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    • 6. 发明申请
    • SCAN LENS, INTERFEROMETRIC MEASURING DEVICE USING SAME
    • 扫描镜头,使用相同的干涉仪测量装置
    • US20140333934A1
    • 2014-11-13
    • US14037782
    • 2013-09-26
    • NATIONAL TAIWAN UNIVERSITY
    • CHIEN-CHUNG TSAISHENG-LUNG HUANG
    • G01B9/02G02B27/14
    • G01B9/02015G01B9/02049G01B9/02058G02B21/0056
    • A scan lens and an interferometric measuring device using the scan lens are disclosed. The scan lens includes a lens set, a beam splitter, and a reflector disposed between the lens set and the beam splitter. During application the applied light beam passes through the lens set of the interferometric measuring device to fall upon the beam splitter where the light beam that passes through the beam splitter is defined as a first light beam and the light beam that is reflected by the beam splitter is defined as a second light beam. The first light beam is projected onto the test object. The second light beam is projected onto the reflector. The second light beam reflected by the reflector and the first light beam reflected or scattered by the test object will interfere with each other to form interference patterns for measuring the test object.
    • 公开了一种使用扫描透镜的扫描透镜和干涉测量装置。 扫描透镜包括透镜组,分束器和设置在透镜组和分束器之间的反射器。 在施加期间,所施加的光束通过干涉测量装置的透镜组,落在分束器上,其中穿过分束器的光束被定义为第一光束,并且光束被分束器 被定义为第二光束。 将第一光束投射到测试对象上。 第二光束被投射到反射器上。 由反射体反射的第二光束和受测物体反射或散射的第一光束将彼此干涉,形成用于测量被测物体的干涉图案。