater comprising a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part, wherein the substrate comprises a first ceramic material and the resistance control part comprises a second ceramic material which has higher volume resistivity than that of the first ceramics.

2. 发明申请

US20030148870A1 Silicon nitride sintered material and process for production thereof 有权
标题翻译：氮化硅烧结材料及其制造方法
公开(公告)号：US20030148870A1
公开(公告)日：2003-08-07
申请号：US10326957
申请日：2002-12-20
申请人： NGK Insulators, Ltd.
发明人： Kiyoshi Araki , Tsuneaki Ohashi , Katsuhiro Inoue , Masaaki Masuda
IPC分类号： C04B035/587
CPC分类号： C04B35/584 , C04B35/5935 , C04B2235/3206 , C04B2235/3217 , C04B2235/3224 , C04B2235/3826 , C04B2235/3839 , C04B2235/3878 , C04B2235/3882 , C04B2235/3895 , C04B2235/5445 , C04B2235/604 , C04B2235/668 , C04B2235/766 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607
摘要： A silicon nitride sintered material includes a polycrystal material having silicon nitride crystal grains and a grain boundary phase. The sintered material contains a Yb element in an amount of 2 to 30% by weight in terms of its oxide and an Al element in an amount of 1 to 20% by weight in terms of its oxide and has a thermal conductivity of 40 W/mK or less at room temperature, a resistivity of 1null105 to 1null1012 nullnullcm at room temperature, and a porosity of 0.5% or less.
摘要翻译：氮化硅烧结体包括具有氮化硅晶粒和晶界相的多晶材料。该烧结体的氧化物含有2〜30重量％的Yb元素，以氧化物换算为1〜20重量％的Al元素，导热系数为40W / mK以下，室温下的电阻率为1×10 5〜1×10 12 OMEGA·cm，孔隙率为0.5％以下。

3. 发明申请

US20030030141A1 Laminated radiation member, power semiconductor apparatus, and method for producing the same 审中-公开
公开(公告)号：US20030030141A1
公开(公告)日：2003-02-13
申请号：US10242862
申请日：2002-09-13
申请人： NGK Insulators, Ltd.
发明人： Kiyoshi Araki , Masahiro Kida , Takahiro Ishikawa , Yuki Bessyo , Takuma Makino
IPC分类号： H01L023/10
CPC分类号： H01L24/32 , C04B37/026 , C04B2235/3206 , C04B2235/3225 , C04B2235/3873 , C04B2235/616 , C04B2235/6565 , C04B2235/9607 , C04B2237/064 , C04B2237/083 , C04B2237/121 , C04B2237/122 , C04B2237/125 , C04B2237/127 , C04B2237/128 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/407 , C04B2237/56 , C04B2237/704 , C04B2237/706 , C04B2237/72 , C23C4/02 , C23C4/08 , C23C6/00 , C23C24/10 , C23C24/106 , H01L23/3733 , H01L23/3735 , H01L23/3736 , H01L23/473 , H01L24/45 , H01L24/48 , H01L2224/451 , H01L2224/45124 , H01L2224/48091 , H01L2224/73265 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/0132 , H01L2924/01327 , H01L2924/0133 , H01L2924/13055 , H01L2924/15787 , H01L2924/19107 , H01L2924/351 , Y10T428/24917 , Y10T428/24926 , Y10T428/252 , H01L2924/00014 , H01L2924/01004 , H01L2924/01022 , H01L2924/3512 , H01L2924/00 , H01L2924/00015
摘要： A laminated radiation member includes a radiation plate, an insulation substrate bonded to the upper surface of the radiation plate and an electrode provided on the upper surface of the insulation substrate. The laminated radiation member is made by a method including the steps of surface treating a bonding surface of the radiation plate and/or the insulation substrate, interposing ceramic particles surface treated to assure wettability with a hard solder or a metal between the radiation plate and the insulation substrate, disposing a hard solder above and/or below the ceramic particles, heating the hard solder to a temperature higher than the melting point of the solder, penetrating the molten hard solder into spaces between the ceramic particles to react the ceramic particles with the solder to produce a metal base composite material, and bonding the radiation plate and the insulation substrate with the metal base composite material.

4. 发明申请

US20020179192A1 Method of producing anti-corrosion member and anti-corrosion member 审中-公开
标题翻译：生产防腐蚀部件和防腐蚀部件的方法
公开(公告)号：US20020179192A1
公开(公告)日：2002-12-05
申请号：US10116426
申请日：2002-04-04
申请人： NGK Insulators, Ltd.
发明人： Yasufumi Aihara , Keiichiro Watanabe , Kiyoshi Araki
IPC分类号： C23C008/06
CPC分类号： C23C8/06 , C23C8/62 , Y10T428/12556
摘要： A base member made of a metal in which aluminum is included, ceramics in which an aluminum element is included, or a composition member constructed by a metal in which aluminum and ceramics are included, is provided in a container in which a solid fluorine compound such as NaHF2 is filled. Then, the container is heated at a temperature higher than a decomposing temperature of the solid fluorine compound. After that, the base member is subjected to a heat treatment with the decomposed gas of the solid fluorine compound to form a fluoride layer on a surface of the base member. In this manner, it is possible to obtain an anti-corrosion member which shows a high corrosion property with respect to the corrosion gas of halogen series and its plasma, particularly with respect to chlorine gas and its plasma.
摘要翻译：在其中包含固体氟化合物的容器中设置由包含铝的金属制成的基材，包含铝元素的陶瓷或包含铝和陶瓷的金属构成的组合物构件因为填充了NaHF2。然后，在高于固体氟化合物的分解温度的温度下加热容器。之后，用固体氟化合物的分解气体对基材进行热处理，在基材的表面形成氟化物层。以这种方式，可以获得相对于卤素系列及其等离子体的腐蚀气体具有高腐蚀性的防腐蚀部件，特别是对于氯气及其等离子体。

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