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    • 1. 发明授权
    • Photodetector having first and second antenna areas with patterns having different cycle intervals
    • 光检测器具有第一和第二天线区域,其图案具有不同的周期间隔
    • US07557336B2
    • 2009-07-07
    • US11798040
    • 2007-05-09
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • H01L31/00
    • H01L31/02162
    • When light is made incident into antenna layers 11a, 11b, and 11c of a photodetector 1, specific wavelength components of light contained in the incident light combine with surface plasmons of the antenna layers 11a, 11b, and 11c, and surface plasmon resonance occurs. Thereby, near-field lights are outputted from through-holes 13 of the antenna layers 11a, 11b, and 11c. The near-field light outputted from each through-hole 13 reaches a light absorbing layer 4 via light receiving surfaces 4a, 4b, and 4c. The light absorbing layer 4 generates a charge of an amount according to the amount of received light. Since cycle intervals Λa, Λb, and Λc of convex portions 12 in the antenna layers 11a, 11b, and 11c are different from each other, the wavelength component of light that combines with a surface plasmon differs in each of the antenna layers 11a, 11b, and 11c. Consequently, a plurality of wavelength components of light can be detected.
    • 当光入射到光电检测器1的天线层11a,11b和11c中时,入射光中包含的光的特定波长分量与天线层11a,11b和11c的表面等离子体相结合,并发生表面等离子体共振。 由此,从天线层11a,11b,11c的通孔13输出近场光。 从每个通孔13输出的近场光通过光接收表面4a,4b和4c到达光吸收层4。 光吸收层4产生与接收光量相关的量的电荷。 由于天线层11a,11b和11c中的凸部12的周期间隔Lambda,Lambdab和Lambdac彼此不同,所以在每个天线层11a,11b中与表面等离子体的组合的光的波长成分不同 ,和11c。 因此,可以检测多个波长分量的光。
    • 2. 发明申请
    • Photodetector
    • 光电检测器
    • US20070262239A1
    • 2007-11-15
    • US11798040
    • 2007-05-09
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • H01L27/00
    • H01L31/02162
    • When light is made incident into antenna layers 11a, 11b, and 11c of a photodetector 1, specific wavelength components of light contained in the incident light combine with surface plasmons of the antenna layers 11a, 11b, and 11c, and surface plasmon resonance occurs. Thereby, near-field lights are outputted from through-holes 13 of the antenna layers 11a, 11b, and 11c. The near-field light outputted from each through-hole 13 reaches a light absorbing layer 4 via light receiving surfaces 4a, 4b, and 4c. The light absorbing layer 4 generates a charge of an amount according to the amount of received light. Since cycle intervals Λa, Λb, and Λc of convex portions 12 in the antenna layers 11a, 11b, and 11c are different from each other, the wavelength component of light that combines with a surface plasmon differs in each of the antenna layers 11a, 11b, and 11c. Consequently, a plurality of wavelength components of light can be detected.
    • 当光入射到光电检测器1的天线层11a,11b和11c中时,入射光中包含的光的特定波长成分与天线层11a,11b和11c的表面等离子体相结合, 并发生表面等离子体共振。 从而,从天线层11a,11b和11c的通孔13输出近场光。 从每个通孔13输出的近场光通过光接收表面4a,4b和4c到达光吸收层4。 光吸收层4产生与接收光量相关的量的电荷。 由于天线层11a,11b和11c中的凸部12的周期间隔Lambda,Lambdab和Lambdac彼此不同,所以与各表面等离子体的组合的光的波长分量在每个天线层中不同 11 a,11 b,11 c。 因此,可以检测多个波长分量的光。
    • 4. 发明授权
    • Photocathode, electron tube, field assist type photocathode, field assist type photocathode array, and field assist type electron tube
    • 光电阴极,电子管,场辅助型光电阴极,场辅助型光电阴极阵列和场辅助型电子管
    • US08482197B2
    • 2013-07-09
    • US11819599
    • 2007-06-28
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • H01J40/06
    • H01J40/06H01J31/48
    • When light is incident to an antenna layer AA6 of a photocathode AA1, light of a specific wavelength included in the incident light couples with surface plasmons in the antenna layer AA6 whereupon near-field light is outputted from a through hole AA14. The intensity of the output near-field light is proportional to and greater than the intensity of the light of the specific wavelength. The output near-field light has a wavelength that can be absorbed in a photoelectric conversion layer AA4. The photoelectric conversion layer AA4 receives the near-field light outputted from the through hole AA14. A region of the photoelectric conversion layer AA4 around the through hole AA14 absorbs the near-field light and generates photoelectrons (e−) in an amount according to the intensity of the near-field light. The photoelectrons (e−) generated in the photoelectric conversion layer AA4 are outputted to the outside.
