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    • 5. 发明授权
    • Refining and analysis of material using horizontal cold-crucible induction levitation melting
    • 使用水平冷坩埚诱导悬浮熔化的材料的精炼和分析
    • US06210478B1
    • 2001-04-03
    • US09346133
    • 1999-07-09
    • Bernard Patrick BewlayDon Mark LipkinDennis Joseph Dalpe
    • Bernard Patrick BewlayDon Mark LipkinDennis Joseph Dalpe
    • C30B1322
    • C30B13/30C30B13/00C30B29/52
    • A method and apparatus for locally and successively melting a material by induction heating using a horizontal floating-zone crucible to refine and/or analyze the material. An electromagnetic field is generated to create a localized molten zone within the material that is at least partially levitated within the crucible. The crucible has an upper peripheral opening so that an upper portion of the molten zone is generally at a higher temperature than the lower portion of the molten zone adjacent the crucible wall. As a result, insoluble inclusions within the material separate and float to the upper portion of the molten zone. The molten zone may be translated longitudinally through the material to drive the inclusions toward one end of the material. The process can be carried out to refine or characterize the material, or to determine the solidus and liquidus temperatures of the material.
    • 一种用于通过感应加热局部且连续地熔化材料的方法和装置,使用水平浮动区坩埚来精炼和/或分析材料。 产生电磁场以产生在坩埚内至少部分悬浮的材料内的局部熔融区。 坩埚具有上周边开口,使得熔融区的上部通常处于比邻近坩埚壁的熔融区的下部更高的温度。 结果,材料内的不溶性夹杂物分离并漂浮到熔融区的上部。 熔融区域可以纵向平移通过材料以朝向材料的一端驱动夹杂物。 该过程可以进行以细化或表征材料,或确定材料的固相和液相线温度。
    • 7. 发明授权
    • Zone refiner automatic control
    • 区域精炼机自动控制
    • US4080172A
    • 1978-03-21
    • US645186
    • 1975-12-29
    • Louis H. Fricke, Jr.Thomas E. Reichard
    • Louis H. Fricke, Jr.Thomas E. Reichard
    • C30B13/28C30B13/30H01L21/208B01J17/10
    • C30B13/30Y10T117/1008
    • Disclosed is a method and apparatus for the automated growing of a floating zone refined, monocrystalline semiconductor rod. Two images of the molten/solid interface are separately positioned on two sensor arrays which, in addition to providing positioning feedback information, measure the diameter, the length of the molten zone and the "bag" or overhang angle of the molten semiconductor matter. The output of the sensor arrays are processed into signals which operate the zone refiner controls. There is thus provided an automated process for zone refining and monocrystalline rod growth of a semiconductor crystal from a seed crystal beginning with the tapering-out process, through the straight rod growth with a closely controlled diameter portion, to the end of the tapering-in process.
    • 公开了一种用于自动生长浮式精制单晶半导体棒的方法和装置。 熔融/固体界面的两个图像被分开地定位在两个传感器阵列上,除了提供定位反馈信息之外,测量熔融区域的直径,熔融区域的长度和熔融半导体物质的“袋”或悬垂角度。 传感器阵列的输出被处理成操作区域精炼机控制的信号。 因此,提供了一种自动化方法,用于从锥形开始过程开始的晶种的半导体晶体的区域精炼和单晶棒生长,通过具有紧密控制的直径部分的直杆生长到锥形末端 处理。