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1. 发明授权

US5186907A Apparatus for treating organic waste gas 失效
标题翻译：用于处理有机废气的装置
公开(公告)号：US5186907A
公开(公告)日：1993-02-16
申请号：US149155
申请日：1988-01-27
申请人： Motonori Yanagi , Masaharu Hama , Takaaki Fukumoto , Miki Tsukaguchi
发明人： Motonori Yanagi , Masaharu Hama , Takaaki Fukumoto , Miki Tsukaguchi
IPC分类号： B01D53/72 , B01J19/12 , C01B13/10
CPC分类号： C01B13/10 , B01D53/72 , B01J19/123
摘要： An apparatus for treating an organic waste gas has an oxidizing means for contacting the waste gas with an oxidizing agent to effect primary oxidation and form a primary oxidation product. An ultraviolet wave generator inadiates the primary reaction product with UV light in the near UV range to effect secondary oxidation of the primary reaction product.
摘要翻译：一种用于处理有机废气的设备具有用于使废气与氧化剂接触以实现初级氧化并形成初级氧化产物的氧化装置。紫外线发生器在近紫外范围内用紫外线照射初级反应产物，以使初级反应产物二次氧化。

2. 发明授权

US4893320A Apparatus for counting particles attached to surfaces of a solid 失效
标题翻译：用于计数附着在固体表面上的颗粒的装置
公开(公告)号：US4893320A
公开(公告)日：1990-01-09
申请号：US246743
申请日：1988-09-20
申请人： Motonori Yanagi , Masaharu Hama , Nobuyoshi Hattori , Takaaki Fukumoto
发明人： Motonori Yanagi , Masaharu Hama , Nobuyoshi Hattori , Takaaki Fukumoto
IPC分类号： G01D5/48 , G01N15/02 , G01N15/06 , G01N15/10
CPC分类号： G01N15/10 , G01N2015/0238
摘要： An apparatus for counting particles attached to surfaces of a solid is disclosed which includes an external tank, an internal tank disposed within the external tank for hermetically accommodating a measuring liquid into which a sample having particles attached to the surfaces thereof is to be immersed, a driving mechanism for rotating the internal tank with respect to the external tank, sonic wave generators provided on the external tank for generating sonic waves having a plurality of different frequencies toward the internal tank, and a measuring mechanism connectable to the internal tank in a hermetic fashion for counting the number of particles in the measuring liquid removed from the sample by the sonic waves generated from the sonic wave generators.
摘要翻译：公开了一种用于计数附着在固体表面上的颗粒的装置，其包括外部罐，设置在外部罐内的内部容器，用于气密地容纳测量液体，其中附着有表面的颗粒的样品将被浸入其中，用于使内部罐相对于外部罐旋转的驱动机构，设置在外部罐上的声波发生器，用于产生具有多个不同频率的声波朝向内部容器;以及测量机构，其以密封方式连接到内部罐用于通过由声波发生器产生的声波来计数从样品中除去的测量液体中的颗粒数。

3. 发明授权

US4941489A Carrier cleaning and drying apparatus 失效
标题翻译：载体清洗和干燥装置
公开(公告)号：US4941489A
公开(公告)日：1990-07-17
申请号：US402988
申请日：1989-09-05
申请人： Yasuo Kamimura , Toshiaki Ohmori , Motonori Yanagi , Takaaki Fukumoto , Masaharu Hama
发明人： Yasuo Kamimura , Toshiaki Ohmori , Motonori Yanagi , Takaaki Fukumoto , Masaharu Hama
IPC分类号： B08B3/02 , B08B3/10 , H01L21/00
CPC分类号： H01L21/67028 , B08B3/02 , B08B3/10 , Y10S134/902
摘要： A carrier cleaning and drying apparatus for cleaning and drying a wafer processing carrier has a cleaning tank for accommodating the carrier and a high-pressure injection nozzle disposed in an upper portion of the cleaning tank and for injecting a pressurized cleaning solution. This high-pressure injection nozzle is moved within a plane and the cleaning solution is injected at high pressure therefrom, thereby removing dust adhering to the inner and outer surfaces of the carrier by means of the force of injection. A supporting and rotating mechanism portion is also provided which, during cleaning of the carrier, swings the carrier at a predetermined angle, and, after cleaning, effects drying by spinning the carrier at high speed.
摘要翻译：用于清洁和干燥晶片处理载体的载体清洁和干燥装置具有用于容纳载体的清洗槽和设置在清洗槽的上部并用于注入加压清洗溶液的高压喷嘴。该高压注射喷嘴在平面内移动，并且清洗溶液以高压注射，从而通过注射力除去附着在载体的内表面和外表面上的灰尘。还提供支撑和旋转机构部分，其在载体的清洁期间以预定角度摆动载体，并且在清洁之后，通过高速旋转载体来实现干燥。

