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1. 发明授权

US06831390B2 Microelectromechanical system with stiff coupling 有权
公开(公告)号：US06831390B2
公开(公告)日：2004-12-14
申请号：US10099464
申请日：2002-03-14
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： G02B2608
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.

2. 发明授权

US06703675B1 Particle filter for partially enclosed microelectromechanical systems 失效
公开(公告)号：US06703675B1
公开(公告)日：2004-03-09
申请号：US10224179
申请日：2002-08-20
申请人： Murray Steven Rodgers
发明人： Murray Steven Rodgers
IPC分类号： H01L2982
CPC分类号： B81B7/0012
摘要： A particle filter for a partially enclosed microelectromechanical systems that include a substrate material having at least one micro-device formed thereon. The particle filter includes a first structural layer forming a filter bottom and a second structural layer forming a filter wall. The filter bottom and filter wall are interconnected by at least one support feature to define a particle trap between the filter wall and filter bottom. The particle trap is a gap formed by mating, but non-interconnected portions of the filter wall and filter bottom that operates to trap and prevent particles from passing beyond the filter bottom into the microelectromechanical system.

3. 发明授权

US06640023B2 Single chip optical cross connect 有权
公开(公告)号：US06640023B2
公开(公告)日：2003-10-28
申请号：US09966966
申请日：2001-09-27
申请人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
发明人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
IPC分类号： G02B635
CPC分类号： G02B6/3582 , B33Y80/00 , G02B6/32 , G02B6/3512 , G02B6/3556 , G02B6/357 , G02B6/358 , G02B6/3644 , G02B6/3672 , H04Q11/0005 , H04Q2011/003
摘要： The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC (10) for switching optical signals (12) between any one of N input optical fibers (14) and any one of N output optical fibers (16) within a compact free space switch interface (18) includes N reflective microstructures (20) built/assembled on a substrate (30) and N positioning systems (40) associated with the reflective microstructures (20) that are also built/assembled on the substrate (30). The positioning systems (40) are operable to both elevate their associated reflective microstructures (20) from the surface of the substrate (30) and to tilt their associated reflective microstructures (20) with at least two degrees of freedom with respect to the surface of the substrate (30) in order to reflect optical signal (12) through the switch interface (18) from any one of the input optical fibers (14) to any one of the output optical fibers (16). The single chip 2N OXC (10) may also include a lid (62) overlying and spaced away from the substrate (30) to provide a hermetically sealed package (60).

4. 发明授权

US06894420B2 Non-linear actuator suspension for microelectromechanical systems 有权
标题翻译：用于微机电系统的非线性致动器悬架
公开(公告)号：US06894420B2
公开(公告)日：2005-05-17
申请号：US10099893
申请日：2002-03-14
申请人： Murray Steven Rodgers
发明人： Murray Steven Rodgers
IPC分类号： H01L27/14 , H02N1/00
CPC分类号： H02N1/008
摘要： The present invention is generally directed to a method and assembly for supporting an actuation apparatus (e.g. a movable electrostatic comb) of a microelectromechanical (MEM) system. A suspension assembly of the present invention generally resists actuation forces inherent to electrostatically controlled MEM systems by utilizing an opposingly-directed non-linear tensile force. This can be accomplished by utilizing a suspension assembly of the invention including a longitudinal center beam and a plurality of first and second lateral beams extending out from lateral sides of the center beam. When the center beam of the suspension assembly is drawn in a first direction due to the actuation force(s), either or both of the plurality of first lateral beams and the plurality of second lateral beams are stretched to exert a non-linear tensile force having a force vector component generally oriented in a second direction generally opposite the first direction.
摘要翻译：本发明一般涉及用于支撑微机电（MEM）系统的致动装置（例如，可动静电梳）的方法和组件。本发明的悬架组件通常利用相对定向的非线性拉力来抵抗静电控制的MEM系统固有的致动力。这可以通过利用本发明的悬架组件来实现，该悬架组件包括纵向中心梁和从中心梁的横向侧面延伸出的多个第一和第二横梁。当由于致动力使悬架组件的中心梁沿第一方向拉动时，多个第一横梁和多个第二横梁中的任一个或两个被拉伸以发挥非线性拉力具有通常沿与第一方向相反的第二方向定向的力矢量分量。