    • 当光入射到光电阴极AA1的天线层AA6时,包括在入射光中的特定波长的光与天线层AA6中的表面等离子体激元耦合,从而从通孔AA14输出近场光。 输出近场光的强度与特定波长的光的强度成比例并且大于特定波长的光的强度。 输出的近场光具有可以在光电转换层AA4中吸收的波长。 光电转换层AA4接收从通孔AA14输出的近场光。 通孔AA14周围的光电转换层AA4的区域吸收近场光,并以与近场光强度相对应的量产生光电子(e-)。 在光电转换层AA4中产生的光电子(e-)被输出到外部。
    • 7. 发明授权
    • Photoemitter electron tube and photodetector
    • Photoemitter电子管和光电探测器
    • US5591986A
    • 1997-01-07
    • US299664
    • 1994-09-02
    • Minoru NiigakiToru HirohataTuneo IharaMasami Yamada
    • Minoru NiigakiToru HirohataTuneo IharaMasami Yamada
    • H01J1/34H01L27/14H01J31/00H01L29/49
    • H01J1/34H01J2201/3423
    • The present invention provides a photoemission device excellent in quantum efficiency of photoelectric conversion, a high-sensitive electron tube employing it, and a high-sensitive photodetecting apparatus. A photoemission device of the present invention is arranged to have a photon absorbing layer for absorbing incident photons to excite photoelectrons, an insulator layer layered on one surface of the photon absorbing layer, a lead electrode layered on the insulator layer, and a contact formed on the other surface of the photon absorbing layer to apply a predetermined polarity voltage between the lead electrode and the other surface of the photon absorbing layer, whereby the photoelectrons excited by the incident photons entering the photon absorbing layer and moving toward the one side are made to be emitted by an electric field formed between the lead electrode and the one surface by the predetermined polarity voltage.
    • 本发明提供了一种光电转换量子效率优异的使用它的高灵敏度电子管和高灵敏度光电检测装置的光电发射装置。 本发明的发光装置被配置为具有用于吸收入射光子以激发光电子的光子吸收层,层叠在光子吸收层的一个表面上的绝缘体层,层叠在绝缘体层上的引线电极和形成在 光子吸收层的另一个表面,以在引线电极和光子吸收层的另一个表面之间施加预定的极性电压,由此进入光子吸收层并朝向一侧移动的入射光子激发的光电子被制成 由形成在引线电极和一个表面之间的电场发射预定的极性电压。
    • 9. 发明申请
    • PHOTOCATHODE
    • 光刻胶
    • US20090032797A1
    • 2009-02-05
    • US12177914
    • 2008-07-23
    • Toru HirohataMinoru Niigaki
    • Toru HirohataMinoru Niigaki
    • H01L29/06
    • H01J1/34H01J40/06
    • When to-be-detected light is made incident from a support substrate 2 side of a photocathode E1, a light absorbing layer 3 absorbs this to-be-detected light and produces photoelectrons. However, depending on the thickness and the like of the light absorbing layer 3, the to-be-detected light can be transmitted through the light absorbing layer 3 without being sufficiently absorbed by the light absorbing layer 3. The to-be-detected light transmitted through the light absorbing layer 3 reaches an electron emitting layer 4. A part of the to-be-detected light that has reached the electron emitting layer 4 proceeds toward a through-hole 5a of a contact layer 5. Since the length d1 of a diagonal line of the through-hole 5a is shorter than the wavelength of the to-be-detected light, the to-be-detected light can be suppressed from passing through the through-hole 5a and being emitted to the exterior. The to-be-detected light suppressed from being externally emitted is reflected on the exposed surface of the electron emitting layer 4 and is again made incident into the light absorbing layer 3 to be absorbed. Thereby, a photocathode excellent in light detection sensitivity is realized.
    • 当从光电阴极E1的支撑基板2侧入射待检测的光时,光吸收层3吸收该被检测光并产生光电子。 然而,根据光吸收层3的厚度等,待检测光可以透过光吸收层3而不被光吸收层3充分吸收。待检测的光 通过光吸收层3透射的光到达电子发射层4.到达电子发射层4的被检测光的一部分朝向接触层5的通孔5a前进。由于长度d1 通孔5a的对角线比待检测光的波长短,可以抑制被检测光穿过通孔5a并被发射到外部。 被外部发射抑制的被检测光被反射在电子发射层4的暴露表面上,并再次入射到光吸收层3中以被吸收。 由此,实现了光检测灵敏度优异的光电阴极。
    • 10. 发明授权
    • Photocathode plate and electron tube
    • 光电阴极板和电子管
    • US07176625B2
    • 2007-02-13
    • US10969319
    • 2004-10-21
    • Tomoko MochizukiMinoru NiigakiToru HirohataKuniyoshi Mori
    • Tomoko MochizukiMinoru NiigakiToru HirohataKuniyoshi Mori
    • H01J40/06
    • H01J1/34H01J1/78H01J43/08H01J2231/50
    • Provided are a photocathode plate capable of stably achieving a high sensitive property, and an electron tube using such a photocathode plate.In a photomultiplier tube 1, an insulating layer 63 is formed between a semiconductor electron emission layer 51 in a photocathode plate 23A, and a first electrode 65 electrically connected to an electron releasing portion 59. This insulating layer 63 permits the photocathode plate 23A to be cleaned by heat cleaning at a high temperature, in a stage before formation of an active layer 61 on an exposed region of the semiconductor electron emission layer 51 in the electron releasing portion 59. This makes it feasible to effectively clean the exposed region of the semiconductor electron emission layer 51 in the electron releasing portion 59 and to stabilize the physical properties of the exposed region. In consequence, a higher sensitive property can be stably achieved in the photocathode plate 23A and in the photomultiplier tube 1 using the photocathode plate 23A.
    • 提供能够稳定地实现高灵敏度的光电阴极板和使用这种光电阴极板的电子管。 在光电倍增管1中,在光电阴极板23A中的半导体电子发射层51和与电子释放部分59电连接的第一电极65之间形成绝缘层63。 该绝缘层63允许在电子释放部分59中的半导体电子发射层51的暴露区域上形成有源层61之前的阶段,通过在高温下的热清洗来清洁光电阴极板23A。 这使得有效地清洁电子释放部分59中的半导体电子发射层51的暴露区域并且稳定暴露区域的物理性能是可行的。 因此,在光电阴极板23A和使用光电阴极板23A的光电倍增管1中可以稳定地实现更高的敏感性。