4. 发明授权

US4569224A Device for measuring the absolute value of the density of salts in atmosphere 失效
标题翻译：用于测量大气中盐密度绝对值的装置
公开(公告)号：US4569224A
公开(公告)日：1986-02-11
申请号：US667721
申请日：1984-11-02
申请人： Takaaki Fukumoto , Yasukazu Mukogawa , Masaharu Hama , Motonori Yanagi
发明人： Takaaki Fukumoto , Yasukazu Mukogawa , Masaharu Hama , Motonori Yanagi
IPC分类号： G01N27/28 , G01N27/416 , G01N33/00 , G01N27/26
CPC分类号： G01N33/0011
摘要： A device for measuring the absolute value of the density of salts in atmosphere, which comprises: an airtight water tank containing super pure water of a predetermined quantity; a means for bubbling a predetermined quantity of air in atmosphere for a predetermined time into the super pure water to make the salts in the air dissolve in the water; a means for exhausting the super pure water after the bubbling; and a sodium ion analyzer for measuring the density of sodium ions in the exhausted super pure water of a predetermined quantity.
摘要翻译：一种用于测量大气中盐密度的绝对值的装置，包括：含有预定量的超纯水的气密水箱; 用于将大气中预定量的空气在预定时间内鼓泡超过纯水的方法，使空气中的盐溶于水中; 在起泡后排出超纯水的方法; 以及用于测定预定量的排出的超纯水中的钠离子的密度的钠离子分析仪。

5. 发明授权

US5053064A Air conditioning apparatus for a clean room 失效
标题翻译：洁净室的空调设备
公开(公告)号：US5053064A
公开(公告)日：1991-10-01
申请号：US596544
申请日：1990-10-11
申请人： Masaharu Hama , Takaaki Fukumoto
发明人： Masaharu Hama , Takaaki Fukumoto
IPC分类号： B01D53/30 , B01D53/34 , F24F3/16 , F24F7/06
CPC分类号： B01D53/346 , B01D53/30 , F24F3/161
摘要： An air conditioning apparatus for a clean room has a filter for removing harmful chemicals provided in the return opening of an air-conditioner. In normal operation where there is no chemical leakage, circulating air in the clean room by-passes the filter. When chemicals and the like leak, the circulating air is caused to pass through the filter by operating shutters in order to remove the chemical mist and the like contained in the circulating air.
摘要翻译：用于洁净室的空调装置具有用于除去设置在空调的返回口中的有害化学物质的过滤器。在没有化学品泄漏的正常操作中，洁净室内的循环空气绕过滤器。当化学品等泄漏时，通过操作百叶窗使循环空气通过过滤器，以除去循环空气中所含的化学雾等。

6. 发明授权

US4868996A Method and apparatus for vapor drying 失效
标题翻译：蒸气干燥的方法和装置
公开(公告)号：US4868996A
公开(公告)日：1989-09-26
申请号：US172310
申请日：1988-03-23
申请人： Toshiaki Ohmori , Masaharu Hama , Takaaki Fukumoto
发明人： Toshiaki Ohmori , Masaharu Hama , Takaaki Fukumoto
IPC分类号： F26B21/14 , H01L21/00 , H01L21/304 , H01L21/306
CPC分类号： H01L21/02052 , F26B21/145 , H01L21/67034
摘要： An object to be dried is cooled and then held within an atmosphere of a drying medium vapor, until the temperature of the surface of the object rises to the temperature of the vapor.
摘要翻译：将待干燥的物体冷却，然后保持在干燥介质蒸气的气氛中，直到物体表面的温度升高到蒸汽的温度。