5. 发明授权

US06864618B2 Method for operating a microelectromechanical system using a stiff coupling 有权
标题翻译：使用刚性联轴器操作微机电系统的方法
公开(公告)号：US06864618B2
公开(公告)日：2005-03-08
申请号：US10688024
申请日：2003-10-17
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
摘要翻译：公开了一种微机电系统，其使用致动器组件和杠杆之间的刚性系绳，其与适当的衬底互连，使得杆的第一端可相对于衬底移动，这取决于致动器组件的运动方向。任何适当的负载可以与杠杆互连，包括用于任何光学应用的反射镜。

6. 发明授权

US06824278B2 Self-shadowing MEM structures 失效
标题翻译：自遮蔽MEM结构
公开(公告)号：US06824278B2
公开(公告)日：2004-11-30
申请号：US10098266
申请日：2002-03-15
申请人： Murray Steven Rodgers , Samuel Lee Miller
发明人： Murray Steven Rodgers , Samuel Lee Miller
IPC分类号： G02B508
CPC分类号： G02B6/357 , B81B7/0006 , B81B2201/042 , B81C1/00833 , G02B6/3518
摘要： Self-shadowed microelectromechanical structures such as self-shadowed bond pads, fuses and compliant members and a method of fabricating self-shadowing microelectromechanical structures that anticipate and accommodate blanket metalization process steps are disclosed. In one embodiment, a self-shadowed bond pad (10) configured for shadowing an exposed end (44A) of a shielded interconnect line (44) connected to the bond pad (10) from undesired metalization during a metalization fabrication process step includes electrically connected overlaying first, second and third bond pad areas (42, 72, 92) patterned from respective first, second and third layers (40, 70, 90) of material deposited on a substrate (20). The exposed end (44A) of the interconnect line (44) abuts an edge of the first bond pad area (42). The third bond pad area (92) includes at least one tab portion (94) extending laterally from an edge of the third bond pad area (92) to shadow an area on the substrate (20) including the exposed end (44A) of the interconnect line (44) abutting the edge of the first bond pad area (42).
摘要翻译：公开了自遮蔽微电子机械结构，例如自遮盖接合焊盘，熔断器和柔性元件，以及制造预期并适应覆盖金属化工艺步骤的自阴影微机电结构的方法。在一个实施例中，被配置用于遮蔽在金属化制造工艺步骤期间连接到接合焊盘（10）的屏蔽互连线（44）的暴露端（44A）与不期望的金属化的自阴影接合焊盘（10A），电连接覆盖从沉积在衬底（20）上的材料的相应的第一，第二和第三层（40,70,90）构图的第一，第二和第三接合焊盘区域（42,72,92）。互连线（44）的露出端（44A）邻接第一接合焊盘区域（42）的边缘。第三接合焊盘区域（92）包括从第三接合焊盘区域（92）的边缘横向延伸的至少一个突片部分（94），以遮蔽包括基板（20）的暴露端部（44A）的区域互连线（44）邻接第一接合焊盘区域（42）的边缘。

7. 发明授权

US06624548B1 Apparatus to position a microelectromechanical platform 失效
标题翻译：用于定位微机电平台的装置
公开(公告)号：US06624548B1
公开(公告)日：2003-09-23
申请号：US09964922
申请日：2001-09-26
申请人： Samuel Lee Miller , Murray Steven Rodgers
发明人： Samuel Lee Miller , Murray Steven Rodgers
IPC分类号： H03H3732
CPC分类号： H02N1/008
摘要： The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate the positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.
摘要翻译：本发明包括微机电定位器，以实现平台的基本平移定位而无需旋转运动，从而在运动期间保持平台的恒定的角度定向。定位器的连杆机构可以包括平行四边形连杆以约束平台的旋转运动。这种连接件还可以包括在连接枢轴处的弯曲铰链或其他转动接头，以消除对摩擦表面的需要。可以使用多个连杆机构来实现平台具有两个自由度的平移运动。可以使用各种手段来驱动定位器。连杆机构与旋转式静电执行机构的锚固连接件的独立驱动可用于提供平台受控的平移运动。

