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1. 外观设计

USD571385S1 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：USD571385S1
公开(公告)日：2008-06-17
申请号：US29266560
申请日：2006-09-25
申请人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
设计人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
CPC分类号： H01J2237/28

2. 发明申请

US20060038125A1 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system 有权
标题翻译：电荷粒子束显微镜，带电粒子束显微镜，临界尺寸测量和临界尺寸测量系统
公开(公告)号：US20060038125A1
公开(公告)日：2006-02-23
申请号：US11189897
申请日：2005-07-27
申请人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
发明人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
IPC分类号： G21K7/00
CPC分类号： H01J37/265 , G01N23/22 , H01J37/222 , H01J37/263 , H01J2237/223 , H01J2237/24592 , H01J2237/2823 , H01J2237/2826
摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first images whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknowns is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.
摘要翻译：在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。为了实现这一点，记录实际测量样本的倍率的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用图像分析来分析第一图像的第二图像的放大率。由此，实际测定第2图像的放大率。然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

3. 发明授权

US07372051B2 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system 有权
标题翻译：电荷粒子束显微镜，带电粒子束显微镜，临界尺寸测量和临界尺寸测量系统
公开(公告)号：US07372051B2
公开(公告)日：2008-05-13
申请号：US11189897
申请日：2005-07-27
申请人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
发明人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
IPC分类号： G21K7/00 , H01J37/26
CPC分类号： H01J37/265 , G01N23/22 , H01J37/222 , H01J37/263 , H01J2237/223 , H01J2237/24592 , H01J2237/2823 , H01J2237/2826
摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first image, whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknown, is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.
摘要翻译：在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。为了实现这一点，记录实际测量样本的放大倍数的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用第一图像来分析第一图像的第二图像的放大率图像分析。由此，实际测定第2图像的放大率。然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

4. 发明授权

US07372029B2 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07372029B2
公开(公告)日：2008-05-13
申请号：US11806120
申请日：2007-05-30
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
摘要翻译：扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元通过扫描一次电子束。

5. 发明申请

US20070228277A1 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20070228277A1
公开(公告)日：2007-10-04
申请号：US11806120
申请日：2007-05-30
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G01N23/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
摘要翻译：扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元通过扫描一次电子束。

6. 发明授权

US06531697B1 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06531697B1
公开(公告)日：2003-03-11
申请号：US09259334
申请日：1999-03-01
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3700
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

7. 发明授权

US07227144B2 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07227144B2
公开(公告)日：2007-06-05
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

8. 发明申请

US20060151701A1 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20060151701A1
公开(公告)日：2006-07-13
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM (2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

9. 发明授权

US06822233B2 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06822233B2
公开(公告)日：2004-11-23
申请号：US10346138
申请日：2003-01-17
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3704
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

10. 发明授权

US08588499B2 Image processing method, image processing system, and X-ray computed tomography system 有权
标题翻译：图像处理方法，图像处理系统和X射线计算机断层摄影系统
公开(公告)号：US08588499B2
公开(公告)日：2013-11-19
申请号：US13810034
申请日：2011-07-14
申请人： Takashi Kubo , Takahito Hashimoto , Toshie Yaguchi , Norio Baba
发明人： Takashi Kubo , Takahito Hashimoto , Toshie Yaguchi , Norio Baba
IPC分类号： G06K9/00
CPC分类号： G06T11/003 , G01N23/046 , G01N2223/419 , G06T11/006 , G06T2211/424 , H01J37/20 , H01J37/222 , H01J37/26 , H01J2237/20207
摘要： Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means, in an electron microscope having an imaging device and a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tiled image; a means for aligning the position of said tilted images; a means for generating an initial reconstructed image based on said tilted images; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted images and the projection images; a means for determining a processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image in each of the above-mentioned priorities.
摘要翻译：公开了图像处理：显着减少重建图像中的假图像和丢失图像，提高重建精度; 并且可以应用于由多个部件组成的观察对象和具有未知数量的结构组成的样品。一种图像处理装置具有：具有成像装置的电子显微镜和倾斜待观察物体的倾斜装置的装置，用于以角度步骤倾斜所述被观察物体，并存储所获得的平铺图像; 用于对准所述倾斜图像的位置的装置; 用于基于所述倾斜图像生成初始重建图像的装置; 用于以任意定义的角度投影所述初始重建图像并产生多个投影图像的装置; 用于计算倾斜图像和投影图像之间的对应像素中的误差的装置; 用于根据所述错误确定处理优先级的装置; 用于计算每个灰度级的密度的装置; 用于从所述密度确定处理优先级的装置; 以及用于在上述每个优先级中改变初始重构图像中的每个像素的浓度值的装置。

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