7. 发明授权

US4834137A Safety device for vessels of compressed gases 失效
标题翻译：压缩气体容器的安全装置
公开(公告)号：US4834137A
公开(公告)日：1989-05-30
申请号：US239764
申请日：1988-09-02
申请人： Toshiaki Kawaguchi , Tsutomu Sasaki , Takaaki Fukumoto , Yutaka Funada , Isao Kubota , Masaharu Hama , Nobuyoshi Terada
发明人： Toshiaki Kawaguchi , Tsutomu Sasaki , Takaaki Fukumoto , Yutaka Funada , Isao Kubota , Masaharu Hama , Nobuyoshi Terada
IPC分类号： F17C13/12 , G01M3/22
CPC分类号： G01M3/224 , F17C13/123 , F17C2205/0308 , F17C2205/0326 , F17C2205/0329 , F17C2205/0385 , F17C2205/0394 , F17C2221/014 , F17C2221/015 , F17C2221/016 , F17C2221/017 , F17C2221/03 , F17C2223/0123 , F17C2227/044 , F17C2250/0452 , F17C2250/0636 , F17C2260/037 , F17C2260/038 , Y10T137/5762 , Y10T137/7065 , Y10T137/8326
摘要： A safety device for vessels of compressed gases is disclosed which comprises a cap enclosing the valve of the vessel, a port formed in the wall of the cap for passing a nozzle attached to the valve, a handling member for rotating the handle of the valve from outside of the cap, a purge gas introducing and exhausting ports formed in the wall of the cap, and a detector disposed in the middle of the exhausting pipe coupled to the purge gas exhausting port. The handling member comprises a shaft vertically extending through and slidably supported by the ceiling of the cap, a horizontal disk secured to the lower end of the shaft, and four circumferentially equally spaced vertically extending fingers fixedly secured to the circumferential portion of the lower surface of the disk, which disengagably engage with the grooves formed on the circumference of the handle. The cap is divided into bell-shaped upper half and hollow cylindrical lower half which abut at a horizontal plane passing through the axis of the port for the nozzle letting out the gas from the valve. Alternatively, the fingers may be bent inwardly and rotatably secured to the horizontal disk of the handling member. In this case, the inwardly bent portions of the fingers are held together by an annular clip to engage the straight portions of the fingers with the grooves of the handle of the valve, and the cap is divided into right and left symmetric halves which are detachably coupled together at a vertical plane passing through the axis of the cap.
摘要翻译：公开了一种用于压缩气体的容器的安全装置，其包括封闭容器的阀的盖，形成在盖的壁中的端口，用于使附接到阀的喷嘴通过，用于使阀的手柄旋转的操作构件在盖的外部，形成在盖的壁中的吹扫气体引入和排出口，以及设置在排气管的中间的检测器，其耦合到净化气体排出口。处理构件包括竖直延伸穿过并且可滑动地由盖的天花板支撑的轴，固定到轴的下端的水平盘和固定地固定到轴的下表面的圆周部分的四个周向等间隔开的垂直延伸的指状物盘，其可与形成在手柄的圆周上的凹槽分离地接合。盖分为钟形上半部和中空圆柱形下半部，其在水平面上邻接，该水平面穿过端口的轴线，用于喷嘴从气门排出气体。或者，手指可以向内弯曲并且可旋转地固定到处理构件的水平盘。在这种情况下，指状物的向内弯曲的部分通过环形夹子夹持在一起，以将手指的直线部分与阀门的把手的凹槽接合，并且帽子被分成左右对称半部分，其可拆卸地在穿过盖的轴线的垂直平面处联接在一起。