8. 发明授权

US06621681B2 Low voltage control of MEM actuators 有权
标题翻译： MEM执行器的低压控制
公开(公告)号：US06621681B2
公开(公告)日：2003-09-16
申请号：US10012827
申请日：2001-12-05
申请人： Murray Steven Rodgers , Samuel Lee Miller
发明人： Murray Steven Rodgers , Samuel Lee Miller
IPC分类号： H05F300
CPC分类号： G02B26/0841
摘要： A low voltage method and system for controlling electrically activated microelectromechanical (MEM) actuators such as electrostatic comb actuators in reflective microstructure positioning systems are provided. In one embodiment, a low voltage control system (110) includes a single fixed DC voltage source (14) and a plurality of variable DC voltage sources (16). The fixed DC voltage source (14) is electrically connected to commonly connected first terminals (12a) of a plurality of MEM actuators (12) between the MEM actuators (12) and a reference potential (18). Each variable DC voltage source (16) is associated with a separate MEM actuator (12) and is electrically connected between the reference potential (18) and a second terminal (12b) of its associated MEM actuator (12). The fixed DC voltage source supplies a fixed DC voltage that is common to the MEM actuators (12). Each variable DC source (16) supplies a controllable DC voltage to its associated MEM actuator (12). The fixed and controllable voltages are selected to permit control of the variable DC voltage sources (16) using inexpensive control electronics.
摘要翻译：提供了用于控制电激活微机电（MEM）致动器的低电压方法和系统，例如反射微结构定位系统中的静电梳状致动器。在一个实施例中，低压控制系统（110）包括单个固定DC电压源（14）和多个可变直流电压源（16）。固定直流电压源（14）电连接到MEM致动器（12）和参考电位（18）之间的多个MEM致动器（12）的共同连接的第一端子（12a）。每个可变直流电压源（16）与单独的MEM致动器（12）相关联，并且电连接在其相关的MEM致动器（12）的参考电位（18）和第二端子（12b）之间。固定的DC电压源提供与MEM致动器（12）通用的固定DC电压。每个可变直流电源（16）向其相关的MEM致动器（12）提供可控的直流电压。选择固定和可控电压以允许使用廉价的控制电子装置来控制可变直流电压源（16）。

9. 发明授权

US06545385B2 Microelectromechanical apparatus for elevating and tilting a platform 有权
标题翻译：用于升降平台的微机电装置
公开(公告)号：US06545385B2
公开(公告)日：2003-04-08
申请号：US09827858
申请日：2001-04-05
申请人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Jeffry J. Sniegowski , Stephen M. Barnes
发明人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Jeffry J. Sniegowski , Stephen M. Barnes
IPC分类号： H02N100
CPC分类号： B81B3/004 , B81B3/0062 , B81B2201/038 , B81B2201/045 , B81B2203/0136 , B81B2203/0307 , B81B2203/053 , B81B2203/058 , G02B6/122 , G02B6/3518 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/0841 , G02B2006/12104 , G11B7/0927 , H02N1/006 , H02N1/008
摘要： A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.
摘要翻译：公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

10. 发明授权

US07055975B2 Microelectromechanical system with non-collinear force compensation 失效
公开(公告)号：US07055975B2
公开(公告)日：2006-06-06
申请号：US10097177
申请日：2002-03-12
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B7/182 , H02K5/00
CPC分类号： G02B7/182 , G02B26/0833 , G02B26/0841 , Y10S359/904
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

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