8. 发明授权

US4778584A Liquid filter device 失效
标题翻译：液体过滤装置
公开(公告)号：US4778584A
公开(公告)日：1988-10-18
申请号：US875089
申请日：1986-06-17
申请人： Noboru Inoue , Takaaki Fukumoto , Masaharu Hama , Katsuhiko Tamura , Kimihiko Okaue
发明人： Noboru Inoue , Takaaki Fukumoto , Masaharu Hama , Katsuhiko Tamura , Kimihiko Okaue
IPC分类号： B01D35/06 , B03C5/02 , C02F1/463
CPC分类号： B01D35/06 , B03C5/024 , C02F1/463
摘要： Disclosed is a liquid filter device for effectively eliminating impurities from liquid.Voltage is applied to liquid to break electrostatic coupling of liquid molecules and impurity molecules. The impurity molecules are electrostatically adsorbed by an electrode containing adsorbent having charges different in polarity from those of the impurity molecules.Voltage is applied to liquid to break electrostatic coupling of liquid molecules and impurity molecules. Adsorbent having charges different in polarity from those of the impurity molecules on its surface is provided between a pair of electrodes to electrostatically adsorb the impurity molecules. After the impurity molecules are electrostatically adsorbed, the liquid is filtrated by a filter.Voltage is applied to liquid to eliminate zeta potentials which are potential difference at electric double layers having charges different in polarity from those of impurity particles in interfaces between the impurity particles and the liquid. The impurity particles are electrostatically aggregated, and the liquid is filtrated by a filter.
摘要翻译：公开了一种用于有效地消除液体中的杂质的液体过滤装置。将电压施加到液体以破坏液体分子和杂质分子的静电耦合。杂质分子由含有不同于杂质分子极性电荷的吸附剂的电极静电吸附。将电压施加到液体以破坏液体分子和杂质分子的静电耦合。具有与其表面上的杂质分子极性不同的电荷的吸附剂设置在一对电极之间以静电吸附杂质分子。杂质分子被静电吸附后，用过滤器过滤液体。将电压施加到液体以消除作为杂质粒子和液体之间的界面中杂质粒子的极性不同的电荷的双电层的电位差的ζ电位。杂质颗粒被静电聚集，并通过过滤器过滤液体。

9. 发明授权

US4600888A Device for continuously monitoring the density of atmospheric sodium ions 失效
标题翻译：用于连续监测大气钠离子浓度的装置
公开(公告)号：US4600888A
公开(公告)日：1986-07-15
申请号：US587788
申请日：1984-03-09
申请人： Takaaki Fukumoto , Masaharu Hama , Shinpei Kayano
发明人： Takaaki Fukumoto , Masaharu Hama , Shinpei Kayano
IPC分类号： G01N27/06 , G01N27/416 , G01N33/18 , G01N27/08 , G01N27/28
CPC分类号： G01N27/4162
摘要： A device for continuously monitoring variations of the density of sodium ions borne by atmospheric air. A water tank is provided having a fixed volume with a top thereof opened to the atmosphere. Pure water, having a resistivity of at least 15 M.OMEGA..multidot.cm is continuously supplied into the tank and extracted therefrom at the same rate. The conductivity or resistivity of the extracted water is measured to determine the sodium ion concentration in the air. For small densities, a sodium ion electrode meter can be employed for measuring the sodium ion density.
摘要翻译：用于连续监测由大气空气承载的钠离子密度的变化的装置。提供具有固定体积的水箱，其顶部向大气开放。将电阻率至少为15M的OMEGA xcm的纯水连续地供入罐中并以相同的速率从其中提取。测量提取水的电导率或电阻率以确定空气中的钠离子浓度。对于小密度，可以使用钠离子电极计来测量钠离子密度。

10. 发明授权

US3980508A Process of producing semiconductor device 失效
标题翻译：半导体器件制造工艺
公开(公告)号：US3980508A
公开(公告)日：1976-09-14
申请号：US510912
申请日：1974-10-01
申请人： Saburo Takamiya , Masaharu Hama , Akihiro Kondo
发明人： Saburo Takamiya , Masaharu Hama , Akihiro Kondo
IPC分类号： H01L21/329 , H01L21/225 , H01L21/306 , H01L21/308 , H01L29/06
CPC分类号： H01L21/308 , H01L21/2255 , H01L21/30604 , H01L29/0657 , Y10S438/978
摘要： An SiO.sub.2 film doped with an impurity is formed on at least one portion of a surface of a semiconductor wafer. The wafer is selectively etched after a protective film for selective etching is disposed into a predetermined pattern on the SiO.sub.2 film. The impurity included in the SiO.sub.2 film can be diffused into the wafer to form a PN junction in the latter. Then the wafer is selectively etched until that surface of the wafer to which the PN junction is exposed is bevelled.
摘要翻译：在半导体晶片的表面的至少一部分上形成掺杂有杂质的SiO 2膜。在用于选择性蚀刻的保护膜设置在SiO 2膜上的预定图案中之后，选择性地蚀刻晶片。包含在SiO 2膜中的杂质可以扩散到晶片中，以在后者中形成PN结。然后选择性地蚀刻晶片，直到露出PN结的晶片的表面被斜切